• Journal of the Semiconductor & Display Technology
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• v.19 no.3
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• pp.43-48
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• 2020

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.62 no.6
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• pp.792-797
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• 2013

In a indoor microwave power distribution system, matching-type power dividing switch is proposed and designed with a various power dividing ratio. A matching coaxial cable probe is used behind the output probe for the reflecting power absorption. Reflecting characteristics of the matching coaxial cable probe are calculated by analyzing the S-parameter of this structure. Newly proposed matching-type switch shows a very low return loss less than -30dB at the operating frequency of 2.45GHz with a dividing power ratio of 50.2%. The simulated results by use of 3-stage power divider shows a good agreement with the theoretical estimation for the various combination of the different switching ratio.

• Electrical & Electronic Materials
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• v.10 no.2
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• pp.119-125
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• 1997

In this study, piezoelectric transducers were designed and manufactured using PZT-5A which had relatively high electromechanical coefficient, nondestructive testing system was developed which was able to inspect automatically using stepping motors, PC-Lab, and PC-Scope. The optimum design conditions for NDT were presented and verified comparing PZT-5A probes with comercial probes. It was proved by simulation and experiments that Epoxy is a good material as matching and backing layers. The envelope was reduced 60% with matching layer and 76% with matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error of PZT-5A probe was 2.8%.

• Korean Journal of English Language and Linguistics
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• v.4 no.1
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• pp.103-116
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• 2004

Chomsky (2001) and Kitahara's (2002) suggestion that object shift occurs prior to movement of the νP-subject to SPEC-T is not on the right track with respect to the Merge operation. According to the Merge operation, TP is necessarily created earlier than CP. Chomsky (2001) suggests that the probe-goal relation between T and SUBJ is evaluated in the CP after it is known whether the position of as has become a trace losing its phonological content. However, the FocP is not a phase (CP). So, Chomsky (2001) and Kitahara's (2002) suggestion is not correct in the case of the movement of OBJ to the spec of Foc in English, either. The aim of this paper is to show that the νP-subject must move to SPEC- T prior to the consecutive movement of the wh-object to SPEC-C via object shift in English. This derivation obeys Chomsky's (2001) so-called probe-goal matching condition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.11a
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• pp.245-248
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• 1996

In this study, piezoelectric transducers were designed and manufactured using PZT-5A which had relatively high electromechanical coefficient, NDT system was developed with was able to inspect automatically using stepping motors, PC-Lab, and PC-Scope The optimum design conditions for NDT were presented and verified comparing PZT-5A probes with comercial probes. It was proved with comercial probes. It was proved by simulation and experiments that Epoxy is good as material of matching and backing layers. The envelope was reduced 60% with matching layer and 76% with matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error of PZT-5A probe was 2.8%.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1427-1429
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• 1997

In this study, piezoelectric transducer were designed and manufactured using PZT-5A which have relatively high electromechanical coefficient. A epoxy is a good material as matching and backing layers. The envelope was reduced 60% as using matching layer and 76% as using matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error and resolution of PZT-5A probe were improved as increasing frequency. Envelope was effectively reduced by backing layer but sensitiveness was poor.

• The KIPS Transactions:PartB
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• v.13B no.6 s.109
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• pp.579-584
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• 2006

This paper proposes a nonlinear template matching measure, called counting measure, as a signal detection measure that is defined as the number of on pixels in the spot area. It is applied to classify probes for an on-off type DNA chip, where each probe spot is classified as hybridized or not. The counting measure also incorporates the maximum response search method, where the expected signal is obtained by taking the maximum among the measured responses of the various positions and sizes of the spot template. The counting measure was compared to existing signal detection measures such as the normalized correlation and the median for 2390 patient samples tested on the human papiliomavirus (HPV) DNA chip. The counting measure performed the best regardless of whether or not the maximum response search method was used. The experimental results showed that the counting measure combined with the positional search was the most preferable.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.28 no.8C
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• pp.803-810
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• 2003

This paper addresses an image processing technique for the human papillomavirus (HPV) DNA chip to discriminate whether the probes are hybridized with the target DNA. HPV DNA chip is designed to determine HPV gene-types by using DNA probes for 22 HPV types. In addition to the probes, the HPV DNA chip has markers that always react with the sample DNA. The positions of probe-dots in the final scanned image are fixed relative to the marker- dot locations with a small variation attributable to the accuracy of the dotter and the scanner. The probes are quadruplicated to enhance diagnostic fidelity. frier knowledge including the marker relative distance and the replication information of probes is integrated into the template matching technique with normalized covariance measure. It was demonstrated that the employment of both of the prior knowledges can be accomplished by simply averaging the template matching measures over the positions of the markers and probes. The resulting proposed scheme yields stable marker locating and probe classification.

• Journal of Electrical Engineering and Technology
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• v.13 no.1
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.

• Progress in Superconductivity and Cryogenics
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• v.4 no.2
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• pp.11-15
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• 2002

High speed probe for measurement of sin91e flux quantum circuits is comprised of coaxial cables and microstrip lines in order to carry high speed signals without loss. For the impedance matching between coaxial cable and microstrip line, we have determined the dimension of the microstrip line with 50${\Omega}$ impedance by simulation and then have investigated the effect of line width and cross-sectional shape of signal line, dielectric material, thickness of soldering lead at the coaxial-to-microstrip transition Point, and the an91c between dielectric material and end part of the signal line on the characteristics of signal transmission of the microstrip line. From the simulation, we have found that these all parameter's had influenced on the characteristic of signal transmission on the microstrip line and should be reflected in fabricating high speed probe, We have also determined the dimension of coplanar waveguide to fabricate testing sample for performance test of high speed probe.