Novel Cylindrical Magnetic Levitation Stage for Rotation as well as Translation along Axles with High Precisions (고정밀 회전 및 축방향 이송을 위한 신개념 원통형 자기부상 스테이지)
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- The Transactions of The Korean Institute of Electrical Engineers
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- v.61 no.12
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- pp.1828-1835
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- 2012