• Nuclear Engineering and Technology
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• v.37 no.3
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• pp.279-286
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• 2005

A prototype of a relativistic proton generation system, based on laser-induced plasma interaction, has been designed and fabricated. The system is composed of three major parts: a fs TW laser; a target chamber, including targets and controls; and a diagnostic system for charged particles and lasers. An Offner-type pulse stretcher for chirped pulse amplification (CPA) and eight pass pre-amplifier are installed. The main amplifier will be integrated with a new pumping laser. The design values of the laser at the first stage are 1 TW in power and 50 fs in pulse duration. We expect to generate protons with their maximum energy of approximately 3 MeV and the flux of at least $10^6$ per pulse using a 10 $\mu$m Al target. A prototype target chamber with eight 8-inch flanges, including target mounts, has been designed and fabricated. For laser diagnostics, an adaptive optics based on the Shack-Hartmann type, beam monitoring, and alignment system are all under development. For a charged particle, CR-39 detectors, a Thomson parabola spectrometer, and Si charged-particle detectors will be used for the density profile and energy spectrum. In this paper, we present the preliminary design for laser-induced proton generation. We also present plans for future work, as well as theoretical simulations.

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.101-101
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• 2006

• Nuclear Engineering and Technology
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• v.45 no.5
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• pp.683-688
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• 2013

Candidate coating materials for re-usable metallic nuclear fuel crucibles, TaC, TiC, ZrC, $ZrO_2$, and $Y_2O_3$, were plasmasprayed onto a niobium substrate. The microstructure of the plasma-sprayed coatings and thermal cycling behavior were characterized, and U-Zr melt interaction studies were carried out. The TaC and $Y_2O_3$ coating layers had a uniform thickness, and high density with only a few small closed pores showing good consolidation, while the ZrC, TiC, and $ZrO_2$ coatings were not well consolidated with a considerable amount of porosity. Thermal cycling tests showed that the adhesion of the TiC, ZrC, and $ZrO_2$ coating layers with niobium was relatively weak compared to the TaC and $Y_2O_3$ coatings. The TaC and $Y_2O_3$ coatings had better cycling characteristics with no interconnected cracks. In the interaction studies, ZrC and $ZrO_2$ coated rods showed significant degradations after exposure to U-10 wt.% Zr melt at $1600^{\circ}C$ for 15 min., but TaC, TiC, and $Y_2O_3$ coatings showed good compatibility with U-Zr melt.

• Journal of Sasang Constitutional Medicine
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• v.10 no.1
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• pp.269-284
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• 1998

The purpose of this study was to investigate the effect of ILIB(Intravenous Laser Irradiation of blood) on Meridian-Heart Circulation CMP and Hyperlipidemia. Circulatory symptom of 20 patients was treated with ILIB. After 10 times' treatment, changes of total cholesterol, HDL-cholesterol, triglyceride and Meridian-Heart Circulation CMP value were observed. The results were as follows : 1. In observation of Meridian-Heart Circulation CMP value, significant increase was observed in both pre-ID generation and post-ID generation. So, distinctive observation between pre-ID generation and post-ID generation became not relatively significant. 2. In observation of Meridian-Heart Circulation CMP value, significant increase was observed in both left and right. So, distinctive observation between left and right became not relatively significant. 3. In observation of Meridian-Heart CMP value, significant increase was not observed in control group, but significant increase close to normal value was observed in treatment group after treatment of Intravenous He-Ne Laser Irradiation. 4. In observation of Meridian-Circulation CMP value, significant increase was not observed in control group, but significant increase close to normal value was observed in treatment group after treatment of Intravenous He-Ne Laser Irradiation. 5. In concentration of plasma total cholesterol and plasma triglyceride, significant decrease was not observed in control group, but significant increase was observed in treatment group after treatment of Intravenous He-Ne laser Irradiation. 6. Significant concentration change of plasma HDL-cholesterol was not observed in both control group and treatment group. From above results, it was thought that Intravenous He-Ne Laser Irradiation was significant effect on heart circulatory system in human body.

