• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.141-144
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• 2001

An accurate cross sections set are necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method. we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. In previous paper, we calculated the electron transport coefficients in pure $CF_4$ molecular gas by using two-term approximation of the Boltzmann equation. And by using this simulation method. we confirmed erroneous calculated results of transport coefficients for $CF_{4}$ molecule treated in this paper having 'C2v symmetry' as $C_{3}H_{8}$ and $C_{3}F_{8}$ which have large vibrational excitation cross sections which may exceed elastic momentum transfer cross section. Therefore, in this paper, we calculated the electron transport coefficients(W and $ND_L$) in pure $CF_4$ gas by using multi-term approximation of the Boltzmann equation by Robson and Ness which was developed at lames-Cook university, and discussed an application and/or validity of the calculation method by comparing the calculated results by two-term and multi-term approximation code.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.10
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• pp.945-954
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• 2004

Recently, specifications of flat display module is going to be higher definition, brightness and more wide viewing angle. On the other hand, physical thickness of those modules is forced to be slimmer and lighter. The flat display modules such as plasma or TFT-LCD employ thin crystallized panels that are normally weak to high level transient mechanical energy inputs. As a result, anti-shock performance is one of the most important design specifications of TFT-LCD modules. TFT-LCD module manufacturers and their customers like PC or TV makers perform a series of strict impact/drop test for the modules. However most of the large display module designs are generated based on engineer's own trial-error experiences. Those designs may result in disqualification from the drop/impact test during final product evaluation. A rigorous study on the impact failure of the displays is of course necessitated in order to avoid the problems. In this article, a systematic design evaluation is presented with combinations of FEM modeling and testing to support the optimal shock proof display design procedure.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.92.2-92.2
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• 2011

In view of the planned NASA's and ESA's Solar Probe Plus and Solar Orbiter missions, respectively, to probe the inner heliosphere and the Sun's corona, it is timely to investigate outstanding problems associated with the solar wind. Among them is the temperature anisotropy problem. As the solar wind expands into the interplanetary space, the density and magnetic field decreases radially, thus leading to temperature anisotropy ($T_{\parallel}{\gg}T_{\perp}$). However, the measured temperature anisotropy can at times be characterized by $T_{\perp}$ > $T_{\parallel}$, while at other times the measured $T_{\parallel}/T_{\perp}$ is much milder than predicted by adiabatic theory. Physical reasons remain poorly understood. This notwithstanding, it is known from plasma physics that for $T_{\perp}$ > $T_{\parallel}$ electromagnetic ion-cyclotron (EMIC) and mirror instabilities are excited, while for $T_{\parallel}$ > $T_{\perp}$, fire-hose instability is excited. By constructing the threshold conditions for various instabilities, one may construct a closure relation that may be useful for modeling the solar wind. In the present paper we discuss theoretical construction of the anisotropy-beta relation by means of quasi-linear theories of these instabilities. The present work complements previous efforts on the basis of linear theory, hybrid simulations, and empirical fits of observations.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.141-144
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• 2001

An accurate cross sections set are necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method, we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. In previous paper, we calculated the electron transport coefficients in pure CF$_4$ molecular gas by using two-term approximation of the Boltzmann equation. And by using this simulation method, we confirmed erroneous calculated results of transport coefficients for CF$_4$ molecule treated in this paper having 'C2v symmetry'as C$_3$H$_{8}$ and C$_3$F$_{8}$ which have large vibrational excitation cross sections which may exceed elastic momentum transfer cross section. Therefore, in this paper, we calculated the electron transport coefficients(W and ND$_{L}$) in pure CF$_4$ gas by using multi-term approximation of the Boltzmann equation by Robson and Ness which was developed at James-Cook university, and discussed an application and/or validity of the calculation method by comparing the calculated results by two-term and multi-term approximation code.e.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2006.10a
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• pp.4-5
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• 2006

This paper represents modeling and optimization techniques for solar cell process on single-crystalline float zone (FZ) wafers with high efficiency; There were the four significant processes : i)emitter formation by diffusion, anti-reflection-coating (ARC) with silicon nitride using plasma-enhanced chemical vapor deposition (PECVD); iii)screen-printing for front and back metallization; and iv)contact formation by firing. In order to increase the performance of solar cells, the contact formation process is modeled and optimized. This paper utilizes the design of experiments (DOE) in contact formation to reduce process time, fabrication costs. The experiments were designed by using central composite design which is composed of $2^4$ factorial design augmented by 8 axial points with three center points. After contact formation process, the efficiency of the solar cell is modeled using neural networks. This model is used to analyse the characteristics of the process, and to optimize the process condition using genetic algorithms (GA). Finally, find optimal recipe for solar cell efficiency.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.1
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• pp.79-84
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• 2002

An accurate cross sections set is necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method, we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. It is general calculation that used in this method to an two-term approximation of Boltzmann equation. But it may give erroneous transport coefficients for CF$_4$ molecule treated in this paper having \`C2v symmetry\`, therefore, multi-term approximation of the Boltzmann equation analysis which can consider anisotropic scattering exactly is carried out. It is necessary to require understanding of the fundamental principle of analysis method. Therefore, in this paper, we compared the electron transport coefficients(W and ND$\_$L/) in pure Ar, O$_2$, and CF$_4$ gas calculated by using two-term approximation of the Boltzmann equation analysis code uses the algorithm proposed by Tagashira et al. with those by multi-term approximation by Rubson and Ness which was developed at James-Cook university, and discussed an application and/or validity of the calculation method by comparing these calculated results.

