• ETRI Journal
• /
• 제26권4호
• /
• pp.315-320
• /
• 2004

This paper proposes a 10-${\mu}m$ thick oxide layer structure that can be used as a substrate for RF circuits. The structure has been fabricated using an anodic reaction and complex oxidation, which is a combined process of low-temperature thermal oxidation (500 $^{\circ}C$ for 1 hr at $H_2O/O_2$) and a rapid thermal oxidation (RTO) process (1050 ${\circ}C$, for 1 min). The electrical characteristics of the oxidized porous silicon layer (OPSL) were almost the same as those of standard thermal silicon dioxide. The leakage current density through the OPSL of 10 ${\mu}m$ was about 10 to 50 $nA/cm^2$ in the range of 0 to 50 V. The average value of the breakdown field was about 3.9 MV/cm. From the X-ray photo-electron spectroscopy (XPS) analysis, surface and internal oxide films of OPSL prepared by a complex process were confirmed to be completely oxidized. The role of the RTO process was also important for the densification of the porous silicon layer (PSL) oxidized at a lower temperature. The measured working frequency of the coplanar waveguide (CPW) type short stub on an OPSL prepared by the complex oxidation process was 27.5 GHz, and the return loss was 4.2 dB, similar to that of the CPW-type short stub on an OPSL prepared at a temperature of 1050 $^{\circ}C$ (1 hr at $H_2O/O_2$). Also, the measured working frequency of the CPW-type open stub on an OPSL prepared by the complex oxidation process was 30.5 GHz, and the return was 15 dB at midband, similar to that of the CPW-type open stub on an OPSL prepared at a temperature of $1050^{\circ}C$ (1 hr at $H_2O/O_2$).

• 센서학회지
• /
• 제29권4호
• /
• pp.232-236
• /
• 2020

Three-dimensional (3D) multilayered Pt electrodes were fabricated to develop a porous electrode using a pattern-transfer printing process. The Pt thin films were deposited using a transferred sputtering pattern having a 250 nm line width on the substrate, and the uniform line patterns were efficiently transferred using our proposed method. Temperature-programmed desorption (TPD) analyses were used to evaluate the porosity of the electrodes. It was possible to distinguish between two resolved maxima at 168 and 227 ℃, which could be described in terms of desorption reactions on the Pt (111) planes. The results of the TPD analysis of the 3D and multilayered Pt electrodes prepared through transfer printing were compared to those of an electrode fabricated through screen printing using a commercial Pt-carbon paste commonly used as porous electrodes. It was confirmed that the 3D multilayered electrodes exhibited a desorption concentration approximately 100 times higher than that of the Pt-carbon composite electrode, and the desorption concentration increased by approximately 0.02 mg/mol per layer. The 3D multilayered electrode effectively functions as a porous electrode and a catalyst.

• 한국진공학회지
• /
• 제17권1호
• /
• pp.46-50
• /
• 2008

Febry-Perot 프린지 패턴의 광 반사성을 가지고 있는 다공성 실리콘을 이용하여 암호화된 광학 이미지를 제작하였다. 암호화된 광학이미지 다공성 실리콘 샘플은 p-type 실리콘 웨이퍼 (boron-doped,<100> orientation, resistivity $0.8{\sim}1.2m{\Omega}-cm$)를 이용하여 빔 프로젝트의 광원과 전기화학적 식각을 통하여 만들어 졌다. 광학 이미지 다공성 실리콘 샘플은 전기화학적 식각과정에 빔 프로젝트의 광원에 의하여 톡특한 Febry-Perot 프린지 패턴을 나타낸다. 실리콘 웨이퍼의 광 반사성의 프린지 패턴을 퓨리에 변환을 통하여 유효광학두께를 측정하고 실리콘웨이퍼에 암호화 시킨 광학이미지를 제작하였다.

• 대한화학회지
• /
• 제57권5호
• /
• pp.547-553
• /
• 2013

전해연마를 한 지르코늄(Zr)을 가지고 $F^-$ 이온이 함유된 무기 전해질과 유기 전해질에서 2 단계 양극산화를 진행하여 산화 지르코늄($ZrO_2$) 나노 다공성 산화막을 제조하였다. 2 단계 양극산화를 진행하면서 무기 전해질에서보다 유기 전해질에서 만들어진 지르코늄 산화막이 보다 균일한 나노 다공성 산화막을 가지게 되었다. 나노 다공성 산화막의 크기와 구조는 FE-SEM(field emission scanning electron microscopy), XRD(X-ray diffraction), EDS(energy dispersive spectroscopy)를 이용하여 특성을 분석하였고 형광스펙트럼을 측정하여 $ZrO_2$ 나노 다공성 산화막의 형광성을 알아보았다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 하계학술대회 논문집 D
• /
• pp.1547-1549
• /
• 1999

As a preliminary experiment for the development of anode-supported tubular cell with proper porosity, we have investigated the anode substrate and the electrolyte-coated anode tube. The anode substrate was manufactured as a function of carbon content in the range of 20 to 50 vol.%. As the caron content increased, the porosity of the anode substrate increased slightly and the carbon content with proper porosity was obtained at 30 vol.%. The anode tube was fabricated by extrusion process and the electrolyte layer was coated on the anode tube by slurry dipping process. The anode-supported tube was cofired successfully. Their sintered property and microstructure were examined and the porosity of the anode tube was 35%. From the gas permeation test, the anode tube was found to be porous enough for gas supply. On the other hand, the anode-supported tube with electrolyte layer indicated a very low gas permeation rate. This means that the coated electrolyte was dense. Based upon these experimental results. we will fabricate and test the anode-supported tubular cell.

