• Title/Summary/Keyword: Pre-Coating

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Optimization of PMD(Pre-Metal Dielectric) Linear Nitride Precess (PMD(Pre-Metal Dielectric) 선형 질화막 공정의 최적화에 대한 연구)

  • 정소영;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.10
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    • pp.779-784
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    • 2001
  • In this work, we studied the characteristics of nitride films for the optimization of PMD(pro-metal dielectric) linear process, which can be applied to the recent semiconductor manufacturing process. We split the deposit condition of nitride films into four parts such as PO(protect overcoat) nitride, baseline, low hydrogen and high stress and low hydrogen, respectively. We tried to find out correlation between BPSG deposition and densification. In order to analyze the changes of Si-H and Si-NH-Si bonding density, we used FTIR area method. We also investigated the crack generation on wafer edge after BPSG densification, and the changes of nitride film stress as a function of RF power variation to judge whether the deposited films.

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The Effect of Physical and Chemical Stimuli on Ophthalmic Lens Coatings (물리적, 화학적 자극이 안경 렌즈의 코팅에 미치는 영향)

  • Kim, So Ra;Kim, Ji Yoon;Kim, Ka Young;Park, Mijung
    • Journal of Korean Ophthalmic Optics Society
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    • v.16 no.3
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    • pp.237-245
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    • 2011
  • Purpose: The present study was conducted to investigate whether certain repeated physical and/or chemical stimuli added on ophthalmic lenses might induce any changes of the functions of lens coatings. Methods: The changes in lens surface, light transmittance, foggy duration, durability of ophthalmic lenses were determined after the application of tearing-off with tape, rubbing with acetone, soaking in acetone or distilled water of ophthalmic lens (CR-39 material) as physical and/or chemical stimuli. Results: The change of ophthalmic lens surface was detected after soaking in acetone for longer than 30 minutes by observing the lens surface to figure out the functional change of hard coating. The ophthalmic lens soaked in distilled water for 180 minutes showed little functional change of anti-reflection coating as 1% by measuring light transmittance of lens. However, the function of anti-reflection coating was almost disappeared after the ophthalmic lens was soaked in acetone for 60 minutes. The foggy duration of ophthalmic lens soaked in acetone was increased by estimating foggy duration of lens. The lens coating was shown to be defected when the pre-damaged ophthalmic lenses were torn off with tape, rubbed with acetone and soaked in distilled water or acetone by observing pre-damaged lens surface to evaluate its durability. Conclusions: The careful management during ophthalmic lens dispensing or usual eyeglass wearing is needed since the change in ophthalmic lens coatings was shown by repeated physical and/or chemical stimuli.

Properties of thermally stimulated current of PAAS thin film using spin coating method (Spin coating한 polyamic acid alkylamine salt(PAAS) 박막의 열자격 전류 특성)

  • Lee, H.S.;Lee, S.Y.;Lee, W.J.;Kim, T.W.;Kang, D.Y.
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1719-1721
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    • 1996
  • This paper describes the thermally stimulated current(TSC) of PAAS spin coated film and the electrical properties of pre TSC measurement and after TSC test specimens. The TSC measurement were performed from room temperature to about $280^{\circ}C$ and the temperature was increased by $5^{\circ}C/min$ automatically. It shows that two peaks of TSC are observed at about $50^{\circ}C$ and about $160^{\circ}C$. Result of this measurement indicate that one peak; $50^{\circ}C$ is from alkyl group; other peak at $160^{\circ}C$ is due to alkyl and C-O group of PAAS. Addition to larger peak at about $160^{\circ}C$ is due to dipolemoment of PAAS film. This result is proved by DSC measurement of PAAS film. The electrical properties of pre and after TSC were measured by currant-voltage(l-V) characteristics. The current-voltage characteristics after TSC specimens are increased the conductivity. The electrical properties of pre-after TSC measurement specimen is in the middle of imidization of PAAS. Because of this result a thermal imidization was performed at $300^{\circ}C$ for 1 hour.

