• Title/Summary/Keyword: Precursor Analysis

Search Result 644, Processing Time 0.033 seconds

Growth of Polycrystalline 3C-SiC Thin Films using HMDS Single Precursor (HMDS 단일 전구체를 이용한 다결정 3C-SiC 박막 성장)

  • Chug, Gwiy-Sang;Kim, Kang-San;Han, Ki-Bong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.20 no.2
    • /
    • pp.156-161
    • /
    • 2007
  • This paper describes the characteristics of polycrystalline ${\beta}$ or 3C (cubic)-SiC (silicon carbide) thin films heteroepitaxailly grown on Si wafers with thermal oxide. In this work, the poly 3C-SiC film was deposited by APCVD (atmospheric pressure chemical vapor deposition) method using HMDS (hexamethyildisilane: $Si_{2}(CH_{3}_{6})$ single precursor. The deposition was performed under various conditions to determine the optimized growth conditions. The crystallinity of the 3C-SiC thin film was analyzed by XPS (X-ray photoelectron spectroscopy), XRD (X-ray diffraction) and FT-IR (fourier transform-infrared spectometers), respectively. The surface morphology was also observed by AFM (atomic force microscopy) and voids or dislocations between SiC and $SiO_{2}$ were measured by SEM (scanning electron microscope). Finally, depth profiling was invesigated by GDS (glow discharge spectrometer) for component ratios analysis of Si and C according to the grown 3C-SiC film thickness. From these results, the grown poly 3C-SiC thin film is very good crystalline quality, surface like mirror and low defect. Therfore, the poly 3C-SiC thin film is suitable for extreme environment, Bio and RF MEMS applications in conjunction with Si micromaching.

The Photodegradation Effect of Organic Dye for Metal Oxide (Cr2O3, MgO and V2O3) Treated CNT/TiO2 Composites

  • Chen, Ming-Liang;Bae, Jang-Soon;Yoon, Hee-Seung;Lim, Chang-Sung;Oh, Won-Chun
    • Bulletin of the Korean Chemical Society
    • /
    • v.32 no.3
    • /
    • pp.815-820
    • /
    • 2011
  • Three kinds of organometallic compounds (chromium acetylacetonate, magnesium acetate and vanadyl acetylacetonate) were used as transition metal precursor, titanium n-butoxide and multi-walled carbon nanotube as titanium and carbon precursor to prepare metal oxide-CNT/$TiO^2$ composites. The surface properties and morphology of metal oxide-CNT/$TiO^2$ composites were by Brauer-Emett-Teller (BET) surface area measurement, scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and energy dispersive X-ray (EDX) analysis. The photocatalytic activity of prepared metal oxide-CNT/$TiO^2$ composites was determined by the degradation effect of methylene blue in an aqueous solution under irradiation of visible light.

Synthesis and Process Development of Ultrafine Ti Powder by Sodium Flame Encapsulation Method (Sodium Flame Encapsulation 방법에 의한 초미립 Ti 분말 합성 및 공정개발)

  • Maeng, Deok-Yeong;Lee, Chang-Gyu;Kim, Heung-Hui
    • Korean Journal of Materials Research
    • /
    • v.12 no.5
    • /
    • pp.391-397
    • /
    • 2002
  • Synthesis and process development of nano-size Ti powder by SFE(Sodium/halide Flame Encapsulation) method were investigated. Four concentric coflow burner was used and its flame configuration was $TiCl_4/Ar/Na/Ar$ in order from the center. Flame has been controlled by the various processing parameters such as temperature of burner and flow rates of both $TiCl_4$(g) precursor and Na(g). It was found that yellow-colored flame was shown in the flow rates of 70cc/min of $TiCl_4$(g) precursor and 2 $\ell$ /min of Na(g) which were regarded as optimum flame condition. The powders encapsuled by NaCl were produced having the average powder size of 250nm. The results of X-ray diffraction showed that powders from the optimized condition consisted of pure Ti and NaCl. TEM analysis confirmed that the several Ti powders of 20-100nm were encapsulated with NaCl. After removing sodium chloride by heat treatment, the spherical Ti powders with the size range of 80 to 150nm were obtained.

