Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2002.10a
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- Pages.268-273
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- 2002
Micromachining of Pyrex Class for Accelerometer
가속도 센서용 파이렉스 유리의 미세가공
Abstract
The mechanical etching technique has recently been developed to a powder blasting technique for various materials, capable of producing micro structures larger than 100