• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.768-771
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• 2007

Carbon nanotubes (CNTs) were synthesized by inductively coupled plasma CVD at $450^{\circ}C$. CNTs were grown on the 1-nm-thick Fe-Ni-Co with $C_2H_2$ and $H_2$ at different pressures and plasma powers. CNTs were grown longer in height as the $H_{\alpha}/CH$ ratios became lower by decreasing plasma powers and increasing growth pressures.

• Korean Chemical Engineering Research
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• 제49권3호
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• pp.271-276
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• 2011

대면적 대기압 플라즈마 반응 장비를 플라즈마-용액 시스템에 적용하여 액상 내부에 잠입된 폴리프로필렌(PP) 필름의 표면손상 없이 관능기 도입 가능성을 탐색하였다. 액상으로 1-butyl-3-methylimidazolium tetrafluoroborate: $[BMIM]^{+}[BF_{4}]^{-}$ 이온성 액체 수용액을 사용한 경우, 안정적으로 플라즈마를 발생시킬 수 있었다. PP 필름의 플라즈마 처리 결과, PP 표면에 다양한 산소 함유 관능기들이 도입되었음을 확인할 수 있었다. 플라즈마 처리 후 PP의 표면 자유에너지는 처리시간, 전압의 증가에 따라서 증가하며, 1.5M 이온성 액체 수용액 농도에서 가장 큰 값을 나타내었다. ATR-FTIR 분석 결과, 다양한 카르보닐 기(1,726 $cm^{-1}$, 1,643 $cm^{-1}$)와 하이드록시 기$(3,100{\sim}3,500\;cm^{-1})$의 흡광도가 증가하였고, XPS 분석은 ATR-FTIR 분석 결과를 뒷받침하여 주었다.

• 한국환경과학회지
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• 제26권1호
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• pp.109-118
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• 2017

This study was conducted to investigate the effects of intermittent plasma and electrolysis treatments on lettuce (Lactuca sativa var. oak-leaf.), nutrient solution components ($NO_3{^-}-N$, $NH_4{^+}-N$, $PO{_4}^{3-}-P$, $K^+$, $Ca^{2+}$ and $Mg^{2+}$) and environmental parameters (electrical conductivity, total dissolved solids and pH). The recirculating hydroponic cultivation system consisted of planting port, LED lamp, water reservoir and circulating pump. Nutrient solution was circulated in the following order: reservoir ${\rightarrow}$ filtration-plasma or filtration-electrolysis ${\rightarrow}$ planting port ${\rightarrow}$ reservoir. The results showed that nutrient solution components and environmental parameters were changed by plasma or electrolysis treatment. Lettuce growth was not affected by the intermittent plasma or electrolysis treatment with 30 minutes or 90 minutes, respectively. The roots of the lettuce was damaged by excessive plasma and electrolysis treatment. Electrolysis treatment had greater effect on than plasma treatment because of the accumulation of high levels of TRO (Total Residual Oxidants).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.17-18
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• 2011

Plasma in liquid phase has attracted great attention in the last few years by the wide domain of applications in material processing, decomposition of organic and inorganic chemical compounds and sterilization of water. The plasma in liquid is characterized by three main regions which interact each - other during the plasma operation: the liquid phase, which supply the plasma gas phase with various chemical compounds and ions, the plasma in the gas phase at atmospheric pressure and the interface between these two regions. The most complex region, but extremely interesting from the fundamental, chemical and physical processes which occur here, is the boundary between the liquid phase and the plasma gas phase. In our laboratory, plasma in liquid which behaves as a glow discharge type, is generated by using a bipolar pulsed power supply, with variable pulse width, in the range of 0.5~10 ${\mu}s$ and 10 to 30 kHz repetition rate. Plasma in water and other different solutions was characterized by electrical and optical measurements. Strong emissions of OH and H radicals dominate the optical spectra. Generally water with 500 ${\mu}S/cm$ conductivity has a breakdown voltage around 2 kV, depending on the pulse width and the repetition rate of the power supply. The characteristics of the plasma initiated in ultrapure water between pairs of different materials used for electrodes (W and Ta) were investigated by the time-resolved optical emission and the broad-band absorption spectroscopy. The deexcitation processes of the reactive species formed in the water plasma depend on the electrode material, but have been independent on the polarity of the applied voltage pulses. Recently, Coherent anti-Stokes Raman Spectroscopy method was employed to investigate the chemistry in the liquid phase and at the interface between the gas and the liquid phases of the solution plasma system. The use of the solution plasma allows rapid fabrication of the metal nanoparticles without being necessary the addition of different reducing agents, because plasma in the liquid phase provides a reaction field with a highly excited energy radicals. We successfully synthesized gold nanoparticles using a glow discharge in aqueous solution. Nanoparticles with an average size of less than 10 nm were obtained using chlorauric acid solutions as the metal source. Carbon/Pt hybrid nanostructures have been obtained by treating carbon balls, synthesized in a CVD chamber, with hexachloro- platinum acid in a solution plasma system. The solution plasma was successfully used to remove the template remained after the mesoporous silica synthesis. Surface functionalization of the carbon structures and the silica surface with different chemical groups and nanoparticles, was also performed by processing these materials in the liquid plasma.

