• Proceedings of the KIEE Conference
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• 2001.07b
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• pp.798-800
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• 2001

Precision control technologies are required for photolithography. The linear BLDC motor is used for the stage operations. The stage that is installed in a photolithography device is basically controlled in three directions(x, y, z axes). This paper presents precision control technologies of the linear BLDC motor in one direction by computer simulations. A position control system with linear BLDC motor is now being tested.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.783-784
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.475-476
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.161-162
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• 2012

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• International Journal of Control, Automation, and Systems
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• v.4 no.1
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• pp.1-9
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• 2006

This paper presents the modeling and multivariable feedback control of a novel high-precision multi-dimensional positioning stage. This integrated 6-degree-of-freedom. (DOF) motion stage is levitated by three aerostatic bearings and actuated by 3 three-phase synchronous permanent-magnet planar motors (SPMPMs). It can generate all 6-DOF motions with only a single moving part. With the DQ decomposition theory, this positioning stage is modeled as a multi-input multi-output (MIMO) electromechanical system with six inputs (currents) and six outputs (displacements). To achieve high-precision positioning capability, discrete-time integrator-augmented linear-quadratic-regulator (LQR) and reduced-order linearquadratic-Gaussian (LQG) control methodologies are applied. Digital multivariable controllers are designed and implemented on the positioning system, and experimental results are also presented in this paper to demonstrate the stage's dynamic performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.