• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.464-467
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• 2005

Among several polishing techniques for micro structures, polishing process using magnetorheological(MR) fluid has advantages in the finishing process of 3-D micro structures because abrasives in the fluid can reach surfaces with complex feature and play their role. Although many researchers have been trying to reveal its polishing mechanism of the MR polishing, it has not been successful because in-situ measurement of state variables is difficult and process parameters are complex. In fact, one of the key factors for applying process control methodologies, such as Run-to-Run control, is the measuring and monitoring of slurry quality because the process strongly depends on the fluid property. Therefore, it is necessary to maintain consistent slurry quality to guarantee the process repeatability. The proposed equipment achieves the longer life cycle of MR fluid and reduces the variability of products. A new method to measure the material removal rate in MRF polishing process is also proposed and discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1289-1293
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• 2005

We will improve tools performance without the change of a tools' physical shape, if we process mirror like finishing on the surface of cutting tools. Because cutting tools' shapes are very complex, the general method of polishing can't be polished. So we will apply new method of polishing which is magnetic fluid grinding technique. Magnetic fluid grinding technique can polish complex shape's workpiece by pressing the surface of workpiece with magnetic and abrasive grains in magnetic field. Therefore we developed the polishing equipment to improve the performance of cutting tools and experimented on various polishing conditions to determine the polishing conditions of cutting tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1522-1526
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• 2005

In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped $9.74^{\circ}$ off-axis-cut silicon wafer using wet etching. In addition rough surface of the mirror is achieved in case of long etching time. Hence a novel method called magnetorheolocal finishing is introduced to enhancing the surface quality of the mirror plane. Finally, areal peak to valley surface roughness of mirror plane is reduced about 100nm in large area of $mm^2$ and it is applicable to optical pickup using infrared wavelength.

• Journal of the Korean Society for Precision Engineering
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• v.11 no.6
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• pp.28-41
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• 1994

An efficient algorithm is proposed to select the proper tools and generate their paths for NC rough cutting of dies and molds with sculptured surfaces. Even though a milling process consists of roughing, semi-finishing, and finishing, most material is removed by a rough cutting process. Therfore it can be said that the rough cutting process occupy an important portion of the NC milling process, and accordingly, an efficient rough cutting method contributes to an efficient milling process. In order work, the following basic assumption is accepted for the efficient machining. That is, to machine a region bounded by a profile, larger tools should be used in the far inside and the region adjacent to relatively simple portion of the boundary while smaller tools are used in the regions adjacent to the relatively complex protion. Thus the tools are selected based on the complexity of the boundary profile adjacent to the region to be machined. An index called cutting path ratio is proposed in this work as a measure of the relative complexity of the profile with respect to a tool diameter. Once the tools are selected, their tool paths are calculated starting from the largest to the smallest tool.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.354-361
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• 2005

In high speed cutting process, due to the friction between the tool and workpiece, a temperature rise of contacting part is serious. It need to develop cutting tool for overcoming such a poor condition. So now, some studies, the optimization of tool shapes, the fine grains of tool material, multi-layer coating of tools are processing. If mirror finishing on the tool is processed, there is advantage of relation between chip and tool, because of less friction, and also tool's lift would be increased. As a result mirror like finishing is expected efficient enhancement of tool. Generally, it is too difficult to process by a general way for tools of complex shapes, it is required a new method to process such complex shape tools. The magnetic fluid polishing technique can polish the workpiece of complex shape, because the polishing method which polishes as compress the workpiece by the magnetism abrasives to arrange to the linear according to the line of magnetic force. In this paper, We polished the surface of the high speed cutting tool using the magnetic fluid polishing technique, to enhance the performance of the high speed cutting tool.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.48-53
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• 2005

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.1
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• pp.119-126
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• 2006

The finishing process of die requires the processing technique of a height efficiency and precision. Because the precision of die gives the quality of goods the influence directly. The hydro-static polishing device employs the hydro-static axis and is able to polish the structure of complex picture under the constant pressure and is got constant surface roughness at all polished plane. Therefore, In order to polish precision sculptured surface, it was used the hydro-static polishing device. Polishing device's polishing characteristic is estimated by polishing conditions which are size of abrasive, material of tools. And, because the surface quality of workpiece depends on polishing pattern which relates to motion of abrasive grain. The polishing characteristic according to polishing pattern was evaluated.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.8
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• pp.34-42
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• 2004

A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.692-697
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• 1997

This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robote program is automatically generated off-line from a PC and downloaded to robot controller. Position and orientation data for the program is supplied from cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss for changeover from one product to next is eliminated by off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.54-62
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• 2001

This paper describes a new method for measuring the changes in specific surface asperities arising from processes such as finishing, coating, wear and corrosion. In repetitive measurements, relocation device gives the same position and orientation so that specific profile can be obtained. A low-cost relocation device is designed and its performance is assessed. The error in relocation process is compensated by statistic compensation algorithm. And, a removing process of cusp by grinding is observed by the proposed method.