Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11a
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- Pages.141-144
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- 2001
The analysis of electron transport coefficients in CF$_4$ molecular gas by multi-term approximation of the Boltzmann equation
다항근사 볼츠만 방정식에 의한 CF$_4$ 분자가스의 전자수송계수 해석
Abstract
An accurate cross sections set are necessary for the quantitatively understanding and modeling of plasma phenomena. By using the electron swarm method, we determine an accurate electron cross sections set for objective atoms or molecule at low electron energy range. In previous paper, we calculated the electron transport coefficients in pure CF
Keywords
- electron collision cross sections set for CF$_4$ gas;
- two-term approximation of the Boltzmann equation;
- multi-term approximation of the Boltzmann equation;
- W;
- ND$_{}$ L/