• 한국정밀공학회지
• /
• 제22권7호
• /
• pp.102-111
• /
• 2005

In this paper, we address a position control for a parallel stage, which is levitated and driven by electric magnetic force. This consists of a levitating object (called platen) with 4 permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion by the vertical and horizontal force. A dynamic equation of the stage system is derived based on Newton-Euler method and it's special Jacobian matrix describing a relation between the limited velocity and Cartesian velocity is done. There are proposed two control methods for positioning which are Cartesian space controller and Actuator space controller. The control performance of the Cartesian space controller is better than the Actuator space controller in task space trajectory while the Actuator space controller is simpler than the Cartesian space controller in controller realization.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.573-576
• /
• 2005

A compact linear and angular displacement measurement device was developed by combining a Michelson interferometer and an autocollimator to characterize the movement of a precision stage. A Michelson interferometer and an autocollimator are typical devices for measuring linear and angular displacement, respectively. By controlling the polarization of reflected beam from the target mirror of the interferometer, some part of light was retro-reflected to the light source and the reflected beam was used for angle measurement. The interferometer and the autocollimator use the same optic axis and the target mirror can be easily and precisely aligned orthogonal to the optic axis by monitoring the autocollimator s signal. The autocollimator was designed for angular resolution of 0.1 arcsec and dynamic range of 60 arcsec. The nonlinearity error of interferometer was minimized by trimming the gain and offset of the photodiode signals. Through the experiments, we evaluate the performance of measurement device and discuss its applications.

• 한국정밀공학회지
• /
• 제24권9호
• /
• pp.60-67
• /
• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1438-1441
• /
• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• 한국생산제조학회지
• /
• 제20권2호
• /
• pp.121-128
• /
• 2011

As high precision industries such as semiconductor, TFT-LCD manufacturing and MEMS continue to grow, the demand for higher DOF precision stages has been increasing. In general, the stages should accommodate a prescribed range of payloads in order to position various precision manufacturing/inspection instruments. Therefore a nonlinear controller using sliding motion is developed, which bears mass perturbation and makes the upper plate of the stage move in 6 DOF. For the application of the nonlinear control, an observer is also developed based on expected noise covariance. To eliminate the steady state error of step response, integral terms are inserted into the state-space model. The linear term of the controller is designed using optimization scheme in which parameters can be weighted according to their physical significance, whereas the nonlinear term of the controller is designed using trial and error method. A comprehensive simulation study proves that the designed controller is robust against mass perturbation and completely eliminates steady state errors.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 추계학술대회 논문집
• /
• pp.195-198
• /
• 2000

It can be acquired the high effective productivity through of high speed, precision of machine tools, and then, machine tools will be got a competitive power. Industrially advanced countries already developed that the high speed feed is 60m/min using the high speed ball screw. Also, a lot of problems have happened the feed drive system. It is necessary to study about the characteristics of thermal deformation played a more critical role than static stiffness and dynamic rigidity in controlling the level of machining accuracy. In spite of the improving the thermal deformation characteristics of machine tools at the design stage, there are always some residual errors that have to be compensated for during machining. In this study, thermal deformation error automated compensation device with multiple linear regression is proposed that thermal deformation error can be eliminated at the machining stage. The developed device has been practically applied to the feed drive unit.

• 한국정밀공학회지
• /
• 제22권9호
• /
• pp.130-136
• /
• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• 한국정밀공학회지
• /
• 제28권3호
• /
• pp.259-264
• /
• 2011

Authors are carrying out a national project which develops an accuracy simulation technology of mechanical machines to predict the stiffness and accuracy of machine components or entire machine in the design stage. Analysis methods in this technology are generalized to achieve the wide applicability and to be utilized as a web based platform type. In this paper, outline of the project such as concept, aim and configuration is introduced. Contents of the research are also introduced, which are composed of four main research fields; structural dynamics, linear motion analysis, rotary motion analysis and control and vibration analysis. Finally, a future plan is presented which is made up with three stages for the advance toward an ultimate manufacturing tools.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1514-1517
• /
• 2005

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage are studied. with the three different method and the results of them are applied to the design of the system. The performance test of resolution and travel is performed.

• 한국정밀공학회지
• /
• 제16권2호통권95호
• /
• pp.164-175
• /
• 1999

If the camera plane is nearly parallel to the calibration board on which objects are defined, most of existing calibration approaches such as Tsai's radial-alignment-constraint method cannot be applied. Recently, for such an ill-conditioned case, Zhuang & Wu suggested the linear two-stage calibration algorithm assuming that the exact values of focal length and scale factor are known a priori. In this paper, we developed an iterative two-stage algorithm starts with initial guess fo the two parameters to determine the value of the others using Zhuang & Wu's method. In the second stage, the two parameters are locally optimized. This process is repeated until any improvement cannot be expected any more. The performance comparison between Zhuang & Wu's method and our algorithm shows the superiority of ours. Also included are the computational results for the effects of the distribution and the number of calibration points on the calibration performance.