• Title/Summary/Keyword: Pre-oxidation

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Post Ru CMP Cleaning에서 연마입자의 흡착과 제거에 대한 chemical의 첨가제에 따른 영향 (Effect of chemical in post Ru CMP Cleaning solutions on abrasive particle adhesion and removal)

  • 김인권;김태곤;조병권;손일룡;박진구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.529-529
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    • 2007
  • Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

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혼합하중 조건하에서 갈색산화물이 입혀진 구리계 리드프레임/EMC 계면의 파손경로 (Failure Path of the Brown-oxide-coated Copper-based Leadframe/EMC Interface under Mixed-Mode Loading)

  • 이호영
    • 한국표면공학회지
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    • 제36권6호
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    • pp.491-499
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    • 2003
  • Copper-based leadframe sheets were oxidized in a hot alkaline solution to form brown-oxide layer on the surface and molded with epoxy molding compound (EMC). The brown-oxide-coated leadframe/EMC joints were machined to form sandwiched double-cantilever beam (SDCB) specimens and sandwiched Brazil-nut (SBN) specimens for the purpose of measuring the fracture toughness of leadframe/EMC interfaces. The SDCB and the SBN specimens were designed to measure the fracture toughness of the leadframe/EMC interfaces under nearly mode-I loading and mixed-mode (mode I + mode II) loading conditions, respectively. Fracture surfaces were analyzed by various equipment such as glancing-angle XRD, SEM, AES, EDS and AFM to elucidate failure path. Results showed that failure occurred irregularly in the SDCB specimens, and oxidation time of 2 minutes divided the types of irregular failures into two classes. The failure in the SBN specimens was quite different from that in the SDCB specimens. The failure path in the SBN specimens was not dependent on the phase angle as well as the distance from tips of pre-cracks.

Photoluminescence and Photoluminescence Excitation from Porous Silicon Carbide

  • 이기환;;이태호
    • Bulletin of the Korean Chemical Society
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    • 제21권8호
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    • pp.769-773
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    • 2000
  • The dependence of photoluminescence (PL) and photoluminescence itation (PLE) on preparation condi-tions and the aging of porous silicon carbide (PSC) have been investigatted. The fiber size of the material pre-pared under dark-current mode, labele d DCM, was larger than that of the photoassisted (PA)process.The intensity of the PL spectrum for the PA condition was higher than that of the DCM condition. The PA condition giving small fiber size exhibited amore prominent high-energy component but the emission bands of both con-ditionsobserved were rather similar. The origin of the PL may have played an importantrole in the surface defect center introduced by the reaction conditions ofHFatthe surface of the silicon carbide. Selective excita-tion of the PL bandsusingdifferent excitation wavelengths has been used to identify distinct componentswith-in the PL bandwidth. Two main PL bands with peak wavelength of494 and534 nm were clearly resolved. On the other hand, selectivc emission of the PLEbands using different emission wavelengths has been used to identify distinct components within the PLE bandwidth. The higher energy band with peak wavelength of 338 nm and the lower energy bands involving 390,451 and 500 nm were clearly resolved. According to the pro-ionged aging in air, PL spectra appearedasone band, This emission probably originated from states localized to the band-to-band recombination due to the oxidation on the crystallite surface.

Removing nitrogenous compounds from landfill leachate using electrochemical techniques

  • Nanayakkara, Nadeeshani;Koralage, Asanga;Meegoda, Charuka;Kariyawasam, Supun
    • Environmental Engineering Research
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    • 제24권2호
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    • pp.339-346
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    • 2019
  • In this research, applicability of electrochemical technology in removing nitrogenous compounds from solid waste landfill leachate was examined. Novel cathode material was developed at laboratory by introducing a Cu layer on Al substrate (Cu/Al). Al and mild steel (MS) anodes were investigated for the efficiency in removing nitrogenous compounds from actual leachate samples collected from two open dump sites. Al anode showed better performances due to the effect of better electrocoagulation at Al surface compared to that at MS anode surface. Efficiency studies were carried out at a current density of $20mA/cm^2$ and at reaction duration of 6 h. Efficiency of removing nitrate-N using Al anode and developed Cu/Al cathode was around 90%. However, for raw leachate, total nitrogen (TN) removal efficiency was only around 30%. This is due to low ammonium-N removal as a result of low oxidation ability of Al. In addition to the removal of nitrogenous compounds, reactor showed about 30% removal of total organic carbon. Subsequently, raw leachate was diluted four times, to simulate pre-treated leachate. The diluted leachate was treated and around 88% removal of TN was achieved. Therefore, it can be said that the reactor would be good as a secondary or tertiary treatment step in a leachate treatment plant.

