• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.77-77
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• 1998

Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.189-190
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• 2011

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance (RC) delay나 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 SiO2와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 SiO2 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200 도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 SiO2와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장 했다. 이는 V의 oxide formation nergyrk Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, V+5 이온 반경이 Mn+2 이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.256-256
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• 2012

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• Analytical Science and Technology
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• v.15 no.3
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• pp.236-242
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• 2002

A method was investigated to determine the thickness of coating on steel sheet using rf glow discharge atomic emission spectrometer. The RF gas-jet boosted glow discharge has such salient feature as good pleasure stability and high sputtering efficiency that it was possible to determine the thickness of silicon resin film on zinc electroplated steel. The erosion speed variation is dependent on discharge power, gas flow rate and discharge pressure. therefore determine discharge condition to measure the thickness of coating on steels. The fundamental studies have been carried out to investigate an optimum condition for in-depth analysis and composition of zinc coating on steel. In this study, the calibration curve for thickness determination of silicon resin film was found to be linear in the range of $1000{\sim}3500mg/m^2$ film thickness. The developed rf gas-jet boosted glow discharge was applied to the analysis of zinc coating and silicon resin film on steel made by RIST.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.8
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• pp.699-705
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• 2015

Aircraft needs high lift-to-drag ratio and weight reduction of the structure for long endurance flight with a small power. Generally high aspect ratio wing is applied to HALE(High Altitude Long Endurance) aircraft. Also high modulus, and high strength CFRP(Carbon Fiber Reinforced Plastic) has been used in primary structures. and thin mylar(membrane material) film has been applied to skin of wing. As a result, wing is more flexible than the other structures. and the stiffness of thin mylar film has an affect on dynamic stability. In this study, the membrane characteristic of mylar film has been simulated using nonlinear gap elements. And equivalent modeling method using shell elements is presented using the nonlinear simulation result. The linear equivalent model has verified using the results of nonlinear membrane method. Proposed linear equivalent shell model has applied to mode analysis for estimate the effect of mylar mechanical properties on natural frequency.

• Korean Journal of Food Science and Technology
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• v.12 no.4
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• pp.229-234
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• 1980

Deep-fried instant noodle was prepared on a laboratory scale (150 units). A part of the noodle was packed in gas-proof laminated film bags with a small package of an oxygen scavenger made from Fe-powder and a 150 ml of air in each bag(Sample 1). Another part was packed in ordinary laminated film bags (Control), and the rest was vacuum-packed (74 mmHg) in the gas-proof film bags (Sample 2). All samples were placed in an incubator kept at $45.0{\pm}0.5^{\circ}C$ for 45 days. Oxygen-removing power of the scavenger, and peroxide and thiobarbituric acid values of the samples were determined regulary. The results of the study are as follows: 1. The residual oxygen concentration of the bags in Sample 1 decreased from the original 21% to less than 0. 5% after 48 hr. 2. POVs of Control, Samples 1 and 2 after 45 days were $12.4{\pm}0.4$, $5.7{\pm}0.2$ and $6.8{\pm}0.1\;meq/㎏$ fat respectively. It was noteworthy that the POV of Sample 1 did not change significantly during the storage period. The scavenger seemed very effective in retarding the POV development of Sample 1. 3. TBA values of Control, Sample 1 and 2 after 45 days were $1.31{\pm}0.04$, $0.60{\pm}0.04$, and $0.72{\pm}0.07$. As in the case of POVs, the samples packed with the scavengers exhibited consistently smaller TBA values than the vacuum-packed samples in later stages of the storage period.

