• 한국표면공학회지
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• 제42권5호
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• pp.208-215
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• 2009

We employed atmospheric plasma to reactively remove the lubricant sprayed onto such industrial electronic parts as LCD chassis during sheet-metal forming processes and investigated basically the effect of plasma parameters on cleansing the surfaces of zinc-electroplated steel plates (EGI). Specimen prepared with some controlled amount of lubricant sprayed on their surfaces beforehand were subjected to two different kinds of atmospheric plasma, one being generated by using air and the other generated by using nitrogen (99.9% purity). Locating the plasma beams at the height range between 3.5 and 13.5 mm from the surface of each specimen and radiating for 5 to 30 seconds resulted out that the cases with a position of 3.5 mm and a duration of 5 seconds or longer showed the surfaces completely cleansed without a trace of lubricant. Furthermore we found out that the plasma generated by using simple air depicted higher cleansing ability than the other one generated by using expensive nitrogen, interestingly useful very much for industrial purposes. On another aspect, we confirmed that the drilled or cut surfaces of Zn-plated steel substrate would not be oxidized even under the influence of plasma during its cleansing process. Therefore, we could probably conclude from this fore-survey that a dry process adopting atmospheric plasma for cleansing industrial parts might be determined to become successful in terms of commercialization, cautiously.

• 한국정밀공학회지
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• 제27권12호
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• pp.113-118
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• 2010

For a present study, woven type carbon fibers were surface-modified by oxygen plasma to improve adhesive strength between carbon fibers and epoxy. The change of hydrophilic properties by the plasma modification was investigated through the contact angle measurement and the calculation of surface energy of carbon fiber due to the oxygen plasma modification. FESEM and XPS analyses were performed to study the chemical and physical changes on the surface of carbon fibers due to the oxygen plasma modification. Pin-on-disk wear tests were conducted under dry condition using unmodified and plasma-modified carbon/epoxy composites to investigate the effect of plasma modification on the wear behavior of woven type carbon/epoxy composites. The results showed that the friction coefficient and the wear rate of plasma-modified carbon/epoxy composites were lower than those of unmodified carbon/epoxy composites, respectively. XPS analysis showed that new functional group of a carbonyl type was created on the carbon fibers by the $O_2$ plasma treatment, which enhanced adhesive strength between carbon fibers and epoxy, leading to improve wear properties

• Korean Chemical Engineering Research
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• 제49권3호
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• pp.271-276
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• 2011

대면적 대기압 플라즈마 반응 장비를 플라즈마-용액 시스템에 적용하여 액상 내부에 잠입된 폴리프로필렌(PP) 필름의 표면손상 없이 관능기 도입 가능성을 탐색하였다. 액상으로 1-butyl-3-methylimidazolium tetrafluoroborate: $[BMIM]^{+}[BF_{4}]^{-}$ 이온성 액체 수용액을 사용한 경우, 안정적으로 플라즈마를 발생시킬 수 있었다. PP 필름의 플라즈마 처리 결과, PP 표면에 다양한 산소 함유 관능기들이 도입되었음을 확인할 수 있었다. 플라즈마 처리 후 PP의 표면 자유에너지는 처리시간, 전압의 증가에 따라서 증가하며, 1.5M 이온성 액체 수용액 농도에서 가장 큰 값을 나타내었다. ATR-FTIR 분석 결과, 다양한 카르보닐 기(1,726 $cm^{-1}$, 1,643 $cm^{-1}$)와 하이드록시 기$(3,100{\sim}3,500\;cm^{-1})$의 흡광도가 증가하였고, XPS 분석은 ATR-FTIR 분석 결과를 뒷받침하여 주었다.

• 한국표면공학회지
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• 제47권5호
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• pp.227-232
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• 2014

In this study, we propose the application of doping process technology for atmospheric pressure plasma. The plasma treatment means the wafer is warmed via resistance heating from current paths. These paths are induced by the surface charge density in the presence of illuminating Argon atmospheric plasmas. Furthermore, it is investigated on the high-concentration doping to a selective partial region in P type solar cell wafer. It is identified that diffusion of impurities is related to the wafer temperature. For the fixed plasma treatment time, plasma currents were set with 40, 70, 120 mA. For the processing time, IR(Infra-Red) images are analyzed via a camera dependent on the temperature of the P type wafer. Phosphorus concentrations are also analyzed through SIMS profiles from doped wafer. According to the analysis for doping process, as applied plasma currents increase, so the doping depth becomes deeper. As the junction depth is deeper, so the surface resistance is to be lowered. In addition, the surface charge density has a tendency inversely proportional to the initial phosphorus concentration. Overall, when the plasma current increases, then it becomes higher temperatures in wafer. It is shown that the diffusion of the impurity is critically dependent on the temperature of wafers.

• 폴리머
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• 제31권1호
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• pp.31-36
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• 2007

플라스마 표면처리는 전체적인 물성은 유지하고 표면의 특성만을 변화시킨다고 전해지고 있다. 이번 연구에서는 플라스마 처리에 의해 높은 발수성을 나타내는 나일론 6 섬유로의 개질을 시도하였다. 발수성을 나타내는 나일론 섬유는 가스 종류, 처리시간, 인가 파워를 변수로 하여 RF 진공 플라스마 시스템에서 처리되었다. 플라스마 처리된 섬유의 표면을 scanning electron microscopy(SEM)과 atomic force microscopy(AFM)으로 모폴로지 변화를 살펴보았으며, 기계적 특성과 고분자 고유의 특성을 인장강도와 Differential scanning calorimetry(DSC), thermo-gravimetric analysis (TGA)로 각각 분석하였다. 또한 나일론 섬유의 발수성 평가는 물방울 흡수시간으로 테스트를 실시하였다. 이러한 결과들은 플라스마 표면처리로 인해서 나일론 섬유의 발수성이 향상됨을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.522-522
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• 2013

