• 한국기계가공학회지
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• 제5권1호
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• Journal of the Optical Society of Korea
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• 제20권1호
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• pp.174-179
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• 2016

In this paper, a novel full-aperture reflective null measuring method is proposed to detect the transmission wavefront of a conformal dome surface. An aspheric compensator is designed and placed behind the dome to reflect the aspheric testing wave back to the same path. To ensure the feasibility of this method, tolerance analysis is conducted, and guidance to assembly is given accordingly. The accuracy of this method is verified to be λ/30 (λ =3.39 μm) by Monte Carlo algorithm. In addition, the influence of different error factors, including the thickness error and decenter error of the dome, on the testing wavefront is analyzed. Simulation and experiment indicate that this method is practical and simple, and can measure the conformal domes precisely and comprehensively.

• 한국기계가공학회지
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• 제11권2호
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• pp.13-19
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• 2012

Ultra Precision Machining Techniques, such as manufacturing Micro Lens Array(MLA), off-axis mirror, $F-{\theta}$ lens for laser printer, are achieved, based on technologies in consequence of development of modern high-precision machining mechanism. Above all, FTS(Fast Tool Servo) and STS(Slow Tool Servo) are more innovative technologies for reducing time and development costs. In this paper, it is described that MLA machining technique by FTS, off-axis mirror machining technique by STS, optics for observing space, and development of infrared aspheric lens for a thermal imaging microscope.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.269-272
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• 2004

The target of this paper is the development of Web-based monitoring & control system which is for effective and economic management of mold manufacturing process. This system has three module; G-code Control, Monitoring Module and Result analysis module. Also, as the environment of development is based on internet, this system which is possible to the remote site management of manufacturing process works on Web. To be possible to control the manufacturing monitoring by client, each module is made ActiveX control and is based on socket communication. This system makes the foundation which is possible to manage the mold manufacturing process efficiently from remote site by matching real-time monitoring with manufacturing process in factory using G-code control and displaying the result of manufacturing using Ch-CGI.

• 한국정밀공학회지
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• 제26권4호
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• pp.23-32
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.19-20
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.399-400
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.393-394
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.383-384
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.637-638
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• 2012