• The Journal of Korean Academy of Sensory Integration
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• v.11 no.2
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• pp.1-11
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• 2013

Objective : The purpose of this study is to verify the effect of sensory integrative intervention on postural control and occupational performance (play) of the preschool child with postural disorder. Methods : Subject of this study was a 5 years and 8 month old boy. The subject underwent a sensory integration (SI) treatment which was part of the SI clinic course administered by the Korean Sensory Integration Society, in 2012. The treatment goal and treatment plan had established based on the evaluation results. Treatment was done with 11 sessions, the treatment activities and the adaptive responses of the subject were measured as outcome of the SI treatment. The goal of sessions were measured as Goal Attainment Scale, and re-evaluation was done on December in 2012. Results : During SI treatment, the subject was improved the stability of proximal body parts so that maintained Supine-Flexion Posture more than 20 seconds. He also showed increased attention span continuously about 1 activity on physical play. Conclusion : According to the results of this study, it was verified that sensory integrative intervention has positive effective on postural control and occupational performance (play) of the preschooler with postural disorder.

• Korean journal of food and cookery science
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• v.15 no.5
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• pp.500-506
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• 1999

Scanning electron microscopy was used to study changes in granule shape, dough and cooked noodle structure of pea starch-wheat composite flour with 20% and 30% pea starch substitution. The granule shape of pea starch with low swelling power and solubility was oval, irregular and smooth, which had more a deep groove than corn starch and wheat flour. During gelatinization, pea starch after swelling was partially collapsed but it still held its main shape. The dough microstructure of 20% pea starch substitution showed compact structure distributed with more small starch granules than wheat dough and was held in discontinuous network. When cooked, more open filamentous network where starch gelatinization was complete were noticed. Swollen but partially collapsed large starch granules maintaining their shape were appeared in noodle structure after 30 min soaking in soup. In farinograph studies, 20% pea starch substitution to wheat flour showed that MTI value was as same as wheat flour even though stability was slightly decreased so that it was considered that it has proper property of noodle making.

• Journal of the Korean Recycled Construction Resources Institute
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• v.6 no.3
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• pp.207-213
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• 2018

Nowadays, circulating fluidized bed combustor(CFBC) boilers system that can reduce environmental pollution particles are widely used in electric power plants. But the fly ash generated from CFBC boilers has lower $SiO_2$ and higher MgO and $SO_3$ contents and also has free CaO inducing expansion and abrupt initial setting of concrete. Therefore, revised KSL5405 for CFBC fly-ash as well as pulverized coal combustion(PCC) is introduced in the concrete field. In this study, the chemical properties and mechanical properties of blended cements with PCC and CFBC fly-ash produced in Korea are analyzed. The blended cement with only CFBC fly ash shows a lower length change than OPC but a higher flow change ratio. The compressive strength of blended cement paste with PCC and CFBC fly ash is slightly greater than that of cement paste with only PCC fly-ash. Based on the results, CFBC flyash blended cement products should be used with PCC flyash to ensure the material stability and material properties.

• Journal of Radiation Protection and Research
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• v.39 no.2
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• pp.89-95
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• 2014

In potential accident consequence assessments for the licensing approval of LWRs, the ground deposition of radionuclides released into the environment is not allowed into the models, as recommended in the U. S. Nuclear Regulatory Commission's regulatory guide. Meanwhile, it is allowed into the assessment models for the licensing approval of PHWRs with consideration of more detailed physical processes of radionuclides in the atmosphere. Under these backgrounds, importance of exposure dose by ground deposition was quantitatively evaluated and comprehensively discussed. For potential accidental releases of $^{137}Cs$ and $^{131}I$, total exposure doses were more conservative in case of without consideration of ground deposition than in case of with its consideration. It was because of that the depletion of air concentration resulting from ground deposition is more influential in the contribution to total exposure doses than additional doses from contaminated ground. The exposure doses by the inhalation of contaminated air showed the contribution of more than 90% in total exposure doses, depending on atmospheric stability, release period of radionuclides and distance from a release point. The exposure doses from contaminated ground showed less than 10% at most in contribution of total exposure doses. The ratios of total exposure doses in case of with consideration of deposition to without its consideration for $^{131}I$ were distinct than those for $^{137}Cs$. As the atmosphere is more stable, release duration of radionuclides is longer, distance from a release point is longer, it was more distinct.