Seasonal variation of assimilable organic carbon and its impact to the biostability of drinking water

  • Choi, Yonkyu;Park, Hyeon;Lee, Manho;Lee, Gun-Soo;Choi, Young-june
    • Environmental Engineering Research
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    • 제24권3호
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    • pp.501-512
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    • 2019
  • The seasonal effects on the biostability of drinking water were investigated by comparing the seasonal variation of assimilable organic carbon (AOC) in full-scale water treatment process and adsorption of AOC by three filling materials in lab-scale column test. In full-scale, pre-chlorination and ozonation significantly increase $AOC_{P17\;(Pseudomonas\;fluorescens\;P17)}$ and $AOC_{NOX\;(Aquaspirillum\;sp.\;NOX)}$, respectively. AOC formation by oxidation could increase with temperature, but the increased AOC could affect the biostability of the following processes more significantly in winter than in warm seasons due to the low biodegradation in the pipes and the processes at low temperature. $AOC_{P17}$ was mainly removed by coagulation-sedimentation process, especially in cold season. Rapid filtration could effectively remove AOC only during warm seasons by primarily biodegradation, but biological activated carbon filtration could remove AOC in all seasons by biodegradation during warm season and by adsorption and bio-regeneration during cold season. The adsorption by granular activated carbon and anthracite showed inverse relationship with water temperature. The advanced treatment can contribute to enhance the biostability in the distribution system by reducing AOC formation potential and helping to maintain stable residual chlorine after post-chlorination.

Characteristics of Bacterial Communities in Biological Filters of Full-Scale Drinking Water Treatment Plants

  • Choi, Yonkyu;Cha, Yeongseop;Kim, Bogsoon
    • Journal of Microbiology and Biotechnology
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    • 제29권1호
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    • pp.91-104
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    • 2019
  • The taxonomic and functional characteristics of bacterial communities in the pre-chlorinated rapid filters and ozonated biological activated carbon (BAC) filters were compared using Illumina MiSeq sequencing of the 16S rRNA gene and community-level physiological profiling (CLPP) based on sole-carbon-source utilization patterns. Both the rapid filters and BAC filters were dominated by Rhizobiales within ${\alpha}-proteobacteria$, but other abundant orders and genera were significantly different in both types of filter. Firmicutes were abundant only in the intermediate chlorinated rapid filter, while Acidobacteria were abundant only in the BAC filters. Bacterial communities in the rapid filter showed high utilization of carbohydrates, while those in the BAC filters showed high utilization of polymers and carboxylic acids. These different characteristics of the bacterial communities could be related to the different substrates in the influents, filling materials, and residual disinfectants. Chlorination and ozonation inactivated the existing bacteria in the influent and formed different bacterial communities, which could be resistant to the oxidants and effectively utilize different substrates produced by the oxidant, including Phreatobacter in the rapid filters and Hyphomicrobium in the BAC filters. Bradyrhizobium and Leptothrix, which could utilize compounds adsorbed on the GAC, were abundant in the BAC filters. Ozonation increased taxonomic diversity but decreased functional diversity of the bacterial communities in the BAC filters. This study provides some new insights into the effects of oxidation processes and filling materials on the bacterial community structure in the biological filters of drinking water treatment plants.

온도 변수에 대한 유류의 휘발특성 및 탄화수소 화합물의 존재비에 관한 연구 (Evaporation Characteristics of Oil and Abundance Ratio of Hydrocarbon Compounds at Different Temperatures)

  • 최정식
    • 해양환경안전학회지
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    • 제27권7호
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    • pp.1116-1123
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    • 2021
  • 해수에 유출된 유류는 대기와 해수와의 접촉을 통해 다양한 풍화 과정(증발, 확산, 분산, 유화, 용해, 산화, 침전 및 생물분해 등)을 통해 물리·화학적 변화와 함께 생물학적 분해과정을 겪는다. 본 연구에서는 여러 가지 풍화작용 중 가장 즉각적이고 빠르며 오염물질의 질량에 가장 큰 영향을 미치는 인자라고 알려진 증발(evaporation)에 대한 영향을 확인해보고자 하였다. 휘발유, 등유, 경유를 대상으로 25 ℃(해수 연평균 온도)와 35℃(적도 부근 온도) 조건에서 유류의 휘발특성을 비교하였다. 이를 위해, 일정 기간마다 채취한 유류를 전처리하여 GC/MS 분석을 수행하고, 탄화수소의 변화량을 계산하여 비교하였다.

The impact of overnight lairage on meat quality and storage stability of pork loin

  • Minwoo Choi;Dongheon Lee;Hyun Jung Lee;Ki-Chang Nam;Sung-Sil Moon;Jong Hyun Jung;Cheorun Jo
    • Journal of Animal Science and Technology
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    • 제66권2호
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    • pp.412-424
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    • 2024
  • Lairage, a part of the animal welfare practices, has been known to mitigate pre-slaughter stress in animals. However, research investigating the relationship between lairage and pork meat quality remains scarce. In this study, we conducted a comparative analysis of the physicochemical quality and storage stability of pork from pigs subjected to immediate slaughter (CON) and those provided with a 24 h lairage before slaughter (LRG) over a 7-day storage period. The loins from 20 castrated pigs in each group, respectively, were collected at 1, 3, 5, and 7 days and used for analysis of meat quality and storage stability, including pH, meat color, moisture, water holding capacity, drip loss, cooking loss, shear force, fatty acid composition, lipid oxidation, antioxidant activity, and electrical resistance. Overall, there were no significant differences in physicochemical meat quality parameters between CON and LRG groups. Similarly, no differences were observed in the storage stability of pork including 2-thiobarbituric acid reactive substances, 2,2-diphenyl-1-picrylhydrazyl radical scavenging activity and electrical resistance. However, the proportion of unsaturated fatty acids was significantly higher in LRG compared to CON. In conclusion, 24 h lairage for castrated pigs had limited impact on meat quality and storage stability but led to an increase in the unsaturated fatty acid proportion.

