• 한국광학회지
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• 제12권2호
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• pp.103-108
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• 2001

플라즈마 디스플레이 패널(plasma display panel :PDP)에서 방출되는 광의 3차원 분포를 측정하기 위한 scanned point-detecting system(SPDS)을 고안하여 제작하였으며 이 시스템을 이용하여 실제 PDP의 3차원 광 방출 특성을 측정하고 해석하였다. SPDS는 상면에 핀홀이 달려 있는 광검출기(point detector)를 위치시킴으로써 특정 지점으로부터 방출되는 광만을 검출할수 있다. 3차원 물체의 특정 지점으로부터 방출된 광은 핀홀을 지나 검출기로 모두 입사되지만 다른 지점으로부터 방출된 광은 핀홀 앞에서 미리 집속되거나 핀홀 뒤에서 집속될것이므로 이러한 광들은 핀홀에 의해 대부분 차단될 것이다. 그러므로 물체의 특정 지점으로부터 방출된 광만이 핀홀이 설치된 검출기에 의해 검출되어 진다. SPDS를 이용하여 PDP cell 내에서 측정된 3차원 광 intensity 분포로부터 cellso의 방전현상을 다음과 같이 유추해낼수 있었다. Z축 측정이 진행될수록광의 intensity는 증가하였고 ITO전극의 안쪽부분에서 검출되는 광의 intensity가 가장 컸고 Y축 scan시 나타나는 X-Z평면에서 광의 intensity가 격벽과 격벽의 중심부분에서 가장 크게 나타났다.

• 한국가금학회지
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• 제21권2호
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• pp.139-150
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• 1994

Egg cholesterol has been a hot issue in respect of it's effect on health and diseases in human. There is a general recognition that the cholesterol from eggs is similar to that from the other dietary sources in its biochemical functions. Many evidences show that egg yolk increased plasma cholesterol levels at an average rate of 2.3 mg /100 rnL plasma for every 100 mg cholesterol consumed. The elevation of plasma cholesterol could, however, be altered by various dietary factors such as ratios of polyunsaturated fatty acids and saturated fatty acids. Blood cholesterol levels of Korean adults have been raised up to, on the average, 193 and 187 mg /100 mL plasma for men and women, respectively, from 167/5 mg /100 mL in 1980. Furthermore, proportion of hypercholesterolemics(> 210 mg /dL) has been increased up to 23% of the population. These changes in blood cholesterol levels are attributed to the changes of dietary patterns, suggesting the arguement that Koreans are insensitive to changes of blood cholesterol is not right. Egg cholesterol levels have never been successfully reduced to any significant levels even with tremendous amounts of efforts made during last decades. The alternative and the best way to control blood cholesterol level originating from egg consumption appeares to enrich egg fat with omega-3 series fatty acids. Ingestion of the fatty acid group has specific functions to reduce hypertension and prevent various types of cancer as well as to reduce blood cholesterol. Another way to reduce egg cholesterol directly is to produce smaller egg yolk without reducing whole egg size since cholesterol is located only in the yolk. It is important to keep faith with consumers by providing correct informations on eggs, meanwhile efforts need to focus on to improve the quality of eggs as one of the best protein food items.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.183-184
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• 2013

