• 제목/요약/키워드: Plasma diagnostic

검색결과 203건 처리시간 0.032초

산소 유량별 플라즈마 방출광원 세기에 따른 전자온도 진단과 산화주석박막 특성연구 (Study on Electron Temperature Diagnostic and the ITO Thin Film Characteristics of the Plasma Emission Intensity by the Oxygen Gas Flow)

  • 박혜진;최진우;조태훈;윤명수;권기청
    • 한국표면공학회지
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    • 제49권1호
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    • pp.92-97
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    • 2016
  • The plasma has been used in various industrial fields of semiconductors, displays, transparent electrode and so on. Plasma diagnostics is critical to the uniform process and the product. We use the electron temperature of the various plasma parameters for the diagnosis of plasma. Generally, the range of the electron temperature which is used in a semiconductor process used the range of 1 eV to 10 eV. The difference of electron temperature of 0.5 eV has a influence in plasma process. The electron temperature can be measured by the electrical method and the optical method. Measurement of electron temperature for various gas flow rates was performed in DC-magnetron sputter and Inductively Coupled Plasma. The physical properties of the thin film were also determined by changing electron temperatures. The transmittance was measured using the integrating sphere, and wavelength range was measured at 300 ~ 1100 nm. We obtain the thin film of the mobility, resistivity and carrier concentration using the hall measurement system. As to the electron temperature increase, optical and electrical properties decrease. We determine it was influenced by the oxygen flow ratio and plasma.

손바닥 선인장 열매 섭취가 한림지역 해녀의 혈중지질, 혈소판 응집성 및 항산화 효과에 미치는 영향 (Effect of prickly pear cactus (Opuntina ficus-indica) intake on blood lipids, platelet aggregation, antioxidant and liver parameters in volunteer diving woman)

  • 한순금;강민숙;류성희;황승욱;강정숙
    • Journal of Nutrition and Health
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    • 제45권5호
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    • pp.462-469
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    • 2012
  • We investigated dietary effects of prickly pear cactus (Opuntina ficus-indica) on plasma lipids, platelet aggregation (PA), hemolysis, plasma TBARS and liver enzymes. Twenty eight volunteer diving women in Jeju island had daily 20 g cactus tea containing 27% prickly pear cactus (PPC) powder for 4 weeks, and data for the study subjects were analyzed, on the basis of diagnostic criteria for blood pressure (BP)(${\geq}$ 140/90 mmHg), plasma cholesterol (${\geq}$ 200 mg/dL) and triglyceride (${\geq}$ 150 mg/dL). The subjects with higher BP had higher plasma total cholesterol (TC) and triglyceride (TG) concentrations than those with normal BP. Those with higher TC also had higher TG. Subjects with normal BP or normal TC had higher initial slope of PA than their higher counterpart in BP and TC. PPC intake decreased plasma TG in those with higher BP. PPC intake significantly decreased the elevated initial slope in groups with normal BP, TC, and TG. Hemolysis after PPC intake decreased significantly in all the subjects and plasma TBARS decreased in the subjects with higher plasma TC and higher TG. Glutamic-oxaloacetic transaminase (GOT) significantly increased and total bilirubin significantly decreased in all the subjects after PPC intake. The present study with diving women showed that beneficial effects of short term intake of prickly pear cactus might differ depending on the subject conditions in term of blood pressure, and plasma lipids. However, long term usage of prickly pear cactus may provide preventive effects of cardiovascular diseases to all the population, presumably by hypolipidemic, antithrombotic, and antioxidant actions of its bioactive flavonoids and soluble fiber.

돼지에서 plasma protein에 의한 세포성면역 증진효과에 관한 연구 2. 혈액내 T 림프구 아군 및 MHC class 세포의 분포율 (Enhancement of cell-mediated immunity by administration of plasma protein in pigs 2. Proportion of T lymphocyte subpopulations and cells expressing MHC class I, II molecules in peripheral blood)

