• Journal of the Korean Vacuum Society
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• v.22 no.2
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• pp.55-65
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• 2013

Sterilization of Neurospora crassa has been investigated in this research by using a surface air plasma with dielectric barrier discharged (DBD) structure under atmospheric pressure. The sinusoidal alternating current has been used in this experiment with discharge voltage of 1.4~2.3 kV. The phase difference between the voltage and current signals are found to be almost 80 degree due to the capacitive property of dielectric barrier. Temperature on the biomaterials has been minimized by radiating the heat with the air cooling system. It is noted that the substrate temperature remains under 37 degree for plasma exposure time of 10 minutes with operation of cooler system. It is found that the ozone, $O_3$, has been measured to be about 25~30 ppm within 1 cm region and to be about 5 ppm at the 150 cm downstream region away from the suface plasma. It is also noted that the nitric oxide, NO, and nitric dioxide, $NO_2$, are not nearly detected. Germination rate and mitochodrial activity of Neurospora crassa immersed in the deionized water have been found to be drastically decreased as the plasma treatment time and its electrical power are increased in this experiment. Here, the mitochondrial activity has been analyzed by MTT (3-(4,5-dimethy lthiazol-2yl)-2,5-diphenyl-2H-tetrazolium bromide) assay. However, sterilization of Neurospora crassa immersed in the Vogel's minimal media has been found to be low by plasma treatment, which is caused by surrounding background solution. This research shows the sterilization possibility of Neurospora crassa by using the noncontated surface DBD plasma, which is different from the plasma jet. This is mainly attibuted to the reactive species generated by the surface plasma, since they play a major role for inhibition of micobes such as Neurospora crassa.

• YAKHAK HOEJI
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• v.37 no.1
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• pp.76-83
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• 1993

The changes in discharge current, emission and/or oscillation frequency of the electric oscillation of a glow discharge are the potential sensitive measure of the concentration of an impurity in the argon plasma supporting gas. A single jet enhanced glow discharge has been interfaced with the gas chromatograph via 1/8" O.D. tube with a heating pad to study the changes in discharge current. To investigate the optimum operating conditions of the glow discharge system as detector for gas chromatography, pressure, gas flow rate, discharge current, distance between the anode and the cathode have been studied.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.211-211
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• 2013

Ru-Cr은 차세대 반도체 메모리(RAM, MRAM, FeRAM), 헤드(MR, TMR), 캐피시터의 웨이퍼 등에 전극층이나 시드층 형성을 위해 스퍼터링 타겟으로 제조되며, IT산업이 발달함에 따라 수요가 증가하고 있다. 기존의 스퍼터링 타겟은 산처리와 주조와 같은 습식법이 주를 이루었으나, 긴 제조시간과 강산사용의 위험성화 강산폐유의 처리가 문제되고 있다. 최근에는 습식공정을 보완하기 위한 건식법의 연구가 진행 중이며, 합금소재에 대한 건식법의 연구가 필요하다. 본 연구에서는 폐 Ru-Cr 금속합금 스퍼터링 타겟을 Hammer-mill, jet-mill 등 건식으로 분쇄하고 RF-Plasma를 이용하여 소결에 용이한 구형, 고순도 Ru-Cr금속합금분말을 제조하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.542-542
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• 2013

저온 플라즈마를 발생시키는 대기압 마이크로-플라즈마 젯(Micro-plasma jet)을 이용하여 플라즈마와 세포와의 상호작용에 대한 연구를 진행하였다. 세포의 대사과정에서 생성되는 활성산소 종(Reactive Oxygen Species, ROS)은 세포에 산화 스트레스를 유발시킨다. 이러한 스트레스는 세포 예정사(programmed cell death)의 원인이 된다. 플라즈마 형성 기체로 헬륨, 아르곤, 질소를 사용하여 각각의 기체에 따른 세포의 형태 변화 및 세포 내 활성 산소 종의 영향을 분석하였다. 실험에 사용된 세포는 인체의 폐암 세포[Human lung cancer cell, A549]이며 플라즈마 처리 후 Intracellular ROS assay를 통하여 플라즈마에서 발생되는 활성 산소 종(Reactive Oxygen Species, ROS)이 세포 내에 들어가 활성 산소 종을 증가시키는 것을 확인하였다. 이때, 플라즈마에서 발생되는 활성 산소 종(Reactive Oxygen Species, ROS)들은 광 방출 스펙트럼(Optical Emission Spectroscopy)로 분석하였고, 기체별로 비교하여 보았다. 또한, 이 때 발생되는 플라즈마의 전류-전압 특성에 따른 optical intensity를 비교하였다.

