• 한국소음진동공학회논문집
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• 제12권1호
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• pp.65-72
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• 2002

Generally, there are laser operating equipments( aligner, stepper) and electronic microscope( SEM, TEM) as a high precision manufacturing and inspection equipment in semiconductor production companies, precision examination and measuring laboratories. Mostly, these equipments are characterized by projection and target part. The relative displacements between projection and target part are dominant roles in vibrational problem in these precision equipments. These relative displacements are determined by the position of incoming vibration and the difference of vibration response in projection and target part. In this study, the allowable vibrational limits are suggested and the vibrational reduction plans are proposed by measurement and analysis of vibration phenomenon in the Clean Room in PDP(plasma display panel) production building. The vibration performance is evaluated by comparison relative displacements between projection and target part before/after the vibration isolation plan.

• 한국소음진동공학회논문집
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• 제17권8호
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• pp.726-735
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• 2007

Inside the factory buildings of aprecision industry (which produces semiconductors or TFT-LCD), thousands of vibration-sensitive precision equipments operate in the clean rooms. Various utility equipments that are installed around them for proper operation cause various sources of noise and of vibration to exist inside the clean rooms and thus deteriorate the noise and the vibration environment within. In this study, we check if the existing transient vibration phenomenon is caused by the vibrations that arise from operating the utility installed near these equipments; compare and evaluate the vibration criteria of precision equipments regarding the transient vibration phenomenon; and check the efficiency of these criteria.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.358-362
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• 1995

Precision electronic equipments are composed of sophisticated microcircuits that are extremely vulnerable to lightning-caused voltage spike. This transient voltage spike may cause upset, latent failure or interference on electronic equipments. In order to develop efficient lightning protection measures on AC power lines for a road traffic controller, experimental surge immunity tests were conducted according to IEC standard 801-5. The combination of gas tube arrester and metal-oxide varistor was installed at the input of AC power lines and the silicon avalanche suppressor installed at the output of DC power supply as lightning protection measures.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.447-450
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• 2002

In the surrounding of the electric machinery and equipments occurring of using the electromagnetic fields, other electric machinery or equipments are induced the malfunctions by the radiated and leaked electromagnetic fields. And the human hazardous problems by that effect are being discussed frequently. So efficiently shielding technique of injurious electromagnetic field for high frequency welder is discussed in this paper.

• 한국기계가공학회지
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• 제5권1호
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• 한국정밀공학회지
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• 제20권12호
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• pp.19-24
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.64-67
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• 2000

It is usual that the medical examination of human body need special knowledpe and equipments. Thus we have to spend Lime and energy on going to special place such as hospital where doctors and equipments are. Which often cause missing a good chance af medical treatment as well as giving us inconvenience. However many simple and convenient equipments were developed for checking our health conditions recently. O-ring test is accepted a3 one of useful methods to examine our heallb conditions. Also the test is recognized as a uscful means to judge, withoul any special equipment and medical knowledge, if some medical substances or foods are beneficial or harmful to our health. However, the judgement may be mcorrect because it depend on doctor's subjective point of view.In this study, we developed an automatic O-ring t a r mach~ne which enable us to check our health conditions objectively and quantitatively. The validity of the idea to develope the machine was proved by experiments.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.1-7
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• 2002

Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.575-576
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.927-928
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• 2012