  • 양창근;김순재;문진산;정석찬;박용호
    • 대한수의학회지
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    • 제34권2호
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    • pp.287-299
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    • 1994
  • Plasma protein which has been known as one of nonspecific immunostimulators was added to feedstuff to examine its effect on the enhancement of cellular immune response in porcine immune system. A total of 40 piglets, 20 male and 20 female each, were fed for 30 days with or without plasma protein. The peripheral blood were collected and analyzed for the investigation of leukocyte subpopulations and their activities by using a panel of monoclonal antibodies specific to porcine leukocyte differentiation antigens and flow cytometry. The results obtained as follows. 1. Subpopulations expressing major histocompatibility complex(MHC) class I antigen were $96.2{\pm}3.1%$ and $86.6{\pm}3.8%$ in piglets fed with plasma protein and in piglets fed without plasma protein, respectively. 2. Proportion of leukocyte subpopulation expressing MHC class II antigens were significantly higher in the piglets fed with plasma protein than ones without plasma protein. The proportion was $27.6{\pm}3.6%$ and $16.6{\pm}2.2%$ in MHC class II DQ antigen, and $28.1{\pm}2.0%$ and $20.0{\pm}0.3%$ in MHC class II DR antigen, respectively. 3. A significant increase in the proportion of cells expressing poCD2 was not found in piglets fed plasma protein. 4. Proportion of subpopulation expressed porcine(Po) CD4 antigens which specific to helper T lymphocytes were not increased (18.3-19.1% vs. 25.6-28.8%), rather slightly decreased, in plasma protein-treated group. 5. The most important increase of proportion in plasma protein-treated group was the leukocyte subpopulation specific to $poCD8^+$ T cytotoxic/suppressor lymphocytes. The expression level was significantly higher up to 45.9-47.1% in plasma protein-treated group in comparing with 29.7-33.0% in non-plasma protein-treated group. 6. Lymphoblastogenetic responses using different concentrations of Con A mitogen and plasma protein has found that the responses of lymphocyte from piglets fed plasma protein was significantly activated (p<0.01). The activities measured by 3[H]-thymidine incorporation showed 3-6 times stronger in plasma protein-treated group than those in non-plasma protein-treated group. The study has concluded that plasma protein, which has known as a nonspecific immunostimulator, may have an immunoenhancing activities in porcine lymphoid system by increase the activated cell proportions and their blastogenetic properties which is critical to host immune responses.

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림프절의 염증성 가성 종양 - 세침흡인 세포학적 소견 1예 보고 - (Fine Needle Aspiration Cytologic Findings of Inflammatory Pseudotumor of the Lymph Node)

  • 박소영;공경엽;허주령;유은실;이인철;김온자
    • 대한세포병리학회지
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    • 제8권1호
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    • pp.87-92
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    • 1997
  • Reports on the cytologic or histopathologic findings of inflammatory pseudotumors are relatively infrequent and most of them have dealt with those involving the lung, liver, genitourinary tract, alimentary tract, spleen, mediastinum, retroperitoneum, etc. Moreover there have not been any cytologic studios of those involving lymph nodes. We present fine needle aspiration cytologic features of inflammatory pseudotumor occurring in a lymph node in a 64 year-old man. The aspirate consisted of proliferating spindle cells and admixed histiocytes, fibroblasts, lymphocytes, and plasma cells. Histiocytes were present either singly or in loosely cohesive small clusters. A few multinucleated giant cells were present as well. However, tuberculosis could be excluded by the absence of typical granuloma, caseation necrosis, or characteristic mixed spindle and inflammatory cell components. Other benign and malignant lymphadenopathies could also be differentiated based on cytologic findings.

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Optical Diagnostics of Nanopowder Processed in Liquid Plasmas