Two main MBE growth techniques have been used: plasma-assisted MBE (PA-MBE), which utilizes a rf plasma to supply active nitrogen, and ammonia MBE, in which nitrogen is supplied by pyrolysis of NH3 on the sample surface during growth. PA-MBE is typically performed under metal-rich growth conditions, which results in the formation of gallium droplets on the sample surface and a narrow range of conditions for optimal growth. In contrast, high-quality GaN films can be grown by ammonia MBE under an excess nitrogen flux, which in principle should result in improved device uniformity due to the elimination of droplets and wider range of stable growth conditions. A drawback of ammonia MBE, on the other hand, is a serious memory effect of NH3 condensed on the cryo-panels and the vicinity of heaters, which ruins the control of critical growth stages, i.e. the native oxide desorption and the surface reconstruction, and the accurate control of V/III ratio, especially in the initial stage of seed layer growth. In this paper, we demonstrate that the reliable and reproducible growth of GaN on Si (110) substrates is successfully achieved by combining two MBE growth technologies using rf plasma and ammonia and setting a proper growth protocol. Samples were grown in a MBE system equipped with both a nitrogen rf plasma source (SVT) and an ammonia source. The ammonia gas purity was ＞99.9999% and further purified by using a getter filter. The custom-made injector designed to focus the ammonia flux onto the substrate was used for the gas delivery, while aluminum and gallium were provided via conventional effusion cells. The growth sequence to minimize the residual ammonia and subsequent memory effects is the following: (1) Native oxides are desorbed at $750^{\circ}C$ (Fig. (a) for [$1^-10$] and [001] azimuth) (2) 40 nm thick AlN is first grown using nitrogen rf plasma source at $900^{\circ}C$ nder the optimized condition to maintain the layer by layer growth of AlN buffer layer and slightly Al-rich condition. (Fig. (b)) (3) After switching to ammonia source, GaN growth is initiated with different V/III ratio and temperature conditions. A streaky RHEED pattern with an appearance of a weak ($2{\times}2$) reconstruction characteristic of Ga-polarity is observed all along the growth of subsequent GaN layer under optimized conditions. (Fig. (c)) The structural properties as well as dislocation densities as a function of growth conditions have been investigated using symmetrical and asymmetrical x-ray rocking curves. The electrical characteristics as a function of buffer and GaN layer growth conditions as well as the growth sequence will be also discussed. Figure: (a) RHEED pattern after oxide desorption (b) after 40 nm thick AlN growth using nitrogen rf plasma source and (c) after 600 nm thick GaN growth using ammonia source for (upper) [110] and (lower) [001] azimuth.

• Nuclear Engineering and Technology
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• 제31권5호
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• pp.512-521
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• 1999

A feasibility study was performed to design an epithermal neutron beam for BNCT using the neutron of 2.45 MeV on the average produced from $^2H(d,n)^3$He reaction induced by plasma focus in the z-pinch instead of the conventional accelerator-based $^3H(d, n)^4$He neutron generator. Flux and spectrum were analyzed to use these neutrons as the neutron source for BNCT. Neutronic characteristics of several candidate materials in this neutron source were investigated Using MCNP Code, and $^7LiF$ ; 40%Al + 60%$AIF_3$, and Pb Were determined as moderator, filter, and reflector in an epithermal neutron beam design for BNCT, respectively. The skin-skull-brain ellipsoidal phantom, which consists of homogeneous regions of skin-, bone-, or brain-equivalent material, was used in order to assess the dosimetric effect in brain. An epithermal neutron beam design for BNCT was proposed by the repeated work with MCNP runs, and the dosimetric properties (AD, AR, ADDR, and Dose Components) calculated within the phantom showed that the neutron beam designed in this work is effective in tumor therapy. If the neutron source flux is high enough using the z-pinch plasma, BNCT using the neutron source produced from $^2H(d,n)^3$He reaction will be very feasible.

• 한국진공학회지
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• 제11권2호
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• pp.113-118
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• 2002

