CF4/O2/Ar Plasma Resistance of Al2O3 Free Multi-components Glasses |
Min, Kyung Won
(Korea Institute of Ceramic Engineering and Technology)
Choi, Jae Ho (Korea Institute of Ceramic Engineering and Technology) Jung, YoonSung (Korea Institute of Ceramic Engineering and Technology) Im, Won Bin (Division of Materials Science and Engineering, Hanyang University) Kim, Hyeong-Jun (Korea Institute of Ceramic Engineering and Technology) |
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