• 한국정밀공학회지
• /
• 제15권11호
• /
• pp.208-217
• /
• 1998

본 연구에서는 ER 브레이크와 ER클러치를 피드백작동기로 사용하여 이송테이블의 위치 추적제어를 수행하였다. 이를 위해 먼저 아라빅 검(arabic gum)계통의 ER유체를 자체조성한 후 전기장에 대한 빙햄(Bingham)모델을 실험적으로 도출하였다. 빙햄모델에 근거하여 평판형의 ER브레이크와 실린더형의 ER클러치를 설계 제작하였으며, 계단입력(step input)전기장에 따른 출력토오크특성을 통하여 이들 작동기의 동적모델을 얻었다. 이들 작동기와 연계된 이송테이블시스템의 운동지배방정식을 유도한 후 위치추적제어를 위한 슬라이딩모드제어기를 설계하였다. 제어기 설계시 이송해이블의 부하질량 변화에 대한 시스템 불확실성과 마찰력을 고려하여 제어성능의 강건성을 보장하도록 하였다. 제안된 제어시스템의 제어영역(control bandwidth)을 주파수 영역에서 고찰한 후 여러 레적에 대한 위치추적제어 실험을 수행하였다.

• 한국정밀공학회지
• /
• 제14권5호
• /
• pp.108-117
• /
• 1997

To prove the stability and the effectiveness of the robust non-linear friction control suggested and proved analytically in the previous paper, the describing function analysis is introduced. The instability of the Southward's nonlinear friction compensation for a digital position control and the improvement of phase margin of the robust nonlinear friction compensation are verified qualitatively through the describing function analysis. Those controls are applied to a single-axis digital servo driving experimental setup which has inherent stick-slip friction and experimental results confirm the results obtained in and the effectiveness of the robust nonlinear friction compensation for a digital position control.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
• /
• pp.109-109
• /
• 2004

구조물에 있어서 진동은 소음을 유발하며 구조물을 불안정하게 만드는 요인이 된다. 특히, 저주파 진동은 구조물에 미치는 영향이 크므로, 유연구조물의 저주파 진동모드들을 우선적으로 제어할 필요가 있다. 본 논문에서는 압전세라믹을 작동기로, 압전필름을 감지기로 사용하였고, 능동 제어 알고리즘의 하나인 적응형 디지털 PPF(Positive Position Feedback) 제어기를 구성하여 유연 외팔 평판과 열린 박스 구조물에서 저주파 진동을 감소시켰다.(중략)

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2001년도 ICCAS
• /
• pp.66.6-66
• /
• 2001

In this paper, we studied the error compensation using an error budget method for repeatability improvement of the precision positioning system. The precision positioning system is developed for micro-pressing machine. We performed the force and displacement analysis about parts of the system. Proposed system determines the position and orientation of the materials manufactured by micro-pressing machine. It is consisted of x-y-z linear stages setting the position, and the gripper system setting the orientation. We executed kinematic and dynamic modeling of the whole precision positioning system. By generalizing the design variables, precision positioning system has the flexibility of material dimension. As we tried an error compensation using ...

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2001년도 ICCAS
• /
• pp.107.5-107
• /
• 2001

In this report, as the active position measurement system, a new method for two-dimensional position measurement system using a concept of semi-open type signal field has proposed. The feature of this system is realizing a position measurement only by scanning the encoded laser beams from scanning points to a measurement field, and observed it. First, both system configuration and encoding method are considered concretely, and M-sequence signal is selected for encoding. Next system design is performed to realize the theoretical measurement accuracy, and applied to a position measurement experiments. Experimental results show that measurement precision is larger than theoretical values. Furthermore, method for improving the measurement ...

• 한국정밀공학회지
• /
• 제16권9호
• /
• pp.159-165
• /
• 1999

Based on the cable-extension transducers, a new technique for two dimensional position measurement is developed in this paper. This new technique includes the use of two such transducers and the planar position is determined through triangulation. This paper also presents uncertainty analysis results for establishing sensor design specifications. An actual prototyped sensor system is built and its accuracy is verified through h\both experiments with coordinate measurement machines and its application to the real-time control of a high load wheeled mobile robot. This new type of position sensor can be easily used in a wide variety of automation applications in industry for two dimensional position measurements with high accuracy over a relatively large range, and it is both cast effective and robust against hostile environments.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 A
• /
• pp.389-391
• /
• 1999

Recently, the application of the linear machine for industrial field is remarkable increased, especially for the gantry machine. machine tool system and CNC. In these application fields. high precise position control performance is essentially required in both the steady and transient state. And linear machine is necessary for high-precision processing and manipulation when relatively high forces are involved. This paper presents the new unified PID position control algorithm which have rare sensitivity to disturbance, which the gain adjusting process is simple. Also this paper investigates the use of the New Unified PID control to design for high stiffness. Through the experimental results, it is shown that the proposed algorithm has high dynamic characteristic for the linear machine application field nevertheless of its simple structure.

• 제어로봇시스템학회논문지
• /
• 제20권2호
• /
• pp.180-185
• /
• 2014

DC motor is a representative electric motor commonly utilized in various motion control fields. However, DC motor-based motion control systems suffer from degradation of position precision due to nonlinear static friction. In order to enhance control precision, friction model-based compensators have been introduced in previous researches, where friction models are identified and counter inputs are added to control inputs for cancelling out the identified friction forces. In this paper, a static friction compensator is proposed without use of a friction model. The proposed compensation algorithm utilizes internal state manipulation to generate compensation pulses, and related parameters are easily tuned experimentally. The proposed friction compensator is applied to a DC motor-based motion control system, and results are presented in comparison with those without a friction compensator.

• 반도체디스플레이기술학회지
• /
• 제20권4호
• /
• pp.119-124
• /
• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• 한국정밀공학회지
• /
• 제19권10호
• /
• pp.120-129
• /
• 2002

An integrated structure and controller design approach for rotating cantilever beam is presented. An optimization method is developed for improving positioning performance considering the elastic deformations during high speed rotation and adopting the beam shape and the control gains as design variables. For this end, a dynamic model is setup by the finite element method according to the shape of the beam. The mass and stiffness of the beam are distributed in such a way that the closed-loop poles of the control system should be located leftmost in the complex s-plane. For optimization method, the simulated annealing method is employed which has higher probability to find the global minimum than the gradient-based down-hill methods. Sequential design and simultaneous design methods are proposed to obtain the optimal shape and controller. Simulations are performed with new designs by the two methods to verify the effectiveness of the approach and the results show that the settling time is improved for point-to-point position controls.