• 한국대기환경학회지
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• 제32권5호
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• pp.526-535
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• 2016

Recently, fine dust in atmosphere have been considerably issued as a harmful element for human. Nitrogen oxide ($NO_x$) exhausted from diesel engines and power plants has been disclosed as a main source of secondary production of fine dust. In order to prevent exhausting these nitrogenous compounds into atmosphere, a treatment system with selective catalytic reduction (SCR) catalyst with ammonia as a reductant has been used in various industries. Urea solution has been widely studied to supply ammonia into a SCR catalytic reactor, safely. However, the conversion of urea solution to ammonia has several challenges, especially on a slow conversion velocity. In the present study, a fast urea conversion system including a plasma burner was suggested and designed to evaluate the performances of urea conversion and initial operation time. A designed lab-scale facility has a plasma burner, urea nozzle, mixer, and SCR catalyst which is for hydrolysis of isocyane. Flow rate of methane that is a fuel of the plasma burner was varied to control temperatures in the urea conversion facility. From experimental results, it is found that urea can be converted into ammonia using high temperature condition of above $400^{\circ}C$. In the designed test facility, it is found that ammonia can be produced within 1 min from urea injection and the result shows prospect commercialization of proposed technology in the SCR facilities.

• Toxicological Research
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• 제13권3호
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• pp.223-228
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• 1997

Quinones have been reported to undergo nonenzymatic reaction with thiols to generate reactive oxygens. It is therefore possible that the nonenzymatic reaction of quinones with thiols in plasma could lead to potentJared cellular toxicity or disease. When 1 mM menadione was added in plasma under pH 11.2, 7.4 and 5.0, the increase in oxygen consumption rate was the order of pH 11.2 > pH 7.4 > pH 5.0. In addition, oxygen consumption rates under plasma anticoagulated with trisodium citrate solution (pH 7.85) was significantly higher than those with acid-citrate-dextrose solution (pH 6.87). SOD and catalase reduced the rate of oxygen consumption induced by menadione in plasma. Taken together, these results suggest that the menadione-induced increased oxygen consumption was due to nonenzymatic reaction of menadione with thiols in the plasma. The presence of plasma has an additive effect on the increased oxygen consumption rates induced by the menadione treatments on our model tissue, platelets, as compared between washed platelet (WP) and platelet rich plasma (PRP). Cytotoxicity, as determined by LDH release, are well correlated with the oxygen consumption rates observed in each system and strongly suggest that menadione-induced cytotoxicity can be increased with the presence of blood plasma.

• 대한의용생체공학회:의공학회지
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• 제28권4호
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• pp.484-493
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• 2007

Two polymeric prodrugs of PGE1 (prodrugs IVg and PNg) were newly synthesized. The drug conjugation proceeded in quantitative yield without decomposition of PGE1 to PGA1. With two types conjugates, PEG-PGE1 and PN-PGE1 with different spacer groups, we first discovered a possibility of slow release of PGE1 in blood circulatory system. PGE1 is conjugated with PEG and PN through the long alkylene spacers, and their availability as polymeric prodrugs is evaluated. Their drug-releasing behavior was examined both in phosphate buffer (pH=7.4) and rat plasma. Each prodrug was known to be highly stabile in the buffer solution. The drug-releasing rate became much faster in rat plasma than in the buffer solution due to the acceleration by the plasma enzymes. The drug-release was found to reach a plateau in rat plasma because the released PGE1 or its derivatives may be captured or decomposed by the plasma proteins. The slower drug-releasing rate of pro drug PNg in rat plasma is reasonably attributed to the molecular aggregation due to the hydrophobic bonding between the PGE1 moieties and spacers.