• 한국재료학회지
• /
• 제12권11호
• /
• pp.856-859
• /
• 2002

To investigate effects of heat treatments including grain size control in substrate aluminum on nanopore arrays in anodic alumina template, aluminum was heat treated at $500^{\circ}C$ for 1h. The heat treated aluminum was anodized by two successive anodization processes in oxalic solution and the nanopore arrays in anodic alumina layer were studied using TEM and FE-SEM. The highly ordered porous alumina templates with 110 nm interpore distance and 40 nm pore diameter have been observed and the pore array of the anodic alumina has a uniform and closely-packed honeycomb structure. In the case of alumina template obtained from heat treated aluminum substrate, the well- ordered nanopore region in anodic alumina increased and became more homogeneous compared with that from non-heattreated one.

• 한국재료학회지
• /
• 제22권1호
• /
• pp.8-15
• /
• 2012

Silicon-based thin film was prepared at room temperature by an electrochemical deposition method and a feasibility study was conducted for its use as an anode material in a rechargeable lithium battery. The growth of the electrodeposits was mainly concentrated on the surface defects of the Cu substrate while that growth was trivial on the defect-free surface region. Intentional formation of random defects on the substrate by chemical etching led to uniform formation of deposits throughout the surface. The morphology of the electrodeposits reflected first the roughened surface of the substrate, but it became flattened as the deposition time increased, due primarily to the concentration of reduction current on the convex region of the deposits. The electrodeposits proved to be amorphous and to contain chlorine and carbon, together with silicon, indicating that the electrolyte is captured in the deposits during the fabrication process. The silicon in the deposits readily reacted with lithium, but thick deposits resulted in significant reaction overvoltage. The charge efficiency of oxidation (lithiation) to reduction (delithiation) was higher in the relatively thick deposit. This abnormal behavior needs to clarified in view of the thickness dependence of the internal residual stress and the relaxation tendency of the reaction-induced stress due to the porous structure of the deposits and the deposit components other than silicon.

• Progress in Superconductivity
• /
• 제7권1호
• /
• pp.52-57
• /
• 2005

[ $YBa_{2}Cu_{3}O_y$ ] superconducting films were prepared on $LaAlO_3$(100) single crystal substrate by spray pyrolysis method. The precursor solution was prepared by dissolving nitrate powders in de-ionized water. Both of ultrasonic and concentric nebulizers were used in order to generate fine droplets of precursor solution. C-axis oriented films were obtained at deposition temperature of $750\~850^{\circ}C$ and working pressure of 100 Torr and 500 Torr. In case of ultrasonic nebulizer, films showed rough and porous surface morphology due to formation of enormous droplets, while smooth and dense films were obtained for concentric nebulizer. A transport $J_c$ value of $0.43\;MA/cm^2$ at 77 K and self field was achieved on $LaAlO_3$(100) single crystal substrate.

• EDISON SW 활용 경진대회 논문집
• /
• 제5회(2016년)
• /
• pp.288-291
• /
• 2016

Recently, there has been a lot of researches related to two-dimensional (2D) materials due to their new properties and applications emerging upon 2D confinement. A new type of graphene like two-dimensional layer material, nitrogenated holey two-dimensional structure C2N-h2D, that is possession of evenly distributed holes and nitrogen atoms with proper bandgap has been synthesized. Previous calculation studies already have shown that the variance of the orbital interaction, band structure of few-layer C2N-h2D suggests that interlayer coupling does play an important role in its electronic properties. In this point, using first-principles density functional theory calculation, we here explore the effect of porous embedded iron atom and iron substrate on encapsulated few layer C2N-h2D. We show the atomic structures and the corresponding electronic structures of Fe@C2N to elucidate the effect of iron. Finally, this study demonstrates that embedded iron C2N has AA-stacking as most favorable stacked structure in contrast to pure C2N. In addition, iron substrate modifies its encapsulated C2N from semi-metallic states to metallic state.

• 공업화학
• /
• 제20권2호
• /
• pp.191-194
• /
• 2009

양극산화(anodization)에 의해 얻어지는 다공성 알루미나는 균일한 규칙성의 나노 구조를 지니며, 이를 제어하는 공정이 비교적 쉽고 경제적이어서 최근 연구가 광범위하게 진행되고 있다. 본 연구에서는 1차로 옥살산(oxalic acid)을 이용하여 양극 산화를 한 산화물 만들고, 이 산화물을 선택적으로 제거한 뒤 생기는 알루미늄 표면의 벌집모양의 패턴에 붕산(boric acid)을 이용하여 2차 양극산화를 하여 알루미늄 산화물 나노 돗(nanodot)을 형성하였다. 정렬된 정육면체의 모서리에 20 nm 높이의 나노 돗이 배열되어 있는 구조를 형성하기 위한 최적의 조건을 조사하였다. 알루미늄 산화물 나노 돗 층에 금을 코팅하여 육각벌집모양으로 배열된 금 나노 돗 층을 형성하였다. 이 표면은 향후 바이오센서에 적용될 것으로 기대된다.