Determination of Optimal Storage Condition for Pre-packed Hanwoo Loin

  • Seol, Kuk-Hwan;Park, Tu San;Oh, Mi-Hwa;Park, Beom-Young;Cho, Seong In;Lee, Mooha
    • 한국축산식품학회지
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    • 제33권3호
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    • pp.390-394
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    • 2013
  • The aim of this study was to determine the optimal storage condition of pre-packed Hanwoo beef without freezing. Hanwoo loin was purchased from a local distributor at 48 h after slaughter, then sliced in $1.5{\pm}0.5$ cm thickness, and packed in a polyethylene (PE) tray covered with linear low-density polyethylene (LLDPE) film. The studied factors to set the optimal storage condition were chamber temperature (5, 2.5 and $-1^{\circ}C$ for 14 d), cooling method (direct and indirect cooling system), and ultraviolet (UV) light irradiation for beef surface sterilization (0, 30, 60, and 120 min). The changes of pH, thiobarbituric acid reactive substances (TBARS) and number of aerobic bacteria were measured during storage. Beef samples stored in $-1^{\circ}C$ showed the minimal increasing rate in TBARS and microbial growth. After 15 d of storage, there was no significant difference in pH and TBARS values. However, the microbial population of beef stored in direct type cooling chamber ($4.25{\pm}0.66$ Log CFU/g) was significantly lower than that of beef stored in indirect type chamber ($6.47{\pm}0.08$ Log CFU/g) (p<0.05). After 4 d of storage, 60 or 120 min UV light irradiated beef samples showed significantly lower microbial population, and at 14 d of storage, 60 min UV irradiated beef sample showed significantly lower microbial population ($3.14{\pm}0.43$ Log CFU/g) than control ($4.46{\pm}0.13$ Log CFU/g) (p<0.05). However, TBARS values of 60 or 120 min UV light irradiated beef samples were significantly higher than non-irradiated beef sample after 4 d of storage (p<0.05).

오존과 과산화수소를 이용한 이취미 물질 산화 제거 (Removal of Odorous Compounds Using Ozone and Hydrogen Peroxide)

  • 이화자;손희종;노재순;이상원;지기원;유평종;강임석
    • 대한환경공학회지
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    • 제28권12호
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    • pp.1323-1330
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    • 2006
  • 오존/과산화수소 공정을 이용한 급속 모래여과 처리수 중의 geosmin 제거에서 오존만 20 mg/L 투입한 경우보다 오존 5 mg/L와 과산화수소 0.2 mg/L를 투입하여 처리한 경우가 더 높은 제거율을 보였으며, 오존/과산화수소 공정에 의해 원수 중에 함유된 geosmin의 경우는 급속 모래여과 처리수보다 $12{\sim}27%$ 정도 낮은 제거율을 나타내었다. 급속 모래여과 처리수 중에 함유된 geosmin과 IPMP에 대해 오존 투입농도별로 투입된 과산화수소와 오존의 비($H_2O_2/O_3$)에 따른 제거율을 살펴본 결과, 오존농도가 1 mg/L 이하의 경우에서는 $H_2O_2/O_3$ 비가 적정 비율 이상으로 높아지면 geosmin과 IPMP 제거율이 감소하였으며, 적정 $H_2O_2/O_3$ 비는 실제 정수장에서 사용하고 있는 후오존 투입농도인 $1{\sim}2$ mg/L에서 geosmin의 경우 $0.5{\sim}1$, IPMP의 경우 $0.2{\sim}1$로 나타났으며, 원수 중에 함유된 geosmin 제거를 위한 적정 $H_2O_2/O_3$ 비는 오존 투입농도 $1{\sim}2$ mg/L 범위에서 $1{\sim}3$ 정도로 광범위하게 나타났다. 급속 모래여과 처리수에 함유된 이취미 물질 5종에 대한 오존(0.5, 1.0, 2.0 mg/L) 투입농도별 잔존율을 살펴본 결과, IPMP의 제거율이 60% 이상으로 가장 높게 나타났으며, 오존/과산화수소 공정이 오존 단독공정 보다 제거율이 전반적으로 높게 나타났다. 오존/과산화수소 공정을 이용한 BDOC 생성능을 오존 투입농도 $0.5{\sim}2$ mg/L에서 과산화수소 투입농도별로 조사한 실험에서 오존/과산화수소 공정이 오존 단독공정보다 추가적으로 0.9 정도의 BDOC/DOC 비가 상승하여 0.34까지 증가하였다.