  • Bratescu, M.A.;Saito, N.;Takai, O.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.17-18
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    • 2011
  • Plasma in liquid phase has attracted great attention in the last few years by the wide domain of applications in material processing, decomposition of organic and inorganic chemical compounds and sterilization of water. The plasma in liquid is characterized by three main regions which interact each - other during the plasma operation: the liquid phase, which supply the plasma gas phase with various chemical compounds and ions, the plasma in the gas phase at atmospheric pressure and the interface between these two regions. The most complex region, but extremely interesting from the fundamental, chemical and physical processes which occur here, is the boundary between the liquid phase and the plasma gas phase. In our laboratory, plasma in liquid which behaves as a glow discharge type, is generated by using a bipolar pulsed power supply, with variable pulse width, in the range of 0.5~10 ${\mu}s$ and 10 to 30 kHz repetition rate. Plasma in water and other different solutions was characterized by electrical and optical measurements. Strong emissions of OH and H radicals dominate the optical spectra. Generally water with 500 ${\mu}S/cm$ conductivity has a breakdown voltage around 2 kV, depending on the pulse width and the repetition rate of the power supply. The characteristics of the plasma initiated in ultrapure water between pairs of different materials used for electrodes (W and Ta) were investigated by the time-resolved optical emission and the broad-band absorption spectroscopy. The deexcitation processes of the reactive species formed in the water plasma depend on the electrode material, but have been independent on the polarity of the applied voltage pulses. Recently, Coherent anti-Stokes Raman Spectroscopy method was employed to investigate the chemistry in the liquid phase and at the interface between the gas and the liquid phases of the solution plasma system. The use of the solution plasma allows rapid fabrication of the metal nanoparticles without being necessary the addition of different reducing agents, because plasma in the liquid phase provides a reaction field with a highly excited energy radicals. We successfully synthesized gold nanoparticles using a glow discharge in aqueous solution. Nanoparticles with an average size of less than 10 nm were obtained using chlorauric acid solutions as the metal source. Carbon/Pt hybrid nanostructures have been obtained by treating carbon balls, synthesized in a CVD chamber, with hexachloro- platinum acid in a solution plasma system. The solution plasma was successfully used to remove the template remained after the mesoporous silica synthesis. Surface functionalization of the carbon structures and the silica surface with different chemical groups and nanoparticles, was also performed by processing these materials in the liquid plasma.

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Diagnostic Studies of Plasmas in Saline Solutions: the Frequency Effects and the Electrode Erosion Mechanism

  • Hsu, Cheng-Che
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.16-16
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    • 2011
  • Plasmas in saline solutions receive considerable attention in recent years. How the operating parameters influence the plasma characteristics and how the electrode erosion occurs have been topics that require further study. In the first part of this talk, the effect of the frequency on the plasmas characteristics in saline solution driven by 50~1000 Hz AC power will be presented. Two distinct modes, namely bubble and jetting modes, are identified. The bubble mode occurs under low frequencies. In this mode, one mm-sized bubble is tightly attached to the electrode tip and oscillates with the applied voltage. With an increase in the frequency, it shows the jetting mode, in which many smaller bubbles are continuous formed and jetted away from the electrode surface. Multiple mechanisms that are potentially responsible to such a change in bubble dynamics have been proposed and the dominant mechanism is identified. From the Stark broadening of the hydrogen optical emission line, electron densities in both modes are estimated. It shows clearly that the driving frequency greatly influences the bubble dynamics, which in turn alters the plasma behavior. In the second part, the study of the erosion of a tungsten electrode immersed in saline solution under conditions suitable for bio-medical applications is presented. The electrode is immersed in 0.1 M saline solution and is positively or negatively biased using a DC power source up to 600 V. It is identified that when the electrode is positively biased, erosion by the surface electrolytic oxidation is the dominant mechanism with an applied voltage below 150 V. An increase in the applied voltage leads to the formation of the plasma and the damage by the plasma and the thermal effect becomes more prominent. The formation of the gas film at the electrode surface leads to the formation of the plasma and hinders the electrolytic erosion. In the negatively-biased electrode, no electrolytic oxidation is seen and the damage is mostly likely due to the plasma erosion and the thermal effect.

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Cell-Free miR-27a, a Potential Diagnostic and Prognostic Biomarker for Gastric Cancer

  • Park, Jong-Lyul;Kim, Mirang;Song, Kyu-Sang;Kim, Seon-Young;Kim, Yong Sung
    • Genomics & Informatics
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    • 제13권3호
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    • pp.70-75
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    • 2015
  • MicroRNAs (miRNAs) have been demonstrated to play an important role in carcinogenesis. Previous studies revealed that miRNAs are present in human plasma in a remarkably stable form that is protected from endogenous RNase activity. In this study, we measured the plasma expression levels of three miRNAs (miR-21, miR-27a, and miR-155) to investigate the usefulness of miRNAs for gastric cancer detection. We initially examined plasma miRNA expression levels in a screening cohort consisting of 15 patients with gastric cancer and 15 healthy controls from Korean population, using TaqMan quantitative real-time polymerase chain reaction. We observed that the expression level of miR-27a was significantly higher in patients with gastric cancer than in healthy controls, whereas the miR-21 and miR-155a expression levels were not significantly higher in the patients with gastric cancer. Therefore, we further validated the miR-27a expression level in 73 paired gastric cancer tissues and in a validation plasma cohort from 35 patients with gastric cancer and 35 healthy controls. In both the gastric cancer tissues and the validation plasma cohort, the miR-27a expression levels were significantly higher in patients with gastric cancer. Receiver-operator characteristic (ROC) analysis of the validation cohort, revealed an area under the ROC curve value of 0.70 with 75% sensitivity and 56% specificity in discriminating gastric cancer. Thus, the miR-27a expression level in plasma could be a useful biomarker for the diagnosis and/or prognosis of gastric cancer.

