• 대한기계학회논문집
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• 제18권8호
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• pp.2081-2087
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• 1994

Touch trigger probes are widely used for inspection purposed in the CMM(Coordinate meauring machine) or machine tool. The errors introduced by measurement probe are fairy systematic, thus can be calibrated and compensated properly. This paper presents a technique for the error calibration and compensation of the probe errors, which can be easily applicable to the manufacturers and users of the measurement probe. The probe coordinate system is defined for the probe error assessment, and a reference sphere ball is measured, and the probe errors are calibrated. The calibrated probe errors are represented in the 3D error map and 2D error map along probing direction. Detail algorithms for the error compensation are proposed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.235.1-235.1
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• 2014

Precise measurement of plasma parameters including density and temperature is the most essential part for understanding plasma characteristics. To persue more accurate measurement, it is very important to understand the intrinsic error of the measurement method. In this paper, we performed the plasma measurement with different method; langmuire probe and cutoff probe. Both measurement technology are known to be exactly correlate with etch other. We conducted the four set of same experiments process by diffrent persons to observe the intrinsic error based on measurement tools. As a result, the cutoff probe is relatively reliable then the Langmuir probe. This difference is analyzed to be intrinsic since it cames from the inevitable error such as manufacturing of probe tip. From this study, we sure that it is good decision to choose cutoff probe as repeatable measurement independent with intrinsic human factor.

• 대한기계학회논문집
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• 제18권9호
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• pp.2358-2367
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• 1994

This paper presents techniques for evaluation and compensation of total measuring errors in a commercial CMM. The probe errors as well as the machine geometric errors are assessed from probing of the mechanical artefacts such as shpere, step, and rings. For the error compensation, the integrated volumetric error equations are considered, including the probe error adn the machine geometric error. The error compensation is performed on the absolute scale coordinate system, in order to overcome the redundant degree of freedom in the CMM with multi-axis probe. A interface box and corresponding software driver are developed for data intercepting/correction between the machine controller and machine, thus the volumetric errors can be compensated in real time with minimum interference to the operating software and hardware of a commercial CMM. The developed system applied to a practical CMM installed on the shop floor, and demonstrated its performance.

• 조명전기설비학회논문지
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• 제23권2호
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• pp.96-102
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• 2009

본 논문에서는 전위강하법을 이용한 접지저항 측정시 전위보조전극의 위치 및 각도의 영향에 대하여 기술하였으며, 측정시 오차를 최소화하는 기법을 제안하였다. 전위강하법은 이론적으로 전위와 전류의 측정원리에 근간을 두고 있으며 측정오차는 주로 보조전극의 위치와 각도에 기인한다. 전위보조전각의 위치에 의한 접지저항 측정값의 상대오차를 분석하기 위해 전류보조전극의 거리를 50[m]로 고정시키고 전위보조전극의 거리를 10[m]에서 50[m]까지 변화시키며 접지저항을 측정하였고 또한 전위보조전극과 전류보조전극 사이의 각도를 30[$^{\circ}$], 45[$^{\circ}$], 60[$^{\circ}$], 90[$^{\circ}$], 180[$^{\circ}$]로 변화시키며 측정하였다. 결과적으로 전위보조전극의 거리 증가 및 전류보조전극과 전위보조전극 사이의 각도가 감소할수록 상대오차가 작게 나타났다. 본 실험결과는 접지시스템의 접지저항을 측정할 때 전위보조전극의 위치를 결정하는데 활용될 수 있다.

• International Journal of Precision Engineering and Manufacturing
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• 제2권2호
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• pp.73-80
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• 2001

The objective of this research is to develop a measurement error model for sculptured surface in On-Machine Measurement(OMM) process based on a closed-loop configuration. The geometric error model of each axis of a vertical CNC machining center is derived using a 4$\times$4 homogeneous transformation matrix. The ideal locations of a touch-type probe for the sculptured surface measurement are calculated from the parametric surface representation and X-, Y- directional geometric errors of the machine. Also the actual coordinates of the probe are calculated by considering the pre-travel variation of a probe and Z-directional geometric errors. Then, the step-by-sep measurement error analysis method is suggested based on a closed-loop configuration of the machining center including workpiece and probe errors. The simulation study shows the simplicity and effectiveness of the proposed error modeling strategy.

