• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2012년도 춘계학술발표회 논문집
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• pp.177-178
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• 2012

In this experiment, post-nitriding treatment has been performed at $400^{\circ}C$ on AISI 316 stainless steel which is plasma carburized previously at $430^{\circ}C$ for 15 hours. Plasma nitriding was implemented on AISI 316 stainless steel at various gas compositions (25% N2, 50% N2 and 75% N2) for 4 hours. Additionally, during post nitriding Ar gas was used with H2 and N2 to observe the improvement of treatment. After treatment, the behavior of the hybrid layer was investigated by optical microscopy, X-ray diffraction, and micro-hardness testing. Potentiodynamic polarization test was also used to evaluate the corrosion resistance of the samples. Meanwhile, it was found that the surface hardness increased with increasing the nitrogen gas content. Also small percentage of Ar gas was introduced in the post nitriding process which improved the hardness of the hardened layer but reduces the corrosion resistance compared with the carburized sample. The experiment revealed that AISI 316L stainless steel showed better hardness and excellent corrosion resistance compared with the carburized sample, when 75% N2 gas was used during the post nitriding treatment. Also addition of Ar gas during post nitriding treatment were degraded the corrosion resistance of the sample compared with the carburized sample.

• 한국표면공학회지
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• 제51권6호
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• pp.381-386
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• 2018

In this study, plasma electrolytic oxidation (PEO) method was used to from anodic oxide films on Al alloy and their resistance and morphological characteristics were investigated as a function of film formation voltage and treatment time. Cross-sectional morphology and composition of the PEO films were analyzed by SEM (Scanning Electron Microscopy) and EDS (Energy Dispersive Spectroscopy). The PEO films showed increased surface roughness and thickness with of film formation voltage and treatment time. The wear resistance was found to be the best for the PEO film formed for 5 min at 500V which is attributed to be denser structure relatively and lower surface roughness.

• Nuclear Engineering and Technology
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• 제55권4호
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• pp.1468-1475
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• 2023

Enhancement of wear resistance of components used in fast reactors is necessary for long service life of the components. Plasma nitriding is a promising surface modification technology to impart high hardness and improved wear resistance of various steel components. This study discusses the characterization of chrome nitrided SS316L casing ring used in secondary sodium pump of fast breeder reactor and its stability under long term sodium exposure. Microstructural and hardness analysis showed that stress relieved component could be chrome nitrided successfully to a thickness of about 100 ㎛. Assessment of in-sodium performance of the chrome nitrided casing ring subjected to long term exposure up to 5000h at 550℃, showed retention of chrome nitrided layer with a case depth almost similar to that before sodium exposure. A slight decrease in the hardness was observed due to prolonged high temperature sodium exposure. Tribological studies indicate very low coefficient of friction indicating the retention of good wear resistance of the coating even after long term sodium exposure.

• Applied Science and Convergence Technology
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• 제27권1호
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• pp.5-8
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• 2018

In this paper, plasma treatment effects on a ploy(dimethyl siloxane) substrate were analyzed for the applications of stretchable silver nanowire (Ag NWs) electrodes. The oxygen plasma treated sample shows the best performance compared to nitrogen treated and untreated samples. The lowest sheet resistance and reasonable stretching capability was achieved up to 20% strain condition without open circuit fail for the oxygen plasma treated sample.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1463-1464
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• 2011

An indium thin oxide(ITO) is used as a substrate material for organic light-emitting diodes(OLEDs) and organic photovoltaic cells. This study examined the effects of an $O_2$ plasma treatment on the electrical properties of an organic photovoltaic cell. The four probe method and Atomic force microscope(AFM) revealed the lowest surface resistance at the plasma treatment intensity of 250 [W] and the lowest average surface roughness of 2.0 [nm] at 250 [W]. The lowest average resistance of 17 [${\Omega}$/sq] was also observed at 250 [W] 40 [sec]. The $O_2$ plasma treatment device and a basic device in a structure of CuPc/C60/BCP/Al on ITO glass were fabricated by thermal evaporation, respectively. When the $O_2$ plasma treatment was used to the ITO, The experimental results revealed that the power conversion efficiency(PCE) indicated 65 [%] higher in the PCE than that without the plasma treatment.

• 한국재료학회지
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• 제12권5호
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• pp.341-346
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• 2002

In order to improve the low wear resistance of Ti-6Al-4V alloy, plasma carburization treatment was newly carried out without consumption of its good specific strength and fatigue life over the temperature. Effect of the plasma carburization was analyzed and compared with the non-treated alloy by microstructural observation, structure characterization and mechanical property test. The plasma treated alloy formed a carburized layer of about 150$\mu\textrm{m}$ in depth from the surface, where a fine and hard particles of TiC and $V_4C_3$ were homogeneously dispersed through the layer. It was also found that an increase of the wear resistance, fatigue life and hardness, due to the hard and fine dispersoids.