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Solar Cell Efficiency Improvement using a Pre-deposition Temperature Optimization in The Solar Cell Doping Process (도핑 공정에서의 Pre-deposition 온도 최적화를 이용한 Solar Cell 효율 개선)

  • Choi, Sung-Jin;Yoo, Jin-Su;Yoo, Kwon-Jong;Han, Kyu-Min;Kwon, Jun-Young;Lee, Hi-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.244-244
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    • 2010
  • Doping process of crystalline silicon solar cell process is very important which is as influential on efficiency of solar. Doping process consists of pre -deposition and diffusion. Each of these processes is important in the process temperature and process time. Through these process conditions variable, p-n junction depth can be controled to low and high. In this paper, we studied a optimized doping pre-deposition temperature for high solar cell efficiency. Using a $200{\mu}m$ thickness multi-crystalline silicon wafer, fixed conditions are texture condition, sheet resistance($50\;{\Omega}/sq$), ARC thickness(80nm), metal formation condition and edge isolation condition. The three variable conditions of pre-deposition temperature are $790^{\circ}C$, $805^{\circ}C$ and $820^{\circ}C$. In the $790^{\circ}C$ pre-deposition temperature, we achieved a best solar cell efficiency of 16.2%. Through this experiment result, we find a high efficiency condition in a low pre-deposition temperature than the high pre-deposition temperature. We optimized a pre-deposition temperature for high solar cell efficiency.

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Study on Anti-oxidization Coating for Staged Combustion Cycle Rocket Engine (다단연소 사이클 엔진 적용을 위한 내산화 코팅에 관한 연구)

  • Kim, Young-June;Byon, Eung-Sun;Rhee, Byong-ho;Han, Yeoung-Min;Noh, Yong-Oh;Bae, Byung-Hyun;Hyun, Seong-Yoon;Cho, Hwang-Rae;Bang, Jeong-Suk
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2017.05a
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    • pp.864-870
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    • 2017
  • The propellants are burned in the pre-burner of the staged combustion cycle engine, and the resulting hot gas drives the turbine, and the turbine operates the turbo pump. The burned gas passing through the turbo pump is supplied to the combustor at high temperature and high pressure, where the gas is supplied in an excess of fuel or an excess of oxidant depending on the amount of fuel or oxidant. When the cycle works at oxidizer-rich staged combustion, its metal pipe can ignite or explode by the impact of even small particles. In this study, we develop the powder combinations for anti-oxidation coating through the analysis of other coating materials and establish the coating process.

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A Study on Anti-oxidization Coating for Staged Combustion Cycle Rocket Engines (다단연소 사이클 엔진 적용을 위한 내산화 코팅에 관한 연구)

  • Kim, Young-June;Rhee, Byong-ho;Noh, Yong-Oh;Bae, Byung-Hyun;Hyun, Seong-Yoon;Cho, Hwang-Rae;Bang, Jeong-Suk;Byon, Eung-Sun;Han, Yeoung-Min
    • Journal of the Korean Society of Propulsion Engineers
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    • v.22 no.5
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    • pp.125-131
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    • 2018
  • Some propellants in a liquid rocket engine are burned in the pre-burner of a staged combustion cycle engine, resulting hot gas drives the turbine. The burned gas passing through the turbine is supplied to the combustor at high temperature and pressure. The form of the gas can be fuel rich or oxidizer rich dependent upon the mixture ratio or the engine scheme. When the cycle works at oxidizer-rich condition, the metal pipes composing the engine can be ignited or even exploded by an impact of very a small particle. In this study, we developed the powder combination and processes for an anti-oxidation coating through the analysis of various coating materials.

Development of the Splint Manufacturing Process Using Indirect Coating and Roll Bonding (간접 코팅과 롤 접합을 이용한 의료용 스플린트 제작 및 공정기술 개발)

  • Ha, Kyoung-Ho;Kang, Dae-Min;Lee, Jung-Hee;Kwak, Jae-Seob
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.18 no.2
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    • pp.1-6
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    • 2019
  • With the increase in number of the athletic population and elderly demographic, the demand for orthopedic splints, which are used to support a damaged body, has rapidly increased. Current splints mainly consist of inner and outer parts, which are multiple fabrics covered with polyurethane and nonwoven fabrics, respectively. However, the laminated materials with directly applied pre-polymer coating lead to a high defect rate because of the uneven thickness on the surface. Thus, this study proposes an indirect coating method using a precise clearance controller, which enables the even application of the coating material on multiple inner parts while maintaining a constant thickness. In addition, a roll-to-roll (R2R) technique is applied instead of the sewing mechanism to bond the inner and outer materials together and enhance the productivity in the final stage. In the advanced methods, there is a storage tank that contains polyurethane, a clearance controller, and pairs of rollers in the upper and lower rows. To improve the quality of the products and optimize the equipment, three controllable factors are determined: the viscosity of polyurethane, angle of the gap controller and number of pairs of rollers in the R2R system.