Vapor Phase Epitaxy of Magnesium Oxide on Si(001) Using a Single Precursor

  • Lee, Sun-Sook;Lee, Sung-Yong;Kim, Chang G.;Lee, Sang-Heon;Nah, Eun-Ju;Kim, Yunsoo
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.122-122
    • /
    • 2000
  • Magnesium oxide is thermodynamically very stable, has a low dielectric constant and a low refractive index, and has been widely used as substrate for growing various thin film materials, particulary oxides of the perovskite structure. There has been a considerable interest in integrating the physical properties of these oxides with semiconductor materials such as GaAs and Si. In this regard, it is considered very important to be able to grow MgO buffer layers epitaxially on the semiconductors. Various oxide films can then be grown on such buffer layers eliminating the need for using MgO single crystal substrates. Vapor phase epitaxy of magnesium oxide has been accomplished on Si(001) substrates in a high vacuum chamber using the single precursor methylmagnesium tert-butoxide in the temperature range 750-80$0^{\circ}C$. For the epitaxy of the MgO films, SiC buffer layers had to be grown on Si(001). The films were characterized by reflection high energy electron diffraction (RHEED) in situ in the growth chamber, and x-ray diffraction (XRD), x-ray pole figure analysis, scanning electron microscopy (SEM), and x-ray photoelectron spectroscopy (XPS) after the growth.

  • PDF

Study of Al-Alloy Foam Compressive Behavior Based on Instrumented Sharp Indentation Technology

  • Kim Am-Kee;Tunvir Kazi
    • Journal of Mechanical Science and Technology
    • /
    • v.20 no.6
    • /
    • pp.819-827
    • /
    • 2006
  • The stress-strain relation of aluminum (Al) alloy foam cell wall was evaluated by the instrumented sharp indentation method. The indentation in a few micron ranges was performed on the cell wall of Al-alloy foam having a composition or Al-3wt.%Si-2wt.%Cu-2wt.%Mg as well as its precursor (material prior to foaming). To extract the stress-stram relation in terms of yield stress ${\sigma}_y$, strain hardening exponent n and elastic modulus E, the closed-form dimensionless relationships between load-indentation depth curve and elasto-plastic property were used. The tensile properties of precursor material of Al-alloy foam were also measured independently by uni-axial tensile test. In order to verify the validity of the extracted stress-strain relation, it was compared with the results of tensile test and finite element (FE) analysis. A modified cubic-spherical lattice model was proposed to analyze the compressive behavior of the Al-alloy foam. The material parameters extracted by the instrumented nanoindentation method allowed the model to predict the compressive behavior of the Al-alloy foam accurately.

Fine Structural Analysis of the Cocoon Silk Production in the Garden Spider, Argiope aurantia

  • Moon, Myung-Jin
    • Animal cells and systems
    • /
    • v.7 no.1
    • /
    • pp.35-41
    • /
    • 2003
  • The principal fibers used in constructing the cocoon in the garden spider, Argiope aurantia, are large-diameter fibers developed from tubuliform glands and small-diameter fibers presumed to be spun by the aciniform silk glands. Scanning electron micrographs of the large-diameter fibers on both surfaces of the cocoon clearly reveal their fine structural differences. While the silk fibers on the inner surface have smooth and homogeneous appearances, each fiber on the outer surface represents a multicomponent internal structure. Examination of each fibers using transmission electron microscope also provides additional evidence that the multicomponent fibers contain numerous electron lucent fibrils embedded in an amorphous electron dense matrix. It has been also revealed that two types of secretory granules presumed to be the precursors of tubuliform fibers are closely related to the production of distinct coloration in luminal contents - brownish and yellowish components. Moreover, these electron-dense granules, possibly precursor of fibrillar component, and electron-lucent granules, possibly precursor of matrix component, are densely packed and remain close to each other without fusion. It is critical evidence that the individual tubuliform fiber is not only heterogeneous and multicomponent but also takes place in a variety at manners throughout the length of the gland.

Zirconia-Alumina Composite Coating Materials for Low Temperature Process (저온 공정용 지르코니아-알루미나 복합 코팅제 연구)

  • Choi, Jongwan
    • Journal of the Korean Applied Science and Technology
    • /
    • v.38 no.6
    • /
    • pp.1561-1567
    • /
    • 2021
  • In this study, we have studied synthesis of zirconia-alumina composite coating materials via a low-temperature sol-gel process. The zirconia-alumina composites were prepared by coating zirconia precursor, alumina precursor, and organosilane mixture on a polyethylene terephthalate substrate through three steps: sol-gel process, low-temperature photocuring process, and heat treatment process. The structural properties and element analysis of the composites were confirmed by FT-IR and XPS. The coated composite showed a transmittance of 96% or more in the visible light region with a wavelength of 420 nm or more and pencil hardness of 9H or more. In case of the composite of the molar ratio of zirconia and alumina of 1:4, the highest nanoindentation hardness was measured with 1.212 GPa.