• 한국재료학회지
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• 제32권6호
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• pp.301-306
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• 2022

This study explored the possibility of forming a coating layer containing alginic acid on the surface of a magnesium alloy to be used as a biomaterial. We formed a coating layer on the surface of a magnesium alloy using a plasma electrolytic oxidation process in an electrolytic solution with different amounts of alginic acid (0 g/L ~ 8 g/L). The surface morphology of all samples was observed, and craters and nodules typical of the PEO process were formed. The cross-sectional shape of the samples confirmed that the thickness of the coating layer became thicker as the alginic acid concentration increased. It was confirmed that the thickness and hardness of the sample significantly increase with increasing alginic acid concentration. The porosity of the surface and cross section tended to decrease as the alginic acid concentration increased. The XRD patterns of all samples revealed the formation of MgO, Mg₂SiO₄, and MgF₂ complex phases. Polarization tests were conducted in a Stimulate Body Fluid solution similar to the body's plasma. We found that a high amount of alginic acid concentration in the electrolyte improved the degree of corrosion resistance of the coating layer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.333-333
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• 2011

We have investigated the breakdown properties in liquids by high voltage pulse system. High voltage pulse power system is consisted of the Marx-generator with two capacitors (0.5 ${\mu}F$, withstanding voltage is 40 kV), to which the charging voltage can be applied to maximum 30 kV DC, spark gap switch and charging resistor of 20 $M{\Omega}$. We have made use of tungsten pin electrodes of anode-cathode (A-K), which are immersed into the liquids. The breakdown voltage and current signals are measured by high voltage probe (Tektronix P6015A) and current monitor (IPC CM-1.S). Especially the high speed breakdown or plasma propagation characteristics in the pulsed A-K gap have been investigated by using the high speed ICCD camera. We have measured the electron temperature through the Boltzmann plot method from the breakdown spectrums. Here the A-K gap has been changed by 1 mm, 2 mm, and 3 mm. The used liquids are distilled water and solution of salt (0.9 %). The output voltage and current signals at breakdown in distilled water are shown to be bigger than those in saline solution. The breakdown voltage and current characteristics in liquids will be discussed in accordance with A-K gap distances. It is also found that the electron temperatures and plasma densities in liquids are decreased in conformity with A-K gap.

• 한국진공학회지
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• 제18권2호
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• pp.97-101
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• 2009

현대의 반도체 산업에서 공정 중 가장 큰 비중을 차지하며, 가장 많은 자본과 인력을 소비하는 것이 바로 세정 공정이다. 세정공정은 소자의 작동에 영향을 미치고 기능을 저하시킬 수 있는 이물질 입자들을 제거하는 것이다. 특히 소자를 식각하기 위한 Photoresist(PR) 과정이 끝날 때마다 항상 세정 과정이 포함되어야 했다. 또한, Photoresist(PR) 공정 중 생성된 HDI-PR(high dose implanted photoresist)은 세정 과정에서 제거가 힘들기 때문에 현대의 고밀도 집적회로 세정 공정에서는 건식 세정과 습식 세정을 혼용하여 여러 단계의 세정 공정을 거치게 된다. 이 논문에서는 기존 플라즈마 방식으로 대표되는 건식 세정과 약액으로 대표되는 습식 세정을 동시에 사용하는 방식을 사용하여 약액활성화 방법(Plasma Liquid-Vapor Activation; PLVA)을 제안하여 실험을 실시하였고 HDI-PR을 활성화된 용액에 담근 후 Nano-Indenter를 이용하여 표면강도와 탄성계수를 측정했다. Nano-indenter는 특정한 기하학적 형태를 가지는 Tip을 표면에 압입한 후 압입하중과 압입깊이를 측정함으로서 시료의 표면강도와 탄성계수를 측정하였다. 그 결과 plasma로 활성화된 PR stripper 용액으로 strip한 후의 시료의 표면 강도가 크게 줄어든 것을 확인하였다. 이는 이후 물리적 표면 세정 공정을 후 공정으로 사용한다면 보다 효율적인 HDI-PR을 제거할 수 있을 것으로 사료된다.