대면적 GaAs 웨이퍼의 플라즈마 식각 공정에서 식각 깊이의 좋은 균일도를 얻기 위해 반응기 내의 가스 흐름을 조절하는 진보된 기술을 실험하였다. 유한차분수치법(Finite Difference Numerical Method)은 GaAs 웨이퍼의 건식 식각을 위한 반응기 안의 가스 흐름의 분포를 시뮬레이션하기에 유용한 방법이다. 이 방법을 이용해 시뮬레이션된 자료와 실제의 것이 상당히 일치한다는 것이 $BCl_3/N_2/SF_6/He$ICP플라즈마의 실험 결과로 확인되었다. 대면적 GaAs 웨이퍼의 플라즈마 식각 공정 중에서 포커스 링(focus ring)의 최적화된 위치가 가스 흐름과 식각 균일성을 동시에 향상시키는 것을 이해했다. 반응기와 전극(electrode)의 크기가 변하지 않는 상황에서 샘플을 고정시키는 클램프 배치의 최적화를 통해 100 mm(4 inch) GaAs 웨이퍼에서 가스 흐름의 균일성을 $\pm$1.5 %, 150 mm(6 inch) 웨이퍼에서는 $\pm$3% 이하로 유지시킬 수 있는 것을 시뮬레이션결과에서 확인할 수 있다. 시뮬레이션된 가스 흐름의 균일도 자료와 실제 식각 깊이 분포실험 데이터의 비교로 대면적 GaAs 웨이퍼에서 건식 식각의 뛰어난 균일성을 얻기 위해서는 반응기 내의 가스흐름분포의 조절이 매우 중요함을 확인하였다.

• Current Optics and Photonics
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• 제1권3호
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• pp.221-227
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• 2017

To apply a square-shaped beam homogenizer to laser shock peening, it should be designed with a long working distance and by considering metal targets with various shapes and textures. For long working distances, a square-shaped beam homogenizer with a long depth of focus is required. In the range of working distance, the laser beam is required to have not only high efficiency but high uniformity, in other words, a good peening quality is guaranteed. In this study, we defined this range as the working distance for laser shock peening. We have simulated the effect of some parameters on the working distance. The parameters include the focal length of the condenser lens, pitch size of the array lens, and plasma threshold of the metal. The simulation was performed through numerical analysis by considering the diffraction effect.

• ETRI Journal
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• 제31권6호
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• pp.695-702
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• 2009

We propose a lens-drive unit composed of an ionic polymer-metal composite (IPMC) for an auto-focus compact camera module in cellular phones to solve the power consumption problem of voice coil motors which are widely used in commercial products. In this research, an IPMC incorporated into a lens-drive unit is designed to implement a large displacement in low-power consumption by using an anisotropic plasma treatment. Experimental results show that a camera module containing IPMCs can control and maintain the position of the lens by using proportional integral derivative control with a photo-reflective position sensor despite the non-linear actuation behavior of IPMCs. We demonstrate that the fabrication and commercialization of a lens actuator that has a large displacement and low power consumption using IPMCs is possible in the near future.

• 한국정밀공학회지
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• 제26권5호
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• Korean Chemical Engineering Research
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• 제46권2호
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• pp.389-396
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• 2008

벤조시클로부텐(benzocyclobutene; BCB)과 플라즈마 화학기상증착(PECVD)된 산화규소막이 코팅된 웨이퍼들 사이의 계면에서, 고온 열순환 공정에 의한 잔류응력 및 본딩 결합력의 효과를 4점 굽힙시험법과 웨이퍼 곡률 측정법에 의해 평가하였다. 이를 위해 웨이퍼들은 사전에 확립된 표준 본딩공정에 의거하여 본딩하였으며 이들 웨이퍼에 대한 열순환 공정은 상온으로부터 최대 순환온도 사이에서 수행하였다. 최대 온도 350 및 $400^{\circ}C$에서 수행한 열순환 공정에서, 본딩 결합력은 첫번째 순환공정 동안 크게 증가하는 데, 이는 순환공정 시 발생하는 산화규소막의 축합 반응에 의한 잔류응력 감소 때문인 것으로 분석되었다. 이러한 산화규소막의 잔류응력이 감소함에 따라 BCB와 산화규소막으로 구성된 다층막의 잔류응력에 의해 변형되는 에너지는 상승하였고 따라서 BCB와 산화규소막 사이 다층막의 의 본딩 결합력은 증가하였다.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2007년도 제34회 KOSCO SYMPOSIUM 논문집
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• pp.27-30
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave is generated from a localized spot of high intensity energy source. The resulting reactive shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is generating reactive shock wave and high strain rate deforming of thin metal foil for accelerating micro-particles to a very high speed on the orders of several thousand meter per second. Somce innovative applications of this device will be discussed.