• 센서학회지
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• 제19권4호
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• pp.278-284
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• 2010

Indoor localization for pedestrian is the key technology for caring the elderly, the visually impaired and the handicapped in health care districts. It also becomes essential for the emergency responders where the GPS signal is not available. This paper presents newly developed pedestrian localization system using the gyro sensors, the magnetic compass and pressure sensors. Instead of using the accelerometer, the pedestrian gait is estimated from the gyro sensor measurements and the travel distance is estimated based on the gait kinematics. Fusing the gyro information and the magnetic compass information for heading angle estimation is presented with the error covariance analysis. A pressure sensor is used to identify the floor the pedestrian is walking on. A complete ambulatory system is implemented which estimates the pedestrian's 3D position and the heading.

• 센서학회지
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• 제32권1호
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• pp.31-38
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• 2023

Three-dimensional (3D) micro/nanostructures based on soft elastomers have received extensive attention in recent years, owing to their potential and advanced applicability. Designing and fabricating 3D micro/nanostructures are crucial for applications in diverse engineering fields, such as sensors, harvesting devices, functional surfaces, and adhesive patches. However, because of their structural complexity, fabricating soft-elastomer-based 3D micro/nanostructures with a low cost and simple process remains a challenge. Bio-inspired designs that mimic natural structures, or replicate their micro/nanostructure surfaces, have greatly benefited in terms of low-cost fabrication, scalability, and easy control of geometrical parameters. This review highlights recent advances in 3D micro/nanostructures inspired by nature for diverse potential and advanced applications, including flexible pressure sensors, energy-harvesting devices based on triboelectricity, superhydrophobic/-philic surfaces, and dry/wet adhesive patches.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.171-176
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• 2013

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{\times}5mm{\times}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1375-1377
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• 2001

This paper describes the fabrication and characteristics of CrN thin-film type pessure sensors, in which the sensing elements were deposited on SUS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%) $N_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition($300^{\circ}C$, 3 hr) in Ar-10 %$N_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, $\rho$=1147.65 ${\mu}{\Omega}$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4$\sim$20 mA and the maximum non-linearity is 0.4 %FS and hysteresis is less than 0.2 %FS..

• 전기전자학회논문지
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• 제1권1호
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• pp.1-10
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• 1997

It is well-known that rectangular bulk-Si sensors prepared by etch or epi etch-stop micromachining technology are already in practical use today, but the conventional bulk-Si sensor shows some drawbacks such as large chip size and limited applications as silicon sensor device is to be miniaturized. We consider a circular-shape SOI(Silicon-On-Insulator) micro-cavity technology to facilitate multiple sensors on very small chip, to make device easier to package than conventional sensor like pressure sensor and to provide very high over-pressure capability. This paper demonstrates the cross-functional results for stress analyses(targeting $5{\mu}m$ deflection and 100MPa stress as maximum at various applicable pressure ranges), for finding permissible diaphragm dimension by output sensitivity, and piezoresistive sensor theory from two-type SOI structures where the double SOI structure shows the most feasible deflection and small stress at various ambient pressures. Those results can be compared with the ones of circular-shape bulk-Si based sensor$^{[17]}. The SOI micro-cavity formed the sensors is promising to integrate with calibration, gain stage and controller unit plus high current/high voltage CMOS drivers onto monolithic chip.

• 한국공작기계학회논문집
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• 제17권2호
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• pp.90-96
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• 2008

A pneumatic system was proposed to evaluate displacement accuracy of the pneumatic actuator without external load and to analyze capability of integration of the proposed valve system. The proposed pneumatic system consisted of a combination of pneumatic valves, two proximity sensors, and a programmable logic controller(PLC). The position controller is based on the PLC controller connected with the proximity sensors. Displacement accuracy of the pneumatic cylinder stroke was tested by varying air pressures of the supply and discharge-side and strokes of the pneumatic cylinder. The displacement accuracy of the pneumatic cylinder stroke increased as the supply and discharge side of air pressure increased at the stroke length of 133mm. Also the displacement accuracy increased as the stroke length increased with a fixed supply and discharge side of air pressure of the pneumatic cylinder as 3.5 and $4.5kg/cm^2$, respectively. The most accurate displacement of the pneumatic cylinder(i.e., standard deviation of 0.01 mm) was obtained at the supply and discharge side of air pressure of 4.0 and $5.0kg/cm^2$, respectively, and strokes of 170 and 190 mm among arbitrarily selected supply and discharge side air pressures and strokes.

