• 반도체디스플레이기술학회지
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• 제19권3호
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• pp.43-48
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• 2020

The demand for stable plasma has been on the rise because of the increased delivery power amount in the chamber for improving productivity, and fast and accurate plasma impedance matching become a crucial performance measure for radio frequency (RF) power system in semiconductor manufacturing equipment. In this paper, the overall impedance matching was understood, and voltage and current values were extracted with voltage - current (VI) probe to measure plasma impedance in real-time. Actual matching data were analyzed to derive calibration coefficient for V and I measurements to understand the characteristics of VI probe, and we demonstrated the tendency of RF impedance matching according to changes in load impedance. This preliminary empirical research can contribute to fast RF matching as well as advanced equipment control for the next level of detailed investigation on embedded system based-RF matching controller.

• 전기학회논문지
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• 제62권6호
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• pp.792-797
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• 2013

In a indoor microwave power distribution system, matching-type power dividing switch is proposed and designed with a various power dividing ratio. A matching coaxial cable probe is used behind the output probe for the reflecting power absorption. Reflecting characteristics of the matching coaxial cable probe are calculated by analyzing the S-parameter of this structure. Newly proposed matching-type switch shows a very low return loss less than -30dB at the operating frequency of 2.45GHz with a dividing power ratio of 50.2%. The simulated results by use of 3-stage power divider shows a good agreement with the theoretical estimation for the various combination of the different switching ratio.

• E2M - 전기 전자와 첨단 소재
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• 제10권2호
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• pp.119-125
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• 1997

In this study, piezoelectric transducers were designed and manufactured using PZT-5A which had relatively high electromechanical coefficient, nondestructive testing system was developed which was able to inspect automatically using stepping motors, PC-Lab, and PC-Scope. The optimum design conditions for NDT were presented and verified comparing PZT-5A probes with comercial probes. It was proved by simulation and experiments that Epoxy is a good material as matching and backing layers. The envelope was reduced 60% with matching layer and 76% with matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error of PZT-5A probe was 2.8%.

• 한국영어학회지:영어학
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• 제4권1호
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• pp.103-116
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• 2004

Chomsky (2001) and Kitahara's (2002) suggestion that object shift occurs prior to movement of the νP-subject to SPEC-T is not on the right track with respect to the Merge operation. According to the Merge operation, TP is necessarily created earlier than CP. Chomsky (2001) suggests that the probe-goal relation between T and SUBJ is evaluated in the CP after it is known whether the position of as has become a trace losing its phonological content. However, the FocP is not a phase (CP). So, Chomsky (2001) and Kitahara's (2002) suggestion is not correct in the case of the movement of OBJ to the spec of Foc in English, either. The aim of this paper is to show that the νP-subject must move to SPEC- T prior to the consecutive movement of the wh-object to SPEC-C via object shift in English. This derivation obeys Chomsky's (2001) so-called probe-goal matching condition.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.245-248
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• 1996

In this study, piezoelectric transducers were designed and manufactured using PZT-5A which had relatively high electromechanical coefficient, NDT system was developed with was able to inspect automatically using stepping motors, PC-Lab, and PC-Scope The optimum design conditions for NDT were presented and verified comparing PZT-5A probes with comercial probes. It was proved with comercial probes. It was proved by simulation and experiments that Epoxy is good as material of matching and backing layers. The envelope was reduced 60% with matching layer and 76% with matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error of PZT-5A probe was 2.8%.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1427-1429
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• 1997

In this study, piezoelectric transducer were designed and manufactured using PZT-5A which have relatively high electromechanical coefficient. A epoxy is a good material as matching and backing layers. The envelope was reduced 60% as using matching layer and 76% as using matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error and resolution of PZT-5A probe were improved as increasing frequency. Envelope was effectively reduced by backing layer but sensitiveness was poor.

• 정보처리학회논문지B
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• 제13B권6호
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• pp.579-584
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• 2006

본 연구는 카운팅 정합도라 불리는, 비선형 정합도를 척도로 하는 템플릿 정합법을 이용하여 온-오프 형태 DNA칩의 탐색자를 구분하는 방법을 제안한다. 또한, 스팟 템플릿의 다양한 위치나 크기에 따른 응답의 최대값을 찾는 최대 응답 탐색법을 제안한다. 각 스팟의 교잡반응 여부만을 분류하는 온-오프 형태의 DNA 칩의 탐색자를 구분하는 용도에 제안된 방법을 적용하였다 2390명의 환자에 대한 인유두종 바이러스 DNA 칩 검사에 적용하여, 카운팅 정합도를 기존의 정규상관도나 메디안과 비교하였다. 카운팅 정합도가 최대 응답 탐색법에 관계없이 최고의 성능을 보였다. 실험결과 위치탐색을 결합한 카운팅 정합도가 가장 적절하였다.

• 한국통신학회논문지
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• 제28권8C호
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• pp.803-810
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• 2003

본 논문은 여성 자궁경부암의 원인이 되는 인두유종 바이러스(papillomavirus)를 진단하기 위한 HPY-DNA 칩의 영상으로부터 탐촉자(probe)의 위치를 찾아내고 각 탐촉자에서의 교잡반응(hybridization) 여부를 결정하기 위한영상리 방법의 구현에 관한 것이다. HPV-DNA 칩은 22종의 HPV를 알아내기 위한 탐촉자들과 환자 샘플과 항상 반응하는 마커들로 구성되어 있다. 침 영상에서 탐촉자 들의 위치는 마커와 상대적으로 고정되어 있어서 도터(dotter)와 스캐너(scanner)의 정밀도에 따른 오차만을 갖는다. 한편 각 탐촉자는 진단신뢰도를 높이기 위하여 4번 씩 인쇄된다. 본 논문은 마커들간의 상대거리와 탐촉자의 중복 인쇄라는 사전정보를 템플릿 정합방법과 결합하여 안정적으로 마커를 찾고, 교잡반응 여부를 정확히 분류하는 방법을 제시한다. 정규화된 상관도를 정합도(matching measure)로 채택하여, 마커들의 상대적 위치에 대하여 평균을 취하면 안정적으로 마커를 찾을 수 있다는 것을 실험을 통하여 보인다. 또한 이미 계산된 정합도를 특징(feature) 값으로 사용하여 4개의 중복 탐촉자에 대한 평균 특징 값을 분류(classification)하면 탐촉자의 교잡반응 여부를 정확히 알아낼 수 있다는 실험 결과를 보인다.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.

• 한국초전도ㆍ저온공학회논문지
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• 제4권2호
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• pp.11-15
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• 2002

High speed probe for measurement of sin91e flux quantum circuits is comprised of coaxial cables and microstrip lines in order to carry high speed signals without loss. For the impedance matching between coaxial cable and microstrip line, we have determined the dimension of the microstrip line with 50${\Omega}$ impedance by simulation and then have investigated the effect of line width and cross-sectional shape of signal line, dielectric material, thickness of soldering lead at the coaxial-to-microstrip transition Point, and the an91c between dielectric material and end part of the signal line on the characteristics of signal transmission of the microstrip line. From the simulation, we have found that these all parameter's had influenced on the characteristic of signal transmission on the microstrip line and should be reflected in fabricating high speed probe, We have also determined the dimension of coplanar waveguide to fabricate testing sample for performance test of high speed probe.