Preparation of Porous Cobalt Thin Films by Using an Electrochemical Method (전기화학적 방법을 통한 다공성 코발트 박막 합성)

  • Ha, Seong-Hyeok;Shin, Heon-Cheol
    • Journal of the Korean institute of surface engineering
    • /
    • v.53 no.6
    • /
    • pp.312-321
    • /
    • 2020
  • Morphology of porous cobalt electro-deposits was systematically investigated as functions of cobalt precursors in the plating bath and applied cathodic current density with a special focus on cobalt nano-rod formation. It was proved that the concentration of cobalt precursor plays little effect on the morphology of cobalt electro-deposits at relatively low plating current density while it significantly affects the morphology with increasing plating current density. Such a dependence was discussed in terms of the kinetics of two competitive reactions of cobalt reduction and hydrogen evolution. Cobalt nano-rod structure was created at specific ranges of cobalt precursor content and applied cathodic current density, and its diameter and length varied with plating time without notable formation of side branches which is usually found during dendrite formation. Specifically, the nano-rod length was preferentially increased in relative short plating time (<15 s), resulting in higher aspect ratio of nano-rod with plating time. Whereas, both the nano-rod length and diameter were increased nearly at the same level in a prolonged plating time, making the aspect ratio unchanged. From the analysis of crystal structure, it was confirmed that the cobalt nano-rod preferentially grew in the form of single crystal on a dense poly-crystalline cobalt thin film initially formed on the substrate.

Application of Suspension-Polymerized Spherical PAN beads as a Precursor of Spherical Activated Carbon (현탁중합으로 합성된 구형 PAN 수지의 구형 활성탄의 전구체로서의 활용)

  • Hyewon, Yeom;Hongkyeong, Kim
    • Journal of Institute of Convergence Technology
    • /
    • v.12 no.1
    • /
    • pp.13-18
    • /
    • 2022
  • Polyacrylonitrile was synthesized through suspension polymerization and then sieved to obtain spherical beads with a size of 200~510 ㎛. PAN was copolymerized with 2 mol% MMA monomer which is known to promote cyclization and crosslinking of nitrile group. The resonance cyclization reaction of the nitrile group in the synthesized PAN beads was observed near 170℃ with thermal analysis and FT-IR. The reaction conversion of the nitrile group in spherical beads was 23% during heat treatment, which was lower than that of the well-oriented PAN fiber used as a precursor of carbon fiber. This is because the stereo-regularity of molecular chains in the form of a random coil (spherical bead) is much lower than that of PAN fiber. It was confirmed that the compressive strength of the spherical PAN bead was greatly improved through the resonance cyclization and shrinkage according to the heat treatment, and it was also observed that the pores in PAN beads were formed after the heat treatment.

Effect of Na2CO3 contents on synthesis of plate-like NaNbO3 particles for templated grain growth

  • Kim, Min-Soo;Lee, Sung-Chan;Kim, Sin-Woong;Jeong, Soon-Jong;Kim, In-Sung;Song, Jae-Sung;Soh, Jin-Joong;Byun, Woo-Bong
    • Journal of Ceramic Processing Research
    • /
    • v.13 no.spc2
    • /
    • pp.270-273
    • /
    • 2012
  • x mol% (x = 0 ~ 20) Na2CO3 excess Bi2.5Na3.5Nb5O18 (BNN) particles were synthesized using molten salt as a flux. The secondary phases were observed at stoichiometric ratio of BNN precursors and their intensity decreased with increasing Na contents. The results of SEM images showed that all particles existed in a platelet shape and the particle increased in size with higher increasing Na contents. Plate-like NaNbO3 particles were developed using BNN precursor obtained by a topochemical microcrystal conversion. XRD analysis of NaNbO3 particles showed that a single perovskite phase and the intensity of (h00) peaks increased with increasing Na contents in BNN precursor. SEM images showed that the size of plate-like NaNbO3 was significantly changed by controlling Na contents in BNN precursors.