• International journal of advanced smart convergence
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• 제12권4호
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• pp.378-385
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• 2023

The importance of wearing respiratory protective equipment has been highlighted even more during the COVID-19 pandemic. Even if the suitability of respiratory protection has been confirmed through testing in a laboratory environment, there remains the potential for leakage points in the respirators due to improper application by the wearer, damage to the equipment, or sudden movements in real working conditions. In this paper, we propose a method to detect the occurrence of leak holes by measuring the pressure changes inside the mask according to the wearer's breathing activity by attaching an IoT sensor to a full-face respirator. We designed 9 experimental scenarios by adjusting the degree of leak holes of the respirator and the breathing cycle time, and acquired respiratory data for the wearer of the respirator accordingly. Additionally, we analyzed the respiratory data to identify the duration and pressure change range for each breath, utilizing this data to train a neural network model for detecting leak holes in the respirator. The experimental results applying the developed neural network model showed a sensitivity of 100%, specificity of 94.29%, and accuracy of 97.53%. We conclude that the effective detection of leak holes can be achieved by incorporating affordable, small-sized IoT sensors into respiratory protective equipment.

• 전자통신동향분석
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• 제33권1호
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• pp.123-130
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• 2018

Tactile sensors, which are commonly referred to as pressure and strain sensors, have been extensively investigated to meet the demands for attachable and wearable electronics for monitoring the health status or activity of human users. For this purpose, the introduction of two-dimensional (2D) materials such as graphene and transition metal dichalcogenides (TMDs) with high mechanical strength at the atomic scale is very suitable for tactile sensors applicable for use in human-friendly devices. In this paper, we examine a descriptive summary of a tactile sensor and review state-of- the-art research trends of 2D material-based tactile sensors in terms of the material and architecture. Finally, we propose a roadmap for future studies into advanced tactile sensors based on our ongoing research.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 1999년도 추계학술발표대회 논문집
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• pp.251-257
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• 1999

Smart structure that contains sensors, which are either embedded in a composite material or attached to a structure, is currently receiving considerable attention. Fiber Bragg grating sensor, one of the optical fiber sensors, has been widely used to sense strain and temperature for smart structures since both parameters change the resonant frequency of the grating. In this paper, according to the various heating and cooling conditions the thermal behavior of unidirectional composite material was monitored by embedding the fiber Bragg grating sensors in the longitudinal and transverse directions of unidirectional composites. The thermal behavior of unidirectional composite material was monitored for various heating and cooling rates and applied pressure. It was found that the thermal behavior was unaffected by pressure variations and heating and cooling rates applied to the composites. The thermal strains were measured by considering the shift in Bragg wavelength that was generated by the thermal expansion of composite specimen. The longitudinal and transverse C.T.E.'s were also obtained from the corresponding temperature-thermal strain curves.

• 센서학회지
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• 제26권1호
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• pp.24-27
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• 2017

In this study, I developed a simple and low cost process-printing a silver, carbon, dielectric, adhesive layer on PET films using screen printing technology and bonding the two films face-to-face-to fabricate a low price capacitive pressure-mapping sensor. Both electrodes forming the pressure measuring capacitor are arranged between the two PET films similar to a sandwich. Therefore, the sensor has the advantage of minimizing the influence of external noise. In this study, a $10{\times}10$ capacitance-type pressure-mapping sensor was fabricated and its characteristics were analyzed.