• 한국세라믹학회지
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• 제36권9호
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• pp.901-908
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• 1999

Effects of LPMOCVD process parameters on the properties of TiO2 thin film were investigated. Depositions were made in the range of temperature 300-67$0^{\circ}C$ with various TTIP(Titanium Tetraisopropoxide) concentrations by contrlling bubbler temperature(40-8$0^{\circ}C$) and/or flow rate(30-90 sccm). Post annealing treatments were carried out at 500-80$0^{\circ}C$ range in the air. Films deposited at 40$0^{\circ}C$ have denser morphology than those of films deposited at 50$0^{\circ}C$ and $600^{\circ}C$ due to slower deposition rate. Bubbler temperature can affect on the deposition rate in mass transfer controlled regime such as 50$0^{\circ}C$ or higher but not below 50$0^{\circ}C$ where surface reaction rate becomes important. On the contrary for films deposited above 50$0^{\circ}C$ flow rate can raise deposition rate but eventually saturate it at the 50 sccm and above due to retarded adhesion of decomposed species. But for films deposited at 40$0^{\circ}C$ deposition rate increases stadily with flow rate. As the film becomes more porous A(200) texture can not be developed and AnataselongrightarrowRutile transition kinetics increases.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.160-160
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• 2017

Commercially pure titanium (Cp-Ti) and Ti alloys (typically Ti-6Al-4V) display excellent corrosion resistance and biocompatibility. Although the chemical composition and topography are considered important, the mechanical properties of the material and the loading conditions in the host have, conventionally. Ti and its alloys are not bioactive. Therefore, they do not chemically bond to the bone, whereas they physically bond with bone tissue. The electrochemical deposition process provides an effective surface for biocompatibility because large surface area can be served to cell proliferation. Plasma electrolyte oxidation (PEO) enables control in the chemical composition, porous structure, and thickness of the TiO2 layer on Ti surface. Silicon (Si) in particular has been found to be essential for normal bone and cartilage growth and development. Zinc (Zn) plays very important roles in bone formation and immune system regulation, and is also the most abundant trace element in bone. The objective of this work was to study on electrochemical behaviors of PEO-treated Ti-6Al-4V Alloy in solution containing Zn and Si ions. The morphology, the chemical composition, and the microstructure analysis of the sample were examined using FE-SEM, EDS, and XRD. The potentiodynamic polarization and AC impedance tests for corrosion behaviors were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat. The promising results successfully demonstrated the immense potential of Si/Zn-TiO2 coatings in dental and biomaterials applications.

• 공업화학
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• 제8권4호
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• pp.589-594
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• 1997

화학증착법을 통하여 $650^{\circ}C$의 증착온도와 0.0126Torr의 산소분압인 증착조건에서 원료물질로 $\beta$-diketonates 킬레이트 화합물을 사용하여 Si(111) 및 $SrTiO_3(100)$ 기판에 $YBa_2Cu_3O_y$ 고온 초전도 박막을 제조하였다. $SrTiO_3(100)$기판에서 제조된 박막의 $T_{c,onset}$과 $T_{c.0}$는 각각 91K와 87K로 나타났다. 또한, Si(111)기판에서 제조된 박막의 $T_{c,onset}$은 91K였지만 $T_{c.0}$는 액체질소 비등점(77.3K)에서는 보이지 않았다. $SrTiO_3(100)$에 증착된 초전도 박막은 치밀하고 2차원적으로 배열된 미세구조를 갖고 있는 반면, Si(111)에 증착된 초전도 박막은 상대적으로 기공이 많으며 무질서한 미세구조를 형성하였다.

• 공업화학
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• 제7권2호
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• pp.269-279
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• 1996

SOL-GEL법을 이용하여 $SiO_2-TiO_2-V_2O_5$계의 다공성 비정질 촉매를 그 제조변수를 달리하면서 제조 하였다. 이들 촉매들을 사용하여 "모조 배가스 합성 및 미량 촉매 반응기" 상에서 NO 제거 활성 측정을 통한 Screening test를 실시하여 가장 우수한 촉매 활성을 나타내는 최적의 입자상 촉매를 선정하였다. 또, 입자상 촉매의 제조변수에 입각하여 비활성, 기통성이 우수한 cordierite monolith 담체위에 활성성분을 SOL-GEL법으로 반복 coating하여 monolith형 촉매들을 제조하였으며, 이들을 전형적인 S. C. R.(Selective Catalytic Reduction of NOx) 공정에 해당되는 반응 조건하에서 NOx 및 SOx의 동시제거 효과를 측정해 보았다. 아울러 동촉매들의 특성화를 위해 DTA, TGA, BET, $NH_3$ 및 NO TPD, ESCA, XRD 등을 실시하여 보았다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.440-441
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• 2006

Several titanate powders ($Al_2TiO_5,\;SrTiO_3$, etc.) were synthesized by an ethylene glycol solution route. Titanium isopropoxide and nitrate salts were dissolved in stoichiometric proportions in liquid-type ethylene glycol without any precipitation. The parent precursor sols were dried to porous gels, and then the gels were calcined and crystallized. All synthesized titanate powders had stable crystallization behavior at low temperature and high specific surface area after a simple ball-milling process. A three-component PZT $(Pb(Zr_{0.52}{\cdot}Ti_{0.48})O_3)$ powder was also synthesized successfully by the ethylene glycol method. In this study, the characteristics of the multi-component titanate powders by the ethylene glycol method are examined.