• 전기의세계
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• v.24 no.6
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• pp.77-84
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• 1975

This paper treats A.C. arc movement in a transverse A.C. magnetic field at atmospheric pressure with the purpose of selecting electrode materials and obtaining detailed data for design of A.C. air circuit breaker, plasma accelerator and plasma jet. Arc velocities in transverse magnetic field are measured by varying arc current, arc voltage, gap length, magnetic flux density and the erosion of electrode surface, which influence arc velocities. The main results are; 1)Arc velocities in transverse magnetic field have different values according to electrodes of various materials and decrease in a descending order of cold cathode, medium cathode and hot cathode. 2)Arc velocities in transverse magnetic field increases with arc current, arc voltage, gap length and magnetic flux densith and on the other hand decrease with the increase of electrode surface erosion. 3)D.C.arc velocity in D.C. magnetic field is higher than A.C. arc velocity in A.C. magnetic field of the same value.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.462-462
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• 2012

바이오 플라즈마의 일환으로 대기압 플라즈마 제트 장치를 개발하여 혈액 응고 실험을 하였다. 대기압 플라즈마 제트 장치는 의료용 바늘, 테프론 튜브, 유리관으로 이루어져 있다. 본 실험에 사용된 플라즈마 제트 장치는 두 전극 사이에 유전체로 사용된 유리관이 설치된 유전체 장벽 방전 플라즈마의 한 형태라 할 수 있다. 플라즈마 제트에 주입된 가스는 Ar이며 전기적, 열적 충격이 없다. 출력전압은 1.2 kV, 출력전류는 1.9 mA, 구동주파수는 40 kHz이다. 출혈이 발생한 상처에 조사한 결과, 9 초만에 혈액이 응고되는 것을 확인하였다. 또한, 멀티 플라즈마 제트 장치를 고안하였다. 플라즈마 제트에서 발생되는 플라즈마 양을 증가시킴으로서 대면적으로 활용할 수 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.229-229
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• 2011

대기압 플라즈마 제트의 플라즈마 전파 현상을 조사하였다. 바늘침과 유리관으로 구성된 플라즈마 발생장치에 Ar을 주입하여 교류 고전압을 인가하면, 바늘침 전극부에 발생된 플라즈마가 길이방향에 따라 유리관 밖으로 전파된다. ICCD 초고속 카메라로 촬영한 결과, 고압부에 발생한 플라즈마 총알처럼 전파되는 것을 관측 되였다. 전파속도는 ~104 m/s이다. 이는 기체의 유속 ~10m/s 보다 훨씬 큰 값이다. 또한 광 프로브를 이용하여 광신호를 측정하였다. 광 신호가 고압 측부터 유리관 길이방향으로 순차적으로 전파되는 것이 관측 되었다. 전파 속도 ~104m/s으로 ICCD로 측정한 플라즈마 전파 속도와 일치한다.

• Current Photovoltaic Research
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• v.2 no.3
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• pp.120-123
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• 2014

Thermal doping method using furnace is generally used for solar-cell wafer doping. It takes a lot of time and high cost and use toxic gas. Generally selective emitter doping using laser, but laser is very high equipment and induce the wafer's structure damage. In this study, we apply atmospheric pressure plasma for solar-cell wafer doping. We fabricated that the atmospheric pressure plasma jet injected Ar gas is inputted a low frequency (1 kHz ~ 100 kHz). We used shallow doping wafers existing PSG (Phosphorus Silicate Glass) on the shallow doping CZ P-type wafer (120 ohm/square). SIMS (Secondary Ion Mass Spectroscopy) are used for measuring wafer doping depth and concentration of phosphorus. We check that wafer's surface is not changed after plasma doping and atmospheric pressure doping width is broaden by increase of plasma treatment time and current.

• Journal of Periodontal and Implant Science
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• v.49 no.5
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• pp.319-329
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• 2019

Purpose: Direct application of atmospheric-pressure plasma jets (APPJs) has been established as an effective method of microbial decontamination. This study aimed to investigate the bactericidal effect of direct application of an APPJ using helium gas (He-APPJ) on Porphyromonas gingivalis biofilms on sandblasted and acid-etched (SLA) titanium discs. Methods: On the SLA discs covered by P. gingivalis biofilms, an APPJ with helium (He) as a discharge gas was applied at 3 different time intervals (0, 3, and 5 minutes). To evaluate the effect of the plasma itself, the He gas-only group was used as the control group. The bactericidal effect of the He-APPJ was determined by the number of colony-forming units. Bacterial viability was observed by confocal laser scanning microscopy (CLSM), and bacterial morphology was examined by scanning electron microscopy (SEM). Results: As the plasma treatment time increased, the amount of P. gingivalis decreased, and the difference was statistically significant. In the SEM images, compared to the control group, the bacterial biofilm structure on SLA discs treated by the He-APPJ for more than 3 minutes was destroyed. In addition, the CLSM images showed consistent results. Even in sites distant from the area of direct He-APPJ exposure, decontamination effects were observed in both SEM and CLSM images. Conclusions: He-APPJ application was effective in removing P. gingivalis biofilm on SLA titanium discs in an in vitro experiment.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.27 no.6
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• pp.31-38
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• 2013

A pulse driven atmospheric plasma jet controlled by external ballast capacitor is developed. Unlike the most commonly use DBD sources, the proposed device utilizes bare metal electrode. The discharge energy per pulse can precisely be determined by changing voltage and capacitance of the ballast capacitor. It is shown that the device can provide wide range of plasma, from stable glow mode to near arc state. Current-voltage waveforms, optical emission spectra and discharge images are investigated as a function of an injection energy. The OES shows that He and oxygen lines are increased as a function of the external ballast capacitor. Ozone and rotational temperature have similar tendency with a power consumption. The feeding gas is He and the applied DC voltage is from 400V to 800V when the gap distance is $500{\mu}m$.