• ETRI Journal
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• v.24 no.3
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• pp.211-220
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• 2002

This study characterizes an oxide etching process in a magnetically enhanced reactive ion etching (MERIE) reactor with a $CHF_3/CF_4$ gas chemistry. We use a statistical $2^{4-1}$ experimental design plus one center point to characterize the relationships between the process factors and etch responses. The factors that we varied in the design include RF power, pressure, and gas composition, and the modeled etch responses were the etch rate, etch selectivity to TiN, and uniformity. The developed models produced 3D response plots. Etching of $SiO_2$ mainly depends on F density and ion bombardment. $SiO_2$ etch selectivity to TiN sensitively depends on the F density in the plasma and the effects of ion bombardment. The process conditions for a high etch selectivity are a 0.3 to 0.5 $CF_4$ flow ratio and a -600 V to -650 V DC bias voltage according to the process pressure in our experiment. Etching uniformity was improved with an increase in the $CF_4$ flow ratio in the gas mixture, an increase in the source power, and a higher pressure. Our characterization of via etching in a $CHF_3/CF_4$ MERIE using neural networks was successful, economical, and effective. The results provide highly valuable information about etching mechanisms and optimum etching conditions.

• The Bulletin of The Korean Astronomical Society
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• v.38 no.1
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• pp.65.1-65.1
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• 2013

The 2011 August 09 Flare is one of the largest X-ray flares of Sunspot Cycle 24 to attract a lot of attention for its various activities detected in coronal images. In this study we concern ourselves mostly on information of high energy electrons produced during this flare provided by hard X ray data from the Reuven Ramaty High-Energy Solar Spectroscopic Imager (RHESSI) and radio data from the Korean Solar Radio Burst Locator (KSRBL) and Ondrejov. EUV images obtained by the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamic Observatory are used to provide the context of magnetic reconnection. In our results, (1) HXR spectra have a rich spectral morphology. Initially it could be fit by one thermal component (T~30MK) and one single power law nonthermal spectrum, but later a better fit could be made by introducing an additional thermal component (T~55 MK). (2) Time delays between the KSRBL burst and the RHESSI hard X-ray emission were found which are more obvious at low frequencies and insignificant at high frequencies. (3) The HXR source lies in the core of the quadrupolar active region. In our interpretation based on AIA 94 A images, the outer part of the active region erupted to be blown out, leaving the intense hard X-ray emission concentrated in the core. We relate the appearance of the second thermal component to the evolution of the AIA 171 and 94 A images. The time delays of microwave peaks to HXR peaks are interpreted as indicating presence of trapped electrons in larger closed magnetic loops. With these result we conclude that the hard X ray and microwaves are due to impulsive acceleration in the low and high heights and a sigmoidal reconnection scenario.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.5
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• pp.389-395
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• 2005

The etching technology of the high aspect ratio contact(HARC) is necessary at the critical contact processes of semiconductor devices. Etching the $SiO_{2}$ contact hole with the sub-micron design rule in manufacturing VLSI devices, the unexpected phenomenon of 'profile tilting' or 'bottom distortion' is often observed. This makes a short circuit between neighboring contact holes, which causes to drop seriously the device yield. As the aspect ratio of contact holes increases, the high C/F ratio gases, $C_{4}F_{6}$, $C_{4}F_{8}$ and $C_{5}F_{8}$, become widely used in order to minimize the mask layer loss during the etching process. These gases provide abundant fluorocarbon polymer as well as high selectivity to the mask layer, and the polymer with high sticking yield accumulates at the top-wall of the contact hole. During the etch process, many electrons are accumulated around the asymmetric hole mouth to distort the electric field, and this distorts the ion trajectory arriving at the hole bottom. These ions with the distorted trajectory induce the deformation of the hole bottom, which is called 'profile tilting' or 'bottom distortion'. To prevent this phenomenon, three methods are suggested here. 1) Using lower C/F ratio gases, $CF_{4}$ or $C_{3}F_{8}$, the amount of the Polymer at the hole mouth is reduced to minimize the asymmetry of the hole top. 2) The number of the neighboring holes with equal distance is maximized to get the more symmetry of the oxygen distribution around the hole. 3) The dual frequency plasma source is used to release the excessive charge build-up at the hole mouth. From the suggested methods, we have obtained the nearly circular hole bottom, which Implies that the ion trajectory Incident on the hole bottom is symmetry.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.37-41
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• 2009