• 한국정밀공학회지
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• 제16권10호
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• pp.172-181
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• 1999

The objective of this research is to develop a measurement error model for sculptured surfaces in On-Machine Measurement (OMM) process based on a closed-loop configuration. The geometric error model of each axis of a vertical CNC Machining center is derived using a 4${\times}$4 homogeneous transformation matrix. The ideal locations of a touch-type probe for the scupltured surface measurement are calculated from the parametric surface representation and X-, Y- directional geometric errors of the machine. Also, the actual coordinates of the probe are calculated by considering the pre-travel variation of a probe and Z-directional geometric errors. Then, the step-by-step measurement error analysis method is suggested based on a closed-loop configuration of the machining center including workpiece and probe errors. The simulation study shows the simplicity and effectiveness of the proposed error modeling strategy.

• 한국정밀공학회지
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• 제15권5호
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• pp.34-42
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• 1998

This paper describes an analysis of measuring error of on the machine measuring(OMM) system which directly measures machined surface dimensions using scanning probe on a CNC milling machine. 21 inch TV shadow mask mould clamped to a pallet was measured using PTP(point to point) measuring algorithm in OMM system and the results were compared with those using coordinate measuring machine(CMM). The OMM error was evaluated by probe error, stylus contact error, center shift error, repeatability, work-piece clamping error and etc. The results show that elastic deformation of the pallet is most affecting factor on the measuring error, thus pallet design and clamping method need very careful cosiderations.

• 한국음향학회지
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• 제13권5호
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• pp.40-50
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• 1994

본 논문에서는 3차원 음향 인텐시티 프로브의 고주파 영역에서 발생하는 감도 저하 현상을 보정하는 방법에 대해 연구하였다. 고주파 영역에서 측정오차는 음향 인텐시티 프로브를 구성하는 마이크로폰으로 수음한 신호들의 위상차로 인하여 발생한다. 이 오차는 마이크로폰 사이의 간격보다 측정대상 음향신호의 파장일 작을 경우, 즉 신호의 주파수가 높을수록 크게 발생한다. 이 연구에서는 두개의 마이크로폰으로 구성된 1차원 프로브의 보정법들을 제안하여 그 유효성을 컴퓨터 수치계산으로 검토하였다. 음향 인텐시티 프로브를 구성하는 마이크로폰 사이의 위상차를 음원의 추정된 방향으로 보정하는 방법이 가장 유용하였으며, 이를 3차원 프로브에 적용하여 임의의 방향으로 전파하는 음원에 대해 컴퓨터 수치계산으로 검증하였다. 그 결과, 4개의 마이크로폰을 60mm 간격으로 구성한 3차원 프로브로 1dB 이하의 정밀한 측정이 가능한 주파수 범위가 약 1.2kHz 이였던 것을 제안한 보정방법을 적용한 후, 약 2.8kHz까지 감도가 향상됨이 확인되어 제안한 보정법의 유효성이 증명되었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.576-576
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• 2013

Recently, diagnostics of plasma becomes more important due to requirement of precise control of plasma processing based on measurement of plasma characteristics. The Langmuir probe has been used for the diagnostics but it has an inevitable uncertainty and error sources such as incorrect tip length and RF noise. Instead of the Langmuir probe, various diagnostic methods have been developed and researched. The cutoff probe is promising one for plasma density using microwaves and resonance phenomenon at the plasma frequency. The cutoff probe has various advantages as follows; (i) it is simple and robust, (ii) it uses few assumptions, and (iii) it is free from deposition by reactive gas. However, the cutoff probe also has uncertainty and error sources such as gap between tips, tip length, direction of tip plane, and RF noise. In this study, the uncertainty and error sources in manufacturing both probes and in diagnostics process were analyzed via comparative experiment at various discharge conditions. Furthermore, to reveal the user dependence of both probes, three well trained Ph. D students made the Langmuir probe and the cutoff probe, respectively, and it were analyzed. Thought this study, it is established that reliability and validity of the Langmuir probe and the cutoff probe related with not only the intrinsic characteristics of probes but also probe user.

• 한국공작기계학회논문집
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• 제10권4호
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.