• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.661-665
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• 2000

In this study, the control of mounting system for MLGA package was developed using machine vision for the control of rotating position compensation and mounting position of X-Y table. Two type of material (polymer, alumina )were used for the dielectric insulator of the MLGA. And the illumination system and the algorithm of position compensation that be suitable for these materials was developed. Also, the position control order that compensated by machine vision actuated to micro stepping motor and X-Y servo motor by controlled PC and mounted the MLGA on PCB in resolution to$\pm10\mum$ .

• 반도체디스플레이기술학회지
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• 제6권1호
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• pp.31-36
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• 2007

Effect of coulomb friction and backlash on the single loop position control has been studied for the precision position control. We have showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, we have made an inner loop with a classical velocity and torque controller which was forcing the current of d axis to be zero by using a permanent-magnet synchronous motor and composed the outer loop with linear encoder for sensing a position of the loader. Also, we have used least squares fit(LSF) observer for reducing noise when we got velocity from position outputs. We have shown a good result by using the dual loop through simulation and experiment.

• 한국정밀공학회지
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• 제28권5호
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• pp.591-598
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• 2011

Tip position control of a flexible cantilever is difficult due to the non-minimum phase dynamics that result from the finite propagating speed of a mechanical wave along the cantilever. In this paper, we propose a method for the tip position control using a light and cheap accelerometer that does not bring any significant change to the dynamics of the cantilever system. The linear system identification model of the flexible cantilever is obtained with measurements by a laser displacement sensor. A Kalman estimator is designed with this model and calculates the estimated tip position with the acceleration data of the accelerometer that is attached on the tip of the cantilever. To verify reliability of the estimator, the estimated tip position is used to the feedback control system that uses a fuzzy logic controller. The control results are compared with those of the fuzzy control system where the real tip position is measured by a laser displacement sensor. Also, the performance of the estimator with the accelerometer is presented and discussed.

• 한국정밀공학회지
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• 제13권6호
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• pp.136-144
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• 1996

We developed a part of stroke sensing cylinder for position control of automatic excavator and its measurement system. In this paper, for development of stroke sensing cylinder, we consist of 2-axis control instrument system with Hall sensor. A performance of piston rod with magnetic scales is evaluated by the developed measurement system. Furthermore, the position control for good performance of instrument system is achieved by a sliding mode control which is a new method diminishing the chattering in that control by setting 2-dead band along the swtching line. The unknown parameters for sliding mode control are estimated by the signal compression method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.1037-1038
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• 2010

• 한국정밀공학회지
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• 제22권7호
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• pp.102-111
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• 2005

In this paper, we address a position control for a parallel stage, which is levitated and driven by electric magnetic force. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal force. A dynamic equation of the stage system is derived based on Newton-Euler method and it's special Jacobian matrix describing a relation between the limited velocity and Cartesian velocity is done. There are proposed two control methods for positioning which are Cartesian space controller and Actuator space controller. The control performance of the Cartesian space controller is better than the Actuator space controller in task space trajectory while the Actuator space controller is simpler than the Cartesian space controller in controller realization.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.63-64
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.85-88
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• 2000

In this paper, the ultra precision positioning system for piezoelectric actuator using hysteresis compensation has been developed. Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. The main purpose of the proposed controller is to compensate the hysteresis nonlinearity of the piezoelectric actuator. The controller is composed of a PD, hysteresis compensation and neural network part in parallel manner, at first, the excellent tracking performance of the neural network controller was verified by experiments and was compared with the classical PD controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 추계학술대회 논문집
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• pp.204-208
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• 2001

Position control of the electro-hydraulic servo indexing system in a flexible forging machine was investigated Flexible forging machine forges an axial type workpiece in the radial direction as well as in the axial direction. The role of the indexing system is to rotate a workpiece fast and accurately to a desired position for continuous shaping. Since the inertia of a workpiece changes during each forging step, a control technique which is robust to inertia variation should be adopted to the position control of the workpiece. In this study, time delayed control technique is applied to the servo system. Time delayed control method does not depend on estimation of specific parameters. Rather, it depends on the direct estimation of a function representing the effect of uncertainties. Direct estimation is accomplished using time delay and the gathered information is used to cancel the unknown dynamics is accomplished using disturbances simultaneously. Experimental result show that the time delayed controller is robust to inertia variation of the load, and satisfactory performance on the sposition accuracy is obtained compared to the contentional feedback control.