Plasma can be used to various applications such as sterilization, inactivation/removal of microorganisms, wound healing, tooth bleaching, cancer treatment, surface modification and plasma polymerization. In this research, we studied the effect of plasma irradiation on the structural, optical, and biological properties of the polymer films. Several polymers were synthesized and then deposited on the glass substrates. The polymer films were treated by oxygen and nitrogen plasmas. Plasma-treated films were investigated by contact angle, infrared absorption spectroscopy, cathodoluminescence spectroscopy, and scanning electron microscopy. Functional materials were prepared on plasma-treated surface, and their performances were investigated using various techniques. Next, we discuss relationship between the performance of functional materials and the structural properties of plasma-treated polymer films.

• 한국표면공학회지
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• 제29권5호
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• pp.357-362
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• 1996

Several applications of radio-frequency (RF) thermal plasma to film formation are reviewed. Three types of injection plasma processing (IPP) technique are first introduced for the deposition of materials. Those are thermal plasma chemical vapor deposition (CVD), plasma flash evaporation, and plasma spraying. Radio-frequency (RF) plasma and hybrid (combination of RF and direct current(DC)) plasma are next introduced as promising thermal plasma sources in the IPP technique. Experimental data for three kinds of processing are demonstrated mainly based on our recent researches of depositions of functional materials, such as high temperature semiconductor SiC and diamond, ionic conductor $ZrO_2-Y_2O_3$ and high critical temperature superconductor $YBa_2Cu_3O_7-x$. Special emphasis is given to thermal plasma flash evaporation, in which nanometer-scaled clusters generated in plasma flame play important roles as nanometer-scaled clusters as deposition species. A novel epitaxial growth mechanism from the "hot" clusters namely "hot cluster epitaxy (HCE)" is proposed.)" is proposed.osed.

• 마이크로전자및패키징학회지
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• 제21권3호
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• pp.25-29
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• 2014

본 연구에서는 친환경적이고, 보관수명이 1년 이상이며, 부식특성이 좋은 플라즈마 유기막 표면처리에 대한 솔더링 특성을 기존 표면처리법인 OSP와 비교하였다. 플라즈마 표면처리는 할로겐계 전구체를 사용하여 CVD 방법으로 증착하였고, 증착두께는 20 nm이었다. 본 연구에서 사용된 솔더 조성은 Sn-3.0 wt%Ag-0.5 wt%Cu이었다. 염수분무시험에서 플라즈마 표면처리 유기막은 OSP보다 우수한 부식 저항성을 나타내었다. 멀티리플로우 조건에서 플라즈마 표면처리는 OSP보다 우수한 솔더 퍼짐성을 나타내었다. 솔더링 후 단면 미세조직을 분석한 결과, 플라즈마 표면처리와 OSP시편 모두 유사한 금속간화합물층 두께 및 형상을 갖고 있었다. 플라즈마 표면처리와 OSP 모두 유사한 접합강도를 가지고 있었다.

• Transactions on Electrical and Electronic Materials
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• 제7권1호
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• pp.16-20
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• 2006

In this paper, we investigated the effects of short-term oxygen plasma treatment of semiconducting silicone layer to improve interfacial performances in joints prepared with a insulating silicone materials. Surface characterizations were assessed using contact angle measurement and x-ray photoelectron spectroscopy (XPS), and then adhesion level and electrical performance were evaluated through T-peel tests and electrical breakdown voltage tests of treated semi-conductive and insulating joints. Plasma exposure mainly increased the polar component of surface energy from $0.21\;dyne/cm^2$ to $47\;dyne/cm^2$ with increasing plasma treatment time and then leveled off. Based on XPS analysis, the surface modification can be mainly ascribed to the creation of chemically active functional groups such as C-O, C=O and COH on semi-conductive silicone surface. This oxidized rubber layer is inorganic silica-like structure of Si bound with three to four oxygen atoms ($SiO_x,\;x=3{\sim}4$). The oxygen plasma treatment produces an increase in joint strength that is maximum for 10 min treatment. However, due to brittle property of this oxidized layer, the highly oxidized layer from too much extended treatment could be act as a weak point, decreasing the adhesion strength. In addition, electrical breakdown level of joints with adequate plasma treatment was increased by about $10\;\%$ with model samples of joints prepared with a semi-conducting/ insulating silicone polymer after applied to interface.

• 한국염색가공학회지
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• 제11권6호
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• pp.1-6
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• 1999

The porosities of PET fibers were investigated using a nitrogen porosimeter according to oxygen plasma treatment and dyeing with a disperse dye, and they were discussed in terms of the change of internal micro-structure of the PET fiber. The total pore volume, surface area and average pore size of the plasma treated PET fibers increased expectably compared with the untreated sample. The PET fibers treated with oxygen plasma and then dyed with a disperse dye were increased significantly in the surface area and the total pore volume comparing with those of plasma treated only, but decreased in the average pore size. The increase of the surface area, after dyeing, of the plasma treated PET fibers was due to addition of the surface area of the dye itself to that of the PET fiber. The increase of the total pore volume of the plasma treated PET fibers by dyeing, which is the opposite result to the general idea that the pore volume of fibers would be reduced by occupation of dye molecules in the pores, could be explained by the free-volume model. This is that the amorphous region in the fiber expanded by occupation of dye molecules, and the marginal space surrounding dyes was generated as many smaller pores, and the decrease of the average pore size of the dyed sample also could be explained The decrease of the average pore size was caused by the splitting of a larger pore into smaller pores.