We observe the proton signals produced by laser interaction with thin-foil targets of polyimide and of copper. We change the thickness of the polyimide target to $7.5{\mu}m$, $12.5{\mu}m$, and $50{\mu}m$. High-energy protons with the maximum energy of ${\sim}2.3\;MeV$ from $7.5{\mu}m$ thick polyimide are observed. This proton beam with the maximum energy of multi-MeV has various applications such as a proton shadowgraphy.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.110.2-110.2
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• 2012

We investigate a cool loop and a dark lane over a limb active region on 2007 March 14 by the Hinode/EUV Imaging Spectrometer (EIS). The cool loop is clearly seen in the EIS spectral lines formed at the transition region temperature (log T = 5.8). The dark lane is characterized by an elongated faint structure in coronal spectral lines (log T = 5.8 - 6.1) and rooted on a bright point. We examine their electron densities, Doppler velocities, and non-thermal velocities as a function of distance from the limb using the spectral lines formed at different temperatures (log T = 5.4 - 6.4). The electron densities of the cool loop and the dark lane are derived from the density sensitive line pairs of Mg VII, Fe XII, and Fe XIV spectra. Under the hydrostatic equilibrium and isothermal assumption, we determine their temperatures from the density scale height. Comparing the scale height temperatures to the peak formation temperatures of the spectral lines, we note that the scale height temperature of the cool loop is consistent with a peak formation temperature of the Mg VII (log T = 5.8) and the scale height temperature of the dark lane is close to a peak formation temperature of the Fe XII and Fe XIII (log T = 6.1 - 6.2). It is interesting to note that the structures of the cool loop and the dark lane are most visible in these temperature lines. While the non-thermal velocity in the cool loop slightly decreases (less than 7 km $s^{-1}$) along the loop, that in the dark lane sharply falls off with height. The variation of non-thermal velocity with height in the cool loop and the dark lane is contrast to that in off-limb polar coronal holes which are considered as source of the fast solar wind. Such a decrease in the non-thermal velocity may be explained by wave damping near the solar surface or turbulence due to magnetic reconnection near the bright point.

• Journal of the Semiconductor & Display Technology
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• v.10 no.2
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• pp.115-119
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• 2011

A tip-type carbon nanotube(CNT)-based field emitter was studied to consider it as electron source for micro-focused x-ray tube. The CNT was grown directly on a metal (tungsten) substrate by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Prior to CNT growth, the metal substrate was etched to have various tip angles from $10^{\circ}$ to $180^{\circ}C$ (flat-type). The morphologies and microstructures of all the grown CNTs were analyzed via field-emission SEM. Furthermore, the effects of substrate tip-angles on the emission properties of CNT-based field emitters were characterized to estimate the maximum current density, the turn-on voltage, and the spatial distribution of electron beams. Prolonged long-term stability testing of the CNT emitters was also performed. All the experiment results obtained from this study indicated why a tip-type CNT emitter, compared with a flat-type CNT emitter, would be more desirable for a micro-focused x-ray system, in terms of the emission current level, the focused beam area, and the emission stability.

• Proceedings of the Korean Society of Postharvest Science and Technology of Agricultural Products Conference
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• 2002.08a
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• pp.64-71
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• 2002

