• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.31 no.6
• /
• pp.276-281
• /
• 2021

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solid-state reaction using Y₂O₃ and YF₃ as raw materials. Mixing ratio of the Y₂O₃ and YF₃ was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

• Journal of the Korean institute of surface engineering
• /
• v.29 no.2
• /
• pp.81-92
• /
• 1996

The cementless fixation of bone ingrowth by porous coatings on artificial hip joint prostheses are replacing polymethylmethacrylate(PMMA) bone cement fixations. However, the major interests in the field of porous metal coating are environmental corrosivity accelerated by metal ion release, deterioration in the mechanical property of the coating, and the mechanical failure of the coatings as well as the substrate. Therefore, the selection of right materials for coatings and the development of porous coating techniques must be accomplished. Because of the existing problems in Ti and Ti alloys which are used extensively, this study is focused on the plasma spraying technique for coating on super stainless steel substrate. In order to determine the optimum conditions which satisfy the requirement for the porous coatings, under the plasma spraying, we selected the experimental parameters which extensively influenced on the characteristics of the coating through the pre-examination. Spray distance has been selected among 120, 160, and 200mm and primary gas flow rate among 70, 100, and 130 SCFH. Current and secondary gas($H_2$) flow rate was fixed at 400A, and 15 SCFH respectively. To understand the characteristics of the coatings, surface morphology, cross-sectional micro-structure, surface roughness, residual stress, and corrosion resistance were elucidated and the best conditions for the bone ingrowth improvement on artificial hip joint prostheses were found.

• Journal of the Korean Ceramic Society
• /
• v.51 no.6
• /
• pp.598-604
• /
• 2014

Considerable research efforts have been explored attempting to enhance the thermal durability of thermal barrier coatings (TBCs) at the high operating temperatures of gas turbines. In this study, the suspension plasma spray (SPS) process was applied to produce TBCs with a segmented structure by using an yttria-stabilized zirconia (YSZ) suspension. Four different experiment sets were carried out by controlling the ratio between surface roughness of the bond coat and feed stock size ($R_a/D_{50}$) in order to examine the effect of $R_a/D_{50}$ ratio on the microstructure of SPS-prepared coatings. When the $R_a/D_{50}$ had a high value of 11.8, a deposited thick coating turned out to have a cone-type columnar microstructure. In contrast, at the low $R_a/D_{50}$ values of 2.9 and 0.18, a deposited thick coating appeared to have a dense, vertically-cracked microstructure. However, with the very low $R_a/D_{50}$ value of 0.05 the coating was delaminated.

• 전기의세계
• /
• v.42 no.1
• /
• pp.5-11
• /
• 1993

금속이나 세라믹 입자를 용사하여 보호피막을 형성하는 기술은 화염을 사용하는 방법에서 시작했으며 용사재료는 분말, 선, 봉의 형태로 공급되었다. 1960년대에 상업적인 plasma 용사장비가 개발되었으며 여기서 사용된 D.C.plasma jet를 이용하여 분말형태의 용사재료를 용융하고 고속으로 피용사테에 용융입자를 분사하여 피용사체면에 충돌시켜 다층의 얇은 피막을 형성한다. 최근(1985년)에는 R.F.(Radio Frequency) Plasma를 이용하여 열전도도가 작은 재료나 산소와 반응성이 큰 재료를 용사하는 방법도 개발되고 있다. 용사피복법은 현재 여러가지 방법이 실용되고 있으며 재료를 용융하는 열원에 따라 분류하면 표1과 같다. 즉 산소와 연료 가스의 혼합에 의한 연소나 폭발에너지를 이용하는 가스식 용사법과 Arc, Plasma등의 전기 에너지를 이용하는 전기식 용사법으로 크게 나눌 수 있다.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.21 no.5
• /
• pp.791-799
• /
• 1997

The wear characteristics and wear mechanisms of plasma sprayed Al/sub 2/ O/sub 3/-40%TiO/sub 2/ and Cr/sub 2/O/sub 3/ deposited on casting aluminum alloy(AC4C) were investigated. Specimens were processed for various coating thicknesses. Ball on disk type wear tester was used for wear test. The scratch test on plasma sprayed coating surface showed that critical load to break the coating layer was greater than 40 N. The critical load increase with the increase of coating thickness of specimens. The friction coefficient of Cr/sub 2/O/sub 3/ coating layer was less than that of Al/sub 2/O/sub 3/-40%TiO/sub 2/ coating layer. The wear resistance of Cr/sub 2/O/sub 3/ coating layer was greater than that of Al/sub 2/O/sub 3/-40%TiO/sub 2/ coating layer. Microscopic observation of worn surfaces was made by SEM. SEM observation showed that the main mechanism of wear for Al/sub 2/O/sub 3/-40%TiO/sub 2/ coating layer was abrasive wear under 50 N. For the case of Al/sub 2/O/sub 3/-40%TiO/sub 2/ coating layer, as the surface cracks perpendicular to sliding direction propagated, the wear debris was generated in wear track. However, the main mechanism of wear for Cr/sub 2/O/sub 3/ coating layer was brittle fracture under 150 N.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.22 no.6
• /
• pp.895-900
• /
• 2013