• International journal of advanced smart convergence
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• v.8 no.1
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• pp.65-74
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• 2019

3D file formats typically include OBJ (Wavefront file format), STL (STereoLithography), and FBX (Filmbox). Each format has limitations depending on its configuration and usage, and supported formats are different depending on the software application. glTF helps uniform integration of 3D file formats and allows for more efficient transmission of large 3D geometry files by organizing them in a binary format. This paper presents explanation on OBJ, FBX, and STL which are major examples of existing 3D file formats. It also explains the concept and characteristics of glTF and compares its performance with other 3D file formats on the web. The loading time and packets of each 3D file format are measured according to the web browser environment by means of Google Chrome, Firefox and Microsoft Edge. Experimental results show that glTF is the most efficient and that it exhibits the best performance. As to STL, relatively excessive traffic was observed. This study is expected to contribute to reducing rendering time on the web as 3D file formats are used.

• Journal of the Korean institute of surface engineering
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• v.52 no.3
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• pp.171-179
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• 2019

We have developed a numerical model to analyze flow dynamics and heat transfer characteristics of the cooling water in a circular rotating magnetron cathode by a moving boundary grid method realized in a commercial multiphysics package, CFD-ACE+. The numerical model is composed of a target, dual mass rotating cathode and cooling water connections. When the inlet and outlet of the cooling water are offset by the same distance from the rotation axis, the temperature at the center is higher by $50^{\circ}C$ at maximum. At 5 mm away from the target surface, the temperature profile showed typical center high characteristic. At heat input of 30 kW, the maximum temperature change of the cooling water hits $6^{\circ}C$ within 0.5 sec under 60 rpm. With a cooling water configuration of center in/edge out, the temperature of the center region of the target gets lowered. Within 100 seconds of plasma operation time, the cooling water temperature keeps getting higher.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.116-126
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• 2009

It is becoming more difficult to improve the device operating speed by shrinking the size of semiconductor devices. Therefore, for a new leap forward in the semiconductor industry, the advent of silicon opto-electronic devices, i.e., silicon photonics is more desperate. Silicon Avalanche LED is one of the prospective candidates to realize the practical silicon opto-electronic devices due to its simplicity of fabrication, repeatability, stability, high speed operation, and compatibility with silicon IC processing. We conducted the measurement of the electrical characteristics and the observation of the light-emitting phenomena using optical microscopy. We analyzed the influence of the design elements such as the shape of the light-emitting area and the depth of the $n^{+}-p^{+}$ junction with simple device modeling and simulation. We compared the results of simulation and the measurement and explained the discrepancy between the results of the simulation and the measurement, and the suggestions for the improvement were given.

• JSTS:Journal of Semiconductor Technology and Science
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• v.11 no.3
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• pp.135-145
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• 2011

Accurate process characterization and optimization are the first step for a successful advanced process control (APC), and they should be followed by continuous monitoring and control in order to run manufacturing processes most efficiently. In this paper, process characterization and recipe optimization methods with multiple outputs are presented in high density plasma-chemical vapor deposition (HDP-CVD) silicon dioxide deposition process. Five controllable process variables of Top $SiH_4$, Bottom $SiH_4$, $O_2$, Top RF Power, and Bottom RF Power, and two responses of interest, such as deposition rate and uniformity, are simultaneously considered employing both statistical response surface methodology (RSM) and neural networks (NNs) based genetic algorithm (GA). Statistically, two phases of experimental design was performed, and the established statistical models were optimized using performance index (PI). Artificial intelligently, NN process model with two outputs were established, and recipe synthesis was performed employing GA. Statistical RSM offers minimum numbers of experiment to build regression models and response surface models, but the analysis of the data need to satisfy underlying assumption and statistical data analysis capability. NN based-GA does not require any underlying assumption for data modeling; however, the selection of the input data for the model establishment is important for accurate model construction. Both statistical and artificial intelligent methods suggest competitive characterization and optimization results in HDP-CVD $SiO_2$ deposition process, and the NN based-GA method showed 26% uniformity improvement with 36% less $SiH_4$ gas usage yielding 20.8 ${\AA}/sec$ deposition rate.