Rice(Oryza stiva L.) is a major cereal food providing nourishment to over half of the world's populations and was considered only as a source of energy. However, The recent many researches have been made to suggest that rice may relate to prevention chronic disease and health-promoting properties such as postprandial glucose response, hypocholesterolemic effect and blood pressure-lowering effect. There has been numerous observation supporting that rice has hypocholesterolemic effect. Rice, rice bran, rice bran oil and unsaponifiable matter of rice bran oil reduced plasma cholesterol in rat, hamster as well as human. Components of rice showing hypocholesterolemic effect include dietary fiber(hemicellulose, phytic acid). protein, ${\gamma}$-oryzanol, $\beta$-sitosterol, and tocotrienols. Crapo et al has been studied that the effect of various of starchy foods on the postprandial blood glucose and insulin responses in healthy and diabetic humans. The results showed that rice had lower blood glucose and insulin responses compared to potato, bread and dextrose. The different physical forms in the same starch also produce the different postprandial glucose and insulin responses. In recent years, several studies have shown that some components of rice have potent antioxidant activity against Fe$^{2+}$ -ascorbate induced lipid peroxidation in rat liver microsomal membranes. Cell culture and animal studies have shown that some components of rice have inhibitory effect on the growth and proliferation of several types of human cancer cell. It was also reported that the methanol extract of brown rice has antimutagenic activity against various mutagens. In addition, the pepsine hydrolysate from rice protein is reported to inhibit angiotensin converting enzyme activity. GABA (${\gamma}$ - aminobutyric acid) and GABA enriched rice germ is also effective for lowering blood pressure and triglyceride levels.s.

• Journal of Life Science
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• v.13 no.6
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• pp.933-942
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• 2003

CoenzymeQ is a quinone derivative with a long isoprenoid side chain. It transports electrons in the respiratory chain located in the inner mitochondrial membrane of eukaryotes and the plasma membrane of prokaryotes. It also functions as an antioxidant. Saccharomyces cerevisine coq mutants, that are deficient coenzyme Q biosynthesis fail to aerobically grow. They are not able to grow on non-fermentable carbon sources, such as glycerol, either The putative $coq^{-7}$ gene involved in coenzyme Q biosynthesis of Neurospora crassa was cloned and used for complementation of S. cerevisiae coq7 mutant. The predicted amino acid sequence of N. crassa COQ7 showed about 58% homology with Coq7p of S. cerevisiae. The growth rate of S. cerevisiae $coq^7$ mutant transformed with the N. crassa $coq^{-7}$ gene was restored to the wild-type level. The complemented 5. cerevisiae strain was able to grow with glycerol as a sole carbon source and showed less sensitivities to linolenic acid, a polyunsaturated fatty acid.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.2
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• pp.357-361
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• 2011

The terminal current in voltage driven systems is an essential role for characterizing the pattern of electric discharge such as corona, breakdown, etc. Until now, to evaluate this terminal current, Sato's equation has been widely used in areas of high voltage and plasma discharge. Basically Sato's equation was derived by using the energy balance equation and its final form described physical meaning explicitly. To give more general abilities in Sato's equation, we present a generalized approach by directly using the Poynting's theorem incorporating the finite element method. When the magnetic field effect or the time-dependent voltage source is considered, this generalized energy method can be easily applicable to those problems with any dielectric media such as gas, fluid, and solid. As an alternative approach, the integral Ohm's law resulting in small numerical errors has an ability to be applied to multi-port systems. To test the generalized energy method and integral Ohm's law, first, the results from two prosed methods were compared to those from Sato's approach and an analytic solution in parallel plane electrodes. After verification, the generalized method was applied to the tip-sphere electrodes for evaluating the terminal current with three carriers and the Fowler-Nordheim field emission condition. From these results, we concluded that the generalized energy method can be a consistent technique for evaluating the discharge current with various dielectric materials or large magnetic field.

• Analytical Science and Technology
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• v.7 no.4
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• pp.483-492
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• 1994

Direct solid analysis of various kinds of metal samples has been conducted by glow discharge. In this laboratory, the gas-jet assisted glow discharge(GJGD) device has been developed and characterized. The effect of changes in applied current, cell pressure and flow rate on atomic emission signals obtained from a jet-assisted cathodic sputtering was investigate. The emission intensities of Cu, Zn, and Ar were measured. They were increased with the current. But the intensities were decreased by increasing the flow rate of argon due to the diffusion and transportation of particles into plasma. By increasing the pressure of the cell, the intensities were greatly decreased because of enhancement of redeposition onto the surface of the sample.