• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1280-1287
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• 2002

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.294-299
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• 2001

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for various materials, capable of producing micro structures larger than 100 m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1060-1063
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• 2001

The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu$m. This paper describes the performance of powder blasting technique in micro-pocketing of stainless steel and the effect of the number of nozzle scanning and the nozzle height on the depth and width of pockets. Experimental results showed that increasing the no. of nozzle scanning and decreasing the nozzle height resulted in the increase of depth and width in pockets. Increase of width results from wear of mask film.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.6 no.1
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• pp.34-42
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• 2007

Powder blasting technique has been considered one of the most appropriate micro machining methods for hard and brittle materials, since the productivity is high and the heat layers caused by material removal are very thin. Recent development of special purposed parts, such as the parts for semiconductor processing, the parts for LCD, sensors for micro machine fabrication and so on, has been expanded. Thus, it is essential to develop powder blasting technologies for micromachining of hard and brittle materials such as glass, ceramics and so on. In this paper, the characteristics of powder blasted glass surface were tested under various blasting parameters. Finally, we proposed a predictive model for powder blasting process using the neural network and the response surface method. Detail analysis of the simulation results is carried out and the performance of two predictive models is compared.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.30 no.2
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• pp.8-14
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• 2007

The powder blasting process has become an important machining technique for the cost effective fabrication of micro devices. This process is similar to sand blasting, and effectively removes hard and brittle materials. A large number of investigations on the abrasive jet machining with such output parameters as material removal rate, penetration and surface roughness have been carried out and reported by various authors. To achieve higher surface roughness, to increase material removal rate and to identify the influence of blasting parameters on the output parameters, we use the taguchi method which is one of the design methods of experiments. We can select process parameters to optimize the blasting process of glass. Experimental results indicate that the taguchi method is useful as a robust design methodology for the powder blasting process.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.146-153
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• 2006

Acceleration sensors have widely been used in the various fields of industry. In recent years, micromachining accelerometers have been developed and commercialized by the micromachining technique or MEMS technique. Typical structure of such sensors consist of a cantilever beam and a vibrating mass fabricated on Si wafers using etching. This study investigates the feasibility of powder blasting technique for microfabrication of sensor structures made of the pyrex glass alternating the existing Si based acceleration sensor. First, as preliminary experiment, effect of blasting pressure, mass flow rate of abrasive and no. of nozzle scanning on erosion depth of pyrex and soda lime glass is studied. Then the optimal blasting conditions are chosen for pyrex sensor. Structure dimensions of designed glass sensor are 2.9mm and 0.7mm for the cantilever beam length and width and 1.7mm for the side of square mass. Mask material is from aluminium sheet of 0.5mm in thickness. Machining results showed that tolerance errors of basic dimensions of glass sensor ranged from 3um in minimum to 20um in maximum. This results imply the powder blasting can be applied for micromachining of glass acceleration sensors alternating the exiting Si based sensors.

• Design & Manufacturing
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• v.14 no.1
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• pp.36-41
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• 2020

Recently, due to the development of MEMS technology, researches for the production of effective micro structures and shapes have been actively conducted. However, the process technology based on chemical etching has a number of problems such as environmental pollution and time problems due to multi-process. Various processes to cope with this process are being studied, and one of the mechanical etching processes is the powder blasting process. This process is a method of spraying fine particles, which has the advantage of being an effective process in manufacturing hard brittle materials. However, it is also a process that adversely affects the material surface roughness and material properties due to the impact of the injection of fine particles. In this study, after fabricating micro-channels in fused silica glass with excellent optical properties among the hard brittle materials, we used the nano indentation system to analyze the micro parts using nano-particles as well as machinability and surface roughness analysis of the processed surface. The analysis was performed for the effective processing of powder blasting.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.10a
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• pp.268-273
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• 2002

The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100$\mu\textrm{m}$. This paper describes the performance of powder blasting technique in micromachining of pyrex for the accelerometer sensor and the effect of the number of nozzle scanning and the stand-off distance on the erosion depth.

• Explosives and Blasting
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• v.27 no.1
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• pp.53-61
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• 2009

R.O.K's explosive manufacturing source was first black powder (B.P) introduced into Korea Dynasty from China. In 1890, black powder was first used for mining blasting in Masan. Nowadays, a vibration control blasting method using the emulsion explosive has been applid to explosive demolition of building structure, subway and road construction sites. In December, 2006, Korean Government and professional society (KSEE) established the blasting guidelines of Modern Vibration Controlled Blasting Method (MVCBM) which is an unprecedented in the world.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.5
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• pp.51-58
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• 2006

The old technique of sandblasting which has been used for paint of scale removing, deburring and glass decorating has recently been developed into a powder blasting technique for brittle materials, capable of producing micro structures larger than $100{\mu}m$. Recently, this technique is applied to fabrication of the glass cap for OELD packaging. But, micro crack is generated on the blasted glass, which cause to decrease fracture strength. In this paper, we investigated the effect of blasting parameters on surface characteristics, surface shape and fracture strength of the powder blasted glass surface.