Several plasma spray and metallurgical surface coatings such as $Al_2O_3$, $Cr_2O_3$, WC-Ni, and chromizing coating have been examined for their application in environments with high temperature, wear, and corrosion. The chromizing coating is different from others coatings in the manufacturing process the surface. These coatings' characteristics were tested experimentally, and the results were compared. WC-Ni shows good performance against thermal barrier, wear, and corrosion and is one of the best candidates for the environment considered herein. These coatings were studied for their application in the steel manufacturing industry. The most commonly required functions in this industry are thermal and wear resistance.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2000.11a
• /
• pp.298-303
• /
• 2000

The 3 mol% yttria stabilized zirconia (3-Y PSZ) powder was heat treated at 50 0$^{\circ}C$ to evaporate the polymer binder and stabilize the tetragonal phase. The wear experiments were carried out on a ring-on-plate type reciprocating wear tester at selected temperatures with in the range room temperature to 600$^{\circ}C$ The results show that the heat treatment of powder decreases the wear rate due to the reduction of microcracks and pores in coatings and the stabilization of the tetragonal phase. Powder heat treatment enhanced the quality of the coating layer by removing remnant gases during coating process and the powder heat treatment at which tetragonal phase is stable diminished phase ratio of monoclinic. These two effects improved wear resistance characters.

• Journal of the Korean Society for Industrial and Applied Mathematics
• /
• v.15 no.3
• /
• pp.223-231
• /
• 2011

During spray coating, especially in an air plasma spray (APS), pores, cracks, and splat boundaries are developed and those factors exert influence on thermomechanical properties such as elastic modulus, thermal conductivity, and coefficient of thermal expansion. Moreover, the thermo mechanical properties are crucial elements to determine the thermoelastic characteristics, for instance, temperature distribution, displacements, and stresses. Two types of thermal barrier coating (TBC) model, the dense and porous microstructures, are taken into account for the analysis of microstructural characterizations. $TriplexPro^{TM}$-200 system was applied to prepare TBC samples, and the METECO 204 C-NS powder is adopted for the relatively porous microstructure and METECO 204 NS powder for the dense microstructure in the top coat of TBCs. Governing partial differential equations were derived based on the thermoelastic theory and approximate estimates for the thermoelastic characteristics were obtained using a finite volume method for the governing equations.

• Journal of Power System Engineering
• /
• v.9 no.4
• /
• pp.90-95
• /
• 2005

The wire-arc process is a low-cost thermal spray method simply utilizes electrical energy to melt the feedstock wire. It is more userful for field applications, especially to coat large surface area. In this paper, a special Fe-based alloy coatings by using the wire-arc process were developed. Nanoscale composite coatings were achieved either during spraying or through a post heat treatment. As-sprayed Fe-based alloy coatings had been an amorphous matrix structure, after heating to $700^{\circ}C$ for 10 minutes a solid state transformation occurred in the some fraction of amorphous matrix which resulted in the formation of nanostructured recrystallized phase. Scanning electron microscopy (SEM) and field emotional scanning electron microscope(FE-SEM) were applied to analyze the microstructure of the coatings. Additionally hardness and bend resistance of the Fe-based alloy coatings were examined, and these results were compared with those of partially stabilized zirconia(PSZ) coatings by using the plasma spray process.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2004.11a
• /
• pp.66-74
• /
• 2004

The sliding wear behavior of $ZrO_2-22wt\%MgO\;(MZ)\;and\;ZrO_2-8wt\%Y_2O_3\;(YZ)$ deposited on a casting aluminum alloy with bond layer (NiCrCoAlY) by plasma spray against an SiC ball was investigated under dry test conditions at room temperature. At all load conditions, the wear mechanisms of the MZ and the YZ coatings were almost the same. The wear mechanisms involved the forming of a smooth film by material transferred on the sliding surface and pullout. The wear rate of the MZ coating was less than that of the YZ coating. With an increase normal load the wear rate of the studied coatings increased. The SEM was used to examine the sliding surfaces and elucidate likely wear mechanisms. The EDX analysis of the worn surface indicated that material transfer was occurred from the SiC ball to the disk. It was suggested that the material transfer played an important role in the wear performance.