• 제목/요약/키워드: Plasma resistant

검색결과 147건 처리시간 0.031초

내플라즈마성 알루미나 세라믹스 제조 공정 (Processing of Plasma Resistant Alumina Ceramics)

  • 이현권;조경식;김미영
    • 한국세라믹학회지
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    • 제46권4호
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    • pp.385-391
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    • 2009
  • Need for plasma resistant ceramic materials has been continuously increased in semiconductor and display industry requiring plasma processing to realize ultra fine circuit process. Among promising candidates, alumina ceramics have still some advantages with respect to its economic aspect. In this study, fabrication of plasma resistant alumina ceramics was tried, and its processing optimization was also aimed. Careful processing control and thereby uniform microstructure of $Al_2O_3$ gave rise to enhanced plasma resistance, even comparable to market-governing commercial $Al_2O_3$. A further study is needed concerning ${\beta}-Al_2O_3$ materials system, presumably playing a decisive role in decreasing plasma resistance of $Al_2O_3$ ceramics.

치료저항성 정신분열병 환자에서 반복적 경두개자기자극술 병행치료시 혈장 BDNF 농도 변화 : 예비 연구 (Alteration in Plasma BDNF Level after Repetitive Transcranial Magnetic Stimulation(rTMS) in Treatment-Resistant Schizophrenia : A Pilot Study)

  • 오소영;김용구
    • 생물정신의학
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    • 제16권3호
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    • pp.170-180
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    • 2009
  • Objectives : To assess clinical improvement and change in plasma brain-derived neurotrophic factor(BDNF) level after repetitive transcranial magnetic stimulation(rTMS) in patients with treatment-resistant schizophrenia. Methods : Seven patients with DSM-IV schizophrenia, who were proven to be treatment-resistant, were treated with 15 sessions of rTMS for three weeks as an adjuvant therapy to antipsychotic treatment. Clinical improvement and change in plasma BDNF level were measured after the treatment period. The symptom severity was assessed with the Positive and Negative Syndrome Scale(PANSS) and the Korean Version of Calgary Depression Scale for Schizophrenia(K-CDSS) at baseline and 7 days after the treatment. Plasma BDNF level was measured by enzyme-linked immunosorbent assay(ELISA) at baseline and 7 days after the treatment. Results : After the rTMS treatment, there was no significant improvement in PANSS total score(Z=-1.693, p=0.090) and no significant change in plasma BDNF was found(Z=-1.183, p=0.237). Negative correlations were found between percentage change in PANSS positive subscale score and duration of illness(rho=-0.991, N=7, p<0.0005, two-tailed), and PANSS negative subscale score at baseline and percentage change in plasma BDNF level(rho=-0.821, N=7, p=0.023, two-tailed). Conclusion : This preliminary study suggests that rTMS didn't make a significant change in clinical symptoms nor in plasma BDNF level in treatment-resistant schizophrenia. Percentage change in plasma BDNF, however, might be correlated with treatment resistance in schizophrenic patients. This is a pilot study with a small sample size, therefore, a further study with a larger sample size is needed.

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Al2O3 Free 다성분계 유리의 CF4/O2/Ar 내플라즈마 특성 (CF4/O2/Ar Plasma Resistance of Al2O3 Free Multi-components Glasses)

  • 민경원;최재호;정윤성;임원빈;김형준
    • 반도체디스플레이기술학회지
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    • 제21권3호
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    • pp.57-62
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    • 2022
  • The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF4/O2/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

저항전분이 인체 혈당 조절기능에 미치는 영향 (Effect of Resistant Starch on Human Glycemic Response)

  • 이영희;오승호
    • 대한지역사회영양학회지
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    • 제9권4호
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    • pp.528-535
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    • 2004
  • In order to observe the effects of resistant starches on human glycemic response, nine female university students were investigated using cellulose (CED), resistant starch 3 (RS3D) and resistant starch 4 (RS4D) diets. Each woman's blood sugar and insulin, triacylglycerol and free fatty in plasma concentration were measured at fasting state, then 15, 30, 45, 60, 75, 90 and 120 minute after each test diet feeding. Glycemic indices of the Cellulose diet (CED: 57.9 $\pm3.00$), the Resistant starch 3 diet (RS3D: 52.6 $\pm7.9$) and the Resistant starch 4 diet (RS4D: 52.9 $\pm10.2$) were similar to each other, but they were significantly lower in comparison with those of white wheat bread diet (WWBD: 100). Insulinemic indices of the CED (49.8 $\pm8.2$), RS3D (50.0 $\pm7.3$) and RS4D (72.4 $\pm7.7$) were significantly lower in comparison with the white wheat bread diet (WWBD: 100), but among the dietary fiber diets, the insulinemic index of RS4D was significantly higher than the CED and the RS3D. Plasma triacylglycerol contents of the CED, RS3D and RS4D including WWBD showed gradual increase in tendency after lowering in early stage of each test diet feeding, but not significantly different in each dietary fiber added diet. Plasma free fatty acid contents of the CED, RS3D and RS4D including WWBD showed gradual decrease in tendency after each test diet feeding, but not significantly different by each dietary fiber added diet. In above results, we speculate that resistant starch 3 controls rapid elevation of blood sugar by delaying intestinal digestion and absorption of cellulose, but the result appears to be different from RS4 in comparison. Thus, RS3 intakes may contribute to the diet therapy of diabetic humans, but more studies on RS4 is needed in the future. (Korean J Community Nutrition 9(4): 528∼535, 2004)