• Journal of the Korean institute of surface engineering
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• v.39 no.3
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• pp.142-146
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• 2006

A novel internal-type linear inductive antenna, which we refer to as a double comb-type antenna, was developed for a large-area plasma source with substrate size of $880\;mm{\times}660\;mm$ ($4^{th}$ generation glass size). In this study, effect of plasma confinement by applying multi-polar magnetic field was investigated. High density plasmas of the order of $3.18{\times}10^{11}\;cm^{-3}$ could be obtained with a pressure of 15 mTorr Ar at an inductive power of 5000 W with good plasma stability. This plasma density is higher than that obtained for the conventional double comb-type antenna, possibly due to the plasma confinement, low rf voltage, resulting in high power transfer efficiency. Also, due to the remarkable reduction in the antenna rf voltage and length, a plasma uniformity of less than 3% could be obtained within a substrate area of $880\;mm{\times}660\;mm$ as rf power increased.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.57 no.2
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• pp.79-83
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• 2008

In this paper, we introduced a LIF measurement method and summarized the theoretical side. When an altered wavelength of laser and electric power, lamp applied electric power, we measured the relative density of the metastable state in mercury after observing a laser induced fluorescence signal of 404.8nm and 546.2nm, and confirmed the horizontal distribution of plasma density in the discharge lamp. Due to this generation, the extinction of atoms in a metastable state occurred through collision, ionization, and excitation between plasma particles. The density and distribution of the metastable state depended on the energy and density of plasma particles, intensely. This highlights the importance of measuring density distribution in plasma electric discharge mechanism study. The results confirmed the resonance phenomenon regarding the energy level of atoms along a wavelength. change, and also confirmed that the largest fluorescent signal in 436nm, and that the density of atoms in 546.2nm ($6^3S_1{\to}6^3P_2$) were larger than 404.8nm ($6^3S_1{\to}6^3P_2$). According to the increase of lamp applied electric power, plasma density increased, too. When increased with laser electric power, the LIF signal reached a saturation state in more than 2.6mJ. When partial plasma density distribution along a horizontal axis was measured using the laser induced fluorescence method, the density decreased by recombination away from the center.

• Journal of the Semiconductor & Display Technology
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• v.19 no.4
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2918-2922
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• 2007

This is a report of a feasibility study on the reduction of harmful substances such as particulate matters and nitric oxides emitted from diesel engines by using a plasma reforming system that can generate hydrogen-rich gas. In this paper, an exhaust reduction mechanism of the non-thermal plasma reaction was investigated to perform its efficiency and characteristics on producing hydrogen-rich gas. Firstly, we explain briefly the chemistry of hydrocarbon reforming. The experimental system is showed in the second part. Finally, we demonstrate the feasibility of producing hydrogen using non-thermal plasma. The experimental results are focused on the influence of the different operating parameters (air ratio, inlet flow rates, voltage) on the reformer efficiency and the composition of the produced gas.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.59-62
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• 2004

We investigated the effect of Xe content variation on the luminous efficiency of two different sub-pixel types, i.e., segmented electrode in delta color arrayed enclosed sub-pixel (SDE) and conventional stripe barrier type, in an ac plasma display panel through three-dimensional numerical simulations. The conventional cell type was found to have higher VUV generation efficiency as compared with that of SDE structure, but as the Xe content increased, the SDE type showed higher improvements in efficiency due to the lower plasma loss to the barrier walls.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.3
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• pp.157-161
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• 2004

We present a simple analytical expression of plasma density by making use of the electron density equation to study the dynamic behavior of the corona discharge plasma. It assumes that a specified voltage profile is fed through the inner conductor of the reactor chamber consisting of two coaxial conducting cylinders. The analytical description is based on the electron continuity equation with ionization and attachment by electrons. It is found that the electron density profile calculated between two coaxial cylindrical electrodes depends very sensitively on the Profile of applied voltage. The analytical expression of plasma density and its generation will provide important scaling laws in the corona discharge plasma.