• Journal of the Korean Society for Precision Engineering
• /
• v.11 no.6
• /
• pp.158-167
• /
• 1994

The design concept of varaiable structure control is useful not only to stochasic systems but also to adaptive control systems. The Dynamic equation of vertical three linkage robot was derived. And it was simplyfied according to the scheme of control strategy. And we specify the form of model. Thereafter the error dynamic equation was derived between the real state of the plant and state of the model. Some simulations were performed to control robot manipulator applying the methodology of the variable structure model following adaptive control.

• Bulletin of the Korean Space Science Society
• /
• 2003.10a
• /
• pp.26-26
• /
• 2003

During fabrication process for the large space optical surfaces, the traditional bound abrasive grinding with bronze bond cupped diamond wheel tools leaves the machine marks and the subsurface damage to be removed by subsequent loose abrasive lapping. We explored a new grinding technique for efficient quantitative control of precision CNC grinding for space optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of resin bond diamond tools. The machining parameters such as grit number, tool rotation speed, work-piece rotation speed, depth of cut and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis methods. The effectiveness of the grinding prediction model was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment details, the results and implications are presented.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.12
• /
• pp.163-170
• /
• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.3
• /
• pp.259-264
• /
• 2011

Authors are carrying out a national project which develops an accuracy simulation technology of mechanical machines to predict the stiffness and accuracy of machine components or entire machine in the design stage. Analysis methods in this technology are generalized to achieve the wide applicability and to be utilized as a web based platform type. In this paper, outline of the project such as concept, aim and configuration is introduced. Contents of the research are also introduced, which are composed of four main research fields; structural dynamics, linear motion analysis, rotary motion analysis and control and vibration analysis. Finally, a future plan is presented which is made up with three stages for the advance toward an ultimate manufacturing tools.

• Journal of the Korean Society for Precision Engineering
• /
• v.33 no.12
• /
• pp.1007-1013
• /
• 2016

This paper presents the development of a magneto-optical encoder for higher precision and smaller size. In general, optical encoders can have very high precision based on the position information of the slate, while their sizes tend to be larger due to the presence of complex and large components, such as an optical module. In contrast, magnetic encoders have exactly the opposite characteristics, i.e., small size and low precision. In order to achieve encoder features encompassing the advantages of both optical and magnetic encoders, i.e., high precision and small size, we designed a magneto-optical encoder and developed a method to detect absolute position, by compensating for the error of the hall sensor using the linear table compensation method. The performance of the magneto-optical encoder was evaluated through an experimental testbed.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.5 no.1
• /
• pp.39-44
• /
• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.2524-2528
• /
• 2003

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.8
• /
• pp.143-151
• /
• 2004

This paper deals with the precision NURBS interpolator for wire-EDM. Previous research about OAC (Open Architecture Controller) is mostly aimed at NC cutting machines such as milling or lathes, and hence these results are inadequate to apply to wire-EDM. In contradiction to NC machines, wire-EDM operates relatively slow feed rates and based on a feedback control loop to the machining process. The 2-stage interpolation method which reflects wire-EDM specific characteristics was proposed. The constant interpolation error could be acquired through 1 st stage interpolation. Feed rate regulation was performed through 2nd stage interpolation. The suggested algorithm was implemented to test-bed PC-NC system. Computer simulations and the experimental machining were conducted.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1866-1870
• /
• 2005

Typical small desktop robots have limied application due to their intrinsic feaures like friction, backlash, etc. However, a newly developed small gantry desktop robot needs smaller footprint and shows better performance in position accuracy, velocity, and acceleration. In order to achieve such results, synchronization control of two axes, position compensation methods in plane are suggested.

• 제어로봇시스템학회:학술대회논문집
• /
• 2005.06a
• /
• pp.2311-2318
• /
• 2005

Progress in the LCD industries has been very rapid. Therefore, their manufacturing lines require larger LCD glass-handling robots and more precise path control of the robots. In this paper, we present two practical advanced algorithms for high-precision path generation of an LCD glass-handling robot. One is high-precision path interpolation for continuous motion, which connects several single motions and is a reliable solution for a short robot cycle time. We demonstrate that the proposed algorithm can reduce path error by approximately 91% compared with existing algorithms without increasing cycle time. The second is real-time static deflection compensation, which can optimally compensate the static deflection of the handling robot without any additional sensors, measurement instruments or mechanical axes. This reduces vertical path error to approximately 60% of the existing system error. All of these algorithms have been commercialized and applied to a seventh-generation LCD glass-handling robot.