난소화성전분의 섭취가 고지방식이를 섭취한 흰쥐에서 장 기능과 혈액지방에 미치는 영향 (Effects of Resistant Starch on Gut Functions and Plasma Lipid Profiles in Rats Fed High Fat Diet)

  • 정미경;김명환;강남이;김우경
    • 한국식품영양과학회지
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    • 제31권2호
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    • pp.271-276
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    • 2002
  • 본 연구는 고지방식이 섭취시 RS섭취가 장기능 및 혈액지방성분에 미치는 영향을 알아보고자 하였다. 생후 4주된 실험동물을 구입하여 6주간 고지방식이로 사육하여 성장 시킨 후 RS함량이 다른 실험식이로 4주간 더 사육한 후 실험한 결과는 다음과 같다. 4주간의 실험식이를 섭취하였을 때 식이 섭취량과 식이효율은 실험군간의 차 가 없었고, 대조군에 비해 RS30군에서 체중과 부고환지방무게가 유의적이지는 않으나 감소하는 경향이었다. 소장과 대장의 길이, 맹장의 무게는 실험군간의 유의적인 차이가 없었다. 분변내 수분함량을 보면 RS를 30%섭취한 군에서 유의적이지는 않으나 증가하였고, 실험식이 섭취후 3주째 측정한 장통과시간은 RS 30군에서 감소하는 경향을 보였다. 대장세포의 증식은 RS30 군에서 유의적이지는 않으나 증가하는 경향을 보였다. RS섭취량에 따라 총지방량, 중성지방량은 유의적으로 감소하였으나 콜레스테롤과 HDL-콜레스테롤량은 실험군간에 차이가 없었다. 이상의 결과에서 고지방을 섭취한 성장이후의 쥐에서 RS섭취는 유의적 이지는 않으나 체중과 체내 저장지방, 장통과시간을 감소시키는 경향을 보였으며 , 혈액 내 총지방량과 중성지방량을 유의적으로 감소시켰다. 그러므로 난소화성전분의 섭취는 저열량원으로의 가능성을 보여주고 있으며 , 고지방식이시 혈액내 총지방량과 중성지방을 낮추는 효과가 있는 것으로 사료된다 그러나 이러한 효과는 dose dependent 하지는 않았으며 난소화성 전분을 식이무게의 30%로 섭취할 경우에 유의적으로 나타났다.

방염용 실리카의 고정화를 위한 아마인유의 저온플라즈마처리 (Low Temperature Plasma Treatment of Linseed Oil for Immobilization of Silica as Flame-resistant Material)

  • 서은덕
    • 한국염색가공학회지
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    • 제24권4호
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    • pp.313-320
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    • 2012
  • For the preparation of hardened films which can be applied as a binder for flame-resistant materials such as silica, linseed oil was subjected to a low temperature plasma treatment with argon, or oxygen gas. The film was produced much faster than so-called drying of oil in air. The SEM analysis for silica particles embedded in the hardened film after plasma treatment showed that the silica particles were immobilized on substrate and were evenly dispersed. The FT-IR spectral analysis for the plasma-treated linseed oil films demonstrated that the radicals which were formed during the plasma treatments caused the linseed oil to be cross-linked, and the plasmas attacked carbon chains of the oil randomly without focusing on specific vulnerable bonds such carbon double and carbonyl bonds intensively unless exposure times of the plasmas were prolonged too much, while the cross-linking of the air-dried film was considered to occur at the well-known typical sites, i.e., carbon-carbon double bond and ${\alpha}$-methylene carbon. Burning times, as a measure of flame/fire resistance, of silica-filled cellulose substrates, increased with increasing contents of silica.