• 공업화학
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• 제23권1호
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• pp.1-7
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• 2012

본 총론에서는 원자층 증착을 이용한 친환경 소재의 개발에 대한 최근 연구 결과들을 간단하게 소개하려 한다. 원자층 증착의 장점은 박막의 두께를 미세하게 조절할 수 있다는 것과, 3차원적으로 복잡한 구조를 가지는 담체의 형상을 유지하면서 균일한 박막을 제조할 수 있다는 것이다. 이러한 원자층 증착의 장점은 친환경소재를 제조하는 데 중요한 역할을 할 수 있다. Anodic aluminum oxide (AAO)와 같은 다공성 membrane을 담체로 이용하여, 다공성 구조는 그대로 유지하면서 10나노미터 정도의 $TiO_2$박막을 균일하게 증착할 경우 톨루엔 등의 휘발성 유기물 필터로 사용할 수 있는데, 이는 AAO의 특이한 기하학적 구조와 비정질 $TiO_2$의 강한 휘발성 유기물 흡착력의 조합에 의한 결과이다. 톨루엔 분해용 광촉매 및 이산화탄소 개질 반응에 의한 수소 생산 촉매 반응에 있어서도 나노다이아몬드나 니켈 담체 위에 $TiO_2$의 증착량을 미세하게 조절하여 $TiO_2$가 표면을 완전히 덮지 않고 부분적으로만 덮고 있는 구조를 만들 경우 촉매의 효율 및 수명을 극대화할 수 있게 된다. 이러한 예들은 원자층 증착이 기존의 반도체산업뿐만 아니라 환경소재의 개발에도 중요한 도구가 될 수 있음을 의미한다.

• 조명전기설비학회논문지
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• 제27권3호
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• pp.50-54
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• 2013

In this work, the effects of blocking layer and optimally fabricated electrolyte were investigated with respect to impedance and conversion efficiency of the cells.A layer of $TiO_2$ less than ~200nm in thickness, as a blocking layer, was deposited by rf sputtering onto the F:$SnO_2$ (FTO) glass to be isolated from the electrolyte in dye-sensitized solar cells (DSCs). Also, optimum condition of electrolytes preparation for DSCs was investigated. 3-methoxyppropionitrie and redox pairs with LiI and $I_2$ were used as solvents for fabrication of electrolyte. The electrochemical impedances of DSCs using this photo-anode were $R_1$: 13.8, $R_2$: 15.1, $R_3$: 11.9 and $R_h$: $8.3{\Omega}$, respectively. The $R_2$ impedance related by electron transportation from porous $TiO_2$ to FTO showed lower than that of normal DSCs. The photo-conversion efficiency of prepared DSCs was 6.4% and approximately 1.3% higher than general one.

• 한국세라믹학회지
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• 제46권5호
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• pp.467-471
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• 2009

Effects of boron and carbon on the densification and thermal decomposition of an AlN-SiC-$TiB_2$ system were investigated. $SiO_2$ was mostly removed by the addition of carbon, while $Al_2O_3$ formed $Al_4O_4C$ and promoted the densification of the systems above $1850^{\circ}C$. Rather porous specimens were obtained without the additives after hot pressing at $2100^{\circ}C$, while densification was mostly completed at $2000^{\circ}C$ by using the additives. The sintering temperature decreased further to $1950^{\circ}C$ by applying spark plasma sintering. The additives promoted the shrinkage of AlN by forming a liquid phase which was originated from the carbo- and boro-thermal reduction of $Al_2O_3$ and AlN.

• 한국재료학회지
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• 제23권4호
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• pp.240-245
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• 2013

Electrochemical surface treatment is commonly used to form a thin, rough, and porous oxidation layer on the surface of titanium. The purpose of this study was to investigate the formation of nanotubular titanium oxide arrays during short anodization processing. The specimen used in this study was 99.9% pure cp-Ti (ASTM Grade II) in the form of a disc with diameter of 15 mm and a thickness of 1 mm. A DC power supplier was used with the anodizing apparatus, and the titanium specimen and the platinum plate ($3mm{\times}4mm{\times}0.1mm$) were connected to an anode and cathode, respectively. The progressive formation of $TiO_2$ nanotubes was observed with FE-SEM (Field Emission Scanning Electron Microscopy). Highly ordered $TiO_2$ nanotubes were formed at a potential of 20 V in a solution of 1M $H_3PO_4$ + 1.5 wt.% HF for 10 minutes, corresponding with steady state processing. The diameters and the closed ends of $TiO_2$ nanotubes measured at a value of 50 cumulative percent were 100 nm and 120 nm, respectively. The $TiO_2$ nanotubes had lengths of 500 nm. As the anodization processing reached 10 minutes, the frequency distribution for the diameters and the closed ends of the $TiO_2$ nanotubes was gradually reduced. Short anodization processing for $TiO_2$ nanotubes of within 10 minutes was established.

• 한국재료학회지
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• 제34권1호
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• pp.34-43
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• 2024

New piezoelectric and triboelectric materials for energy harvesting are being widely researched to reduce their processing cost and complexity and to improve their energy conversion efficiency. In this study, BaTiO₃ films of various thickness were deposited on Ni foams by R.F. magnetron sputtering to study the piezoelectric and triboelectric properties of the porous spongy structure materials. Then piezoelectric nanogenerators (PENGs) were prepared with spongy structured BaTiO₃ and PDMS composite. The output performance exhibited a positive dependence on the thickness of the BaTiO₃ film, pushing load, and poling. The PENG output voltage and current were 4.4 V and 0.453 ㎂ at an applied stress of 120 N when poled with a 300 kV/cm electric field. The electrical properties of the fabricated PENG were stable even after 5,000 cycles of durability testing. The triboelectric nanogenerators (TENGs) were fabricated using spongy structured BaTiO₃ and various polymer films as dielectrics and operated in a vertical contact separation mode. The maximum peak to peak voltage and current of the composite film-based triboelectric nanogenerator were 63.2 V and 6 ㎂, respectively. This study offers new insights into the design and fabrication of high output nanogenerators using spongy structured materials.