• 대한금속재료학회지
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• 제46권6호
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• pp.357-362
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• 2008

The 2-step low temperature plasma processes (the combined carburizing and post-nitriding) were carried out for improving both the surface hardness and corrosion resistance of AISI 316L stainless steel. The effects of processing time and temperature on the surface properties during nitriding step were investigated. The expanded austenite (${\gamma}_N$) was formed on all of the treated surface. The thickness of ${\gamma}_N$ was increased up to about $20{\mu}m$ and the thickness of entire hardened layer was determined to be about $40{\mu}m$. The surface hardness reached up to $1,200HV_{0.1}$ which is about 5 times higher than that of untreated sample ($250HV_{0.1}$). The thickness of ${\gamma}_N$ and concentration of N on the surface were increased with increasing processing time and temperature. The corrosion resistance in 2-step low temperature plasma processed austenitic stainless steels was enhanced more than that in the untreated austenitic stainless steels due to a high concentration of N on the surface.

• Korean Chemical Engineering Research
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• 제40권6호
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• pp.719-724
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• 2002

Celgard 및 Durapore 막을 플라즈마로 처리하여 막의 소수성 및 아민용액에 대한 저항성을 조사하였다. 플라즈마 기체(또는 증기)로는 $CF_4$, Hexafluorobenzene(HFP), Pentafluoropyridine(PFP) 그리고 Hexamethyldisiloxane(HMDS)를 사용하였다. 플라즈마로 처리시킨 막의 표면구조는 FT-IR 스펙트럼을 이용하여 분석하였다. 플라즈마로 처리시킨 막의 물에 대한 접촉각은 플라즈마 기체의 종류에 따라 다른 특성을 나타내었다. Celgard와 Durapore 모두 HFB이나 PFP의 플라즈마로 처리하였을 경우에는 접촉각이 감소하였으나, $CF_4$ 또는 HMDS의 플라즈마로 처리하였을 경우에는 플라즈마로 처리하지 않은 경우보다 접촉각이 증가하였다. Monoethanolamine(MEA)용액에 대한 저항성은 Celgard의 경우에는 플라즈마로 처리하였을 경우가 순수한 Celgard보다 낮았으나, Durapore는 $CF_4$ 플라즈마로 처리하였을 경우 MEA에 대한 저항성이 증대되었다.

• 한국진공학회지
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• 제7권3호
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• pp.167-272
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• 1998

ECR plasma CVD를 이용한 SiOF박막은 낮은 유전상수를 가지고 있으며, 기존의 공정과의 정합성이 우수해 다층배선 공정에 채용이 유망한 재료이지만 수분의 흡수로 인한 유전율의 상승과 후속공정의 안정성이 문제점으로 부각되고 있다. 따라서 본 연구에서는 SiOF박막의 내흡습성과 후속공정에서의 안정성을 향상시키기 위하여 SiOF박막을 증착한 후 후속 산소 플라즈마 처리를 행하였다. SiOF박막은 산소 플라즈마 처리를 수행함으로써 SiOF박막의 밀도가 증가하고, 수분과의 친화력이 강한 Si-F 결합이 감소하는 것이 주요한 원인으로 사료된다. 하지만 플라즈마 처리 시간이 5분 이상으로 증가하면 유전율의 증가가 일어난다. 따라서 본 실험에서는 산소 플라즈마 처리조건이 마이크로파 전력이 700W, 공정 압력이 3mTorr, 기판온도가 $300^{\circ}C$일 경우 플라즈마 처리시간은 3분이 적당한 것으로 생각 된다.

• 열처리공학회지
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• 제12권2호
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• pp.117-128
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• 1999

This study was carried out to investigate the surface characteristics of SCM440 steel nitrided with various nitrogen contents for 7 hours at $520^{\circ}C$ by using micro-pulse plasma nitriding apparatus of hot wall type. The effects of oxidation treatment was also investigated on plasma nitrided in 30% nitrogen and post oxidized SCM440 steel at $500^{\circ}C$ in $H_2O$ atmosphere. The ${\gamma}^{\prime}-Fe_4N$ and ${\varepsilon}-Fe_{2-3}N$ phases were detected in compound layer of the nitrided steel. As the content of nitrogen in plasma gas increased with 30, 50, 70% on the micro-pulse plasma nitriding for SCM440 steel, the thickness of compound, diffusion layer and the surface hardness were increased. From the wear test results, the best wear resistance was appeared in the condition of ductile ${\gamma}^{\prime}-Fe_4N$ phase formed specimen at 30% nitrogen, whereas that of the treated with 50% and 70% nitrogen decreased owing to the exfoliation of brittle ${\varepsilon}-Fe_{2-3}N$ phase in the compound layer. On the nitrided and subsequently oxidized SCM440 steel, the surface layer consisted of $Fe_3O_4$, ${\gamma}^{\prime}-Fe_4N$, and ${\varepsilon}-Fe_{2-3}N$ phases. In these treatments, the dissolution of nitrides affect hardness and hardening depth in compound and diffusion layers. For the nitrided in 30% nitrogen and post oxidized specimen at $500^{\circ}C$ for 1 hour, the wear resistance was lower than that of the only nitrided one in 30% nitrogen but higher than those of the nitrided ones in 50 and 70% nitrogen.