AC Plasma Display Panel (PDP)에서 MgO 박막의 내스퍼터성에 관한 연구 (A Study on the Sputtering-resistant Properties of MgO Thin-film in the AC Plasma Display Panel (PDP))

  • 지성원;여재영;이우근;조정수;박정후
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권5호
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    • pp.361-366
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    • 1999
  • The life of AC PDP depends largely on the sputtering-resistant property of the protecting layer such as MgO thin-film. However, it is very difficult to measure the sputtering-resistant property in the stable driving conditions of AC PDP. In this paper we have suggested a high speed measurement technique of the sputtering-resistant property of MgO thin-film by applying the MgO thin-film as the target of RF magnetron sputtering system. We have also applied this method to the e-beam MgO and sputter-MgO and e-beam MgO superior to sputter-MgO 3 times over. Also, the relation of Xe gas partial pressure(X) and sputtered thickness(Y) was Y=3.4X+13.5.

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저항전분이 인체내 영양생리 효과에 미치는 영향 (The Effect of Resistant Starch on Physic-Nutrition Availability in Human)

  • 오승호;신말식;최인선
    • Journal of Nutrition and Health
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    • 제35권9호
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    • pp.932-942
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    • 2002
  • In order to observe the effects of resistant starches on the physio-nutrition in women, nine female university students were investigated using cellulose (CED), resistant starch 3 (RS3D) and resistant starch 4 (RS4D) diets. Each woman's daily intake and excretions of energy, protein and lipid were mesured together with the apparent digestibility and the amounts of total cholesterol and HDL-cholesterol were measured. The results obtained from this researh are as follows. The daily energy intake were significantly higher in the RS4D (Resistant starch 4 diet) compared with the CED(Cellulose) and the RS3D (Resistant starch 3 diet). The metabolic energy in those periods with RS added to their diets were significantly higher whereas the metabolic energy in the period CED was significantly low. The daily protein intake was significantly higher in the RS4D compared with the CED and the RS3D. The apparent digestibility of protein was significantly higher in the RS4D compared with the CED and the RS3D. The daily lipid intake was significantly higher in the CED compared with the RS3D and the RS4D. The apparent digestibility of lipid was not significant in that period. The concentration of total cholesterol, HDL-cholesterol, % of HDL-cholesterol and atherogenic index (A.I.) were not significant in those period. As the above results indicate, while RS3 appear to have similar effect on energy consumption rate, apparent protein digestibility and content of cholesterol in plasma, compared with the CED, but energy consumption rate and apparent digestibility of protein are significantly higher in the RS4D compared with the CED. Thus, it appears that cellulose and RS 3 share similar effects on physio-nutrition in human, while RS4 does not have the similar effects. (Korean J Nutrition 35(9) : 932∼942, 2002)

내플라즈마성 세라믹의 표면연마를 통한 플라즈마 열화방지 (Preventing Plasma Degradation of Plasma Resistant Ceramics via Surface Polishing)

  • 최재호;변영민;김형준
    • 반도체디스플레이기술학회지
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    • 제22권3호
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    • pp.130-135
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    • 2023
  • Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

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효소저항저분이 인체내 담즙산 대사에 미치는 영향 (Effects of Resistant Starch on Metabolism of Beile Acids in College Women)

  • 김지현;최인선;박소앙;신말식;오승호
    • Journal of Nutrition and Health
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    • 제33권8호
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    • pp.802-812
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    • 2000
  • The purpose of this study was to examine the effect of resistant starch(RS) in hyperchlesterolemia and colon cancer. The subjects of this study was eight college women participating in the general starch diet(GSD) period for 5 days and resistant starch diet(RSD) period for 7 days. RSD contains 30g or the RS. On the last day of each program blood were collected. And for the last 3 days of each diet period, the amount of all the food consumed by the subjects and feces were collected. Food was measured to determine and compared the energy, protein and fat intakes. The amount of total cholesterol, HDL-cholesterol, LDL-cholesterol and volatile fatty acids in plasma and the amounts of bile acids in feces were measured by gas chromatography. The results obtained were as follows, Daily energy intake was higher in the RSD compared with the GSD, Protein and fat intakes were lower in the RSD compared with the compared with the GSD. Volatile fatty acid contents in plasma, the amounts of acetic acid, propionic acid and valeric acid were higher in the RSD compared with the GSD. The amounts of bile acids in feces, cholic acid, chenodeoxycholic acid and lithocholic acid were higher in the RSD compared with the GSD, But the amount of deoxycholic acid n the RSD period was significantly low. Secondary/primary ratios of bile acids was lower in the RSD compared with GSD, respectively. We speculate that , RS consumption decreases colonic mucosal proliferation as a result of the decreased formation of cytotoxic secondary bile acids. Thus, RS intakes may contribute the prevention of heart disease and colon cancer in humans. (Korean J Nutrition 33(8) : 802-812, 2000)

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