Elevated plasma α1-antichymotrypsin is a biomarker candidate for malaria patients

  • Young Yil, Bahk;Sang Bong, Lee;Jong Bo, Kim;Tong-Soo, Kim;Sung-Jong, Hong;Dong Min, Kim;Sungkeun, Lee
    • BMB Reports
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    • 제55권11호
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    • pp.571-576
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    • 2022
  • Advancements in the field of proteomics have provided opportunities to develop diagnostic and therapeutic strategies against various diseases. About half of the world's population remains at risk of malaria. Caused by protozoan parasites of the genus Plasmodium, malaria is one of the oldest and largest risk factors responsible for the global burden of infectious diseases with an estimated 3.2 billion persons at risk of infection. For epidemiological surveillance and appropriate treatment of individuals infected with Plasmodium spp., timely detection is critical. In this study, we used combinations of depletion of abundant plasma proteins, 2-dimensional gel electrophoresis (2-DE), image analysis, LC-MS/MS and western blot analysis on the plasma of healthy donors (100 individuals) and vivax and falciparum malaria patients (100 vivax malaria patients and 8 falciparum malaria patients). These analyses revealed that α1-antichymotrypsin (AACT) protein levels were elevated in vivax malaria patient plasma samples (mean fold-change ± standard error: 2.83 ± 0.11, based on band intensities), but not in plasma from patients with other mosquito-borne infectious diseases. The results of AACT immunoblot analyses showed that AACT protein was significantly elevated in vivax and falciparum malaria patient plasma samples (≥ 2-fold) compared to healthy control donor plasma samples, which has not been previously reported.

폐색전증의 진단에 있어 혈청 D-dimer 측정의 진단적 가치 (Plasma D-dimer Determination in the Diagnosis of Pulmonary Embolism)

  • 임채만;김홍규;최강현;이상도;고윤석;김우성;장재석;김동순;김원동
    • Tuberculosis and Respiratory Diseases
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    • 제43권1호
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    • pp.69-74
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    • 1996
  • 연구배경: 폐색전증의 진단에 있어 확전법인 폐동맥 조영술은 관혈적이고 임상에서의 제약이 있으며, 폐환기-관류주사는 비고확률 소견인 경우 진단적 민감도 및 특이도가 낮은 문제가 있다. 혈장 D-dimer는 섬유소분 해산물로 임상적으로 폐색전증이 의심되는 환자에서 증가되는 것이 알려져 있어 혈장 D-dimer의 측정이 폐색전증에 있어 어떤 진단적 가치가 있는지 알아보고자 하였다. 방법: 전향적 임상연구로 정상대조군 21예와 폐색전증 환자군 9예에서 latex agglutination법에 의해 혈장 D-dimer를 측정하고 폐동맥조영술 결과와 비교하였다. 결과: 1) 대조군 및 폐색전증군의 혈장 D-dimer치; 대조군의 혈장 D-dimer치는 21예중 0.5 mg/L 미만 11예, 0.5 mg/L 보다 높은 경우 10예 였고, 폐색전증군 9예중 0.5 mg/L 미만 1예, 0.5 mg/L 보다 8예로 혈장 D-dimer치가 0.5 mg/L 이상으로 증가된 양성율은 폐색전증군에서 대조군에 비해 유의하게 많았다(p=0.049). 2) 혈장 D-dimer치의 진단적 효용; 혈장 D-dimer치 0.5 mg/L를 cut-off으로 했을 때 폐색전증 진단의 민감도 88.9%(8/9), 특이도 52.4%(11/21), 양성예측치 44.4%(8/18) 및 음성 예측치 91.7%(11/12)였다. 결론: 폐색전증의 진단에 있어 D-dimer의 측정치가 cut-off(0.5 mg/L)치 이내인 경우 폐색전증의 존재 가능성은 매우 적을 것으로 사료되었다.

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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