Double Convective Assembly Coatings of FePt Nanoparticles to Prevent Particle Coalescence during Annealing

  • Hwang, Yeon
    • Korean Journal of Materials Research
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    • v.21 no.3
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    • pp.156-160
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    • 2011
  • FePt nanoparticles suspension was synthesized by reduction of platinum acetylacetonate and decomposition of iron pentacarbonyl in the presence of oleic acid and oleyl amine. FePt nanoparticles were coated on a substrate by convective assembly from the suspension. To prevent the coalescence during the annealing of FePt nanoparticles double convective coatings were tried. First convective coating was for silica particle assembly on a silicon substrate and second one was for FePt nanoparticles on the previously coated silica layers. It was observed by scanning electron microscopy (SEM) that FePt nanoparticles were dispersed on the silica particle surface. After annealing at $700^{\circ}C$ for 30 minutes under nitrogen atmosphere, FePt nanoparticles on silica particles were maintained in a dispersed state with slight increase of particle size. On the contrary, FePt nanoparticles that were directly coated on silicon substrate showed severe particle growth after annealing due to the close-packing of nanoparticles during assembly. The size variation during annealing was also verified by X-ray diffractometer (XRD). It was suggested that pre-coating, which offered solvent flux oppose to the capillary force between FePt nanoparticles, was an effective method to prevent coalescence of nano-sized particles under high temperature annealing.

Morphology Control of ZnO Nanorods on ITO Substrates in Solution Processes (습식공정 기반 ITO 기판 위 산화아연 나노로드 모폴로지 제어)

  • Shin, Kyung-Sik;Lee, Sam-Dong;Jeong, Soon-Wook;Lee, Sang-Woo;Kim, Sang-Woo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.11
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    • pp.987-991
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    • 2009
  • We report growth of vertically well-aligned zinc oxide (ZnO) nanorods on indium-tin oxide (ITO)/glass substrates using a simple aqueous solution method at low temperature via control of the ZnO seed layer morphology. ZnO nanoparticles acting as seeds are pre-coated on ITO-coated glass substrates. by spin coating to control distribution and density of the ZnO seed nanoparticles. ZnO nanorods were synthesized on the seed-coated substrates in a dipping process into a main growth solution. It was found that the alignment of ZnO nanorods can be effectively manipulated by the spin-coating speed of the seed layer. A grazing incidence X-ray diffraction pattern shows that the ZnO seed layer prepared using the higher spin-coating speed is of uniform seed distribution and a flat surface, resulting in the vertical growth of ZnO nanorods aligned toward the [0001] direction in the main growth process.

A Study on the Preparation of Ternary Transition Metal Coated-Dimensionally Stable Anode for Electrochemical Oxidation (전기화학적 산화를 위한 삼원 전이 금속 코팅 불용성 산화 전극 제조에 관한 연구)

  • Park, Jong-Hyeok;Choi, Jang-Uk;Park, Jin-Soo
    • Applied Chemistry for Engineering
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    • v.32 no.4
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    • pp.409-416
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    • 2021
  • Dimensionally stable electrodes are one of the important components in electrochemical water treatment processes. In the manufacturing of the dimensionally stable electrodes, the type of metal catalyst coated on the surface of the metal substrate, the coating and sintering methods substantially influence their performance and durability. In this study, using Ir-Ru-Ta ternary metal coating, various electrodes were prepared depending on the coating method under the same pre-treatment and sintering conditions, and its performance and durability were studied. As a coating method, brush and spray coating were used. As a result, the reduction in the amount of catalyst ink was achieved because more amount of metal could be coated for the electrode using spraying with the same amount of catalyst ink. In addition, the spray_2.0_3.0 electrode prepared by a specific spray coating method shows the phenomenon of cracking and the uniform coating of the ternary metal on the surface of the coating layer, and results in a high electrochemically active specific surface area, and the decomposition performance of 4-chlorophenol was superior to the other electrodes. However, it was found that there was no significant difference in durability depending on the coating method.