• 마이크로전자및패키징학회지
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• 제11권4호
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• pp.29-35
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• 2004

암모니아 펄스플라즈마를 이용하여 $WF_6$ 가스와 $NH_3$ 가스를 교대로 흘려줌으로써 Si 기판위에 질화텅스텐 확산방지막을 증착하였다. $WF_6$ 가스는 Si과 반응하여 표면침식이 과도히 발생하였으나 암모니아 ($NH_3$)가스를 펄스 플라즈마를 인가하여 $WF_6$와 같이 사용하면 Si 표면을 질화처리 함으로써 표면침식을 막아주며 질화텅스텐 박막을 쉽게 증착할 수 있었다. 그 이유는 암모니아 가스의 분해를 통한 Si 기판의 흡착을 용이하게 하여 질화텅스텐 박막 증착이 가능하기 때문이다. 이러한 증착 미케니즘과 암모니아 펄스 플라즈마 효과에 대하여 조사하였다.

• 대한금속재료학회지
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• 제46권6호
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• pp.357-362
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• 2008

The 2-step low temperature plasma processes (the combined carburizing and post-nitriding) were carried out for improving both the surface hardness and corrosion resistance of AISI 316L stainless steel. The effects of processing time and temperature on the surface properties during nitriding step were investigated. The expanded austenite (${\gamma}_N$) was formed on all of the treated surface. The thickness of ${\gamma}_N$ was increased up to about $20{\mu}m$ and the thickness of entire hardened layer was determined to be about $40{\mu}m$. The surface hardness reached up to $1,200HV_{0.1}$ which is about 5 times higher than that of untreated sample ($250HV_{0.1}$). The thickness of ${\gamma}_N$ and concentration of N on the surface were increased with increasing processing time and temperature. The corrosion resistance in 2-step low temperature plasma processed austenitic stainless steels was enhanced more than that in the untreated austenitic stainless steels due to a high concentration of N on the surface.

• Journal of Advanced Marine Engineering and Technology
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• 제41권3호
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• pp.238-244
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• 2017

플라즈마 이온질화 기술은 특히 스테인리스강의 표면경도 향상을 통한 기계적 성질 개선을 위해 산업 전반에서 널리 사용되고 있다. 또한 저온처리가 가능할 뿐만 아니라 담금질 강, 가스 질화 또는 침탄에 비해 변형이 적으며, 높은 표면 경도와 부식 저항성을 향상시키는 이점이 있다. 많은 연구자들에 의해 $450^{\circ}C$ 이하의 온도에서 플라즈마 이온질화 처리 시 expanded austenite(S-상)에 의해 부식 저항성이 향상되는 것으로 나타났다. 이때 대부분의 실험은 HCl 또는 NaCl과 같은 염화물 용액에서 실시되었다. 그러나 전기화학적인 요인으로서 염화물 용액과 천연해수 사이에는 차이가 있다. 따라서 본 연구에서는 304 스테인리스강에 대하여 다양한 온도에서 플라즈마 이온질화 처리 후 천연해수 용액에서 전기화학적 특성 분석을 통해 결과적으로 내식성이 가장 우수한 최적의 플라즈마 이온질화 처리 온도 조건을 규명하였다.

• 한국표면공학회지
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• 제50권5호
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• pp.366-372
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• 2017

Plasma electrolytic oxidation(PEO) has attracted attention as a surface treatment which has high wear resistance and corrosion resistance. PEO is generally considered as cost-effective, environmentally friendly and superior in terms of coating performance. Most of studies about the PEO processes have been applied to light metals such as Al and Mg. Because the strength of Al and Mg is weaker than that of steel, there is a limit to the application. In this study, PEO process was used to form oxide coatings on Hot dipped aluminized(HDA) steel and the characteristics of the coating film according to the PEO current density were studied. The morphology was observed by SEM and component was analyzed by using EDS. The corrosion behaviors of PEO coating films were estimated by exposing salt spray test at 5 wt.% NaCl solution and measuring polarization curves in deaerated 3 wt.% NaCl solution. With the increase of PEO process current density, the pore size of the coating surface and the thickness of coating increased. It was confirmed that no Fe component was present on the coating surface. PEO coating films obviously showed good corrosion resistance compared with HDA. It is considered that the PEO coating acts as a barrier to protect the base material from external factors causing corrosion.

• Corrosion Science and Technology
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• 제18권5호
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• pp.212-219
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• 2019

This paper reviews recent approaches to develop composite polymer-containing coatings by plasma electrolytic oxidation (PEO) using various low-molecular fractions of superdispersed polytetrafluoroethylene (SPTFE). The features of the unique approaches to form the composite polymer-containing coating on the surface of MA8 magnesium alloy were summarized. Improvement in the corrosion and tribological behavior of the polymer-containing coating can be attributed to the morphology and insulating properties of the surface layers and solid lubrication effect of the SPTFE particles. Such multifunctional coatings have high corrosion resistance ($R_p=3.0{\times}10^7{\Omega}cm^2$) and low friction coefficient (0.13) under dry wear conditions. The effect of dispersity and ${\xi}$-potential of the nanoscale materials ($ZrO_2$ and $SiO_2$) used as electrolyte components for the plasma electrolytic oxidation on the composition and properties of the coatings was investigated. Improvement in the protective properties of the coatings with the incorporated nanoparticles was explained by the greater thickness of the protective layer, relatively low porosity, and the presence of narrow non-through pores. The impedance modulus measured at low frequency for the zirconia-containing layer (${\mid}Z{\mid}_{f=0.01Hz}=1.8{\times}10^6{\Omega}{\cdot}cm^2$) was more than one order of magnitude higher than that of the PEO-coating formed in the nanoparticles-free electrolyte (${\mid}Z{\mid}_{f=0.01Hz}=5.4{\times}10^4{\Omega}{\cdot}cm^2$).

• 한국재료학회지
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• 제26권8호
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• pp.438-443
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• 2016

We developed an Al sputtering process by varying the plasma power, process temperature, and film thickness. We observed an increase of hillock distribution and average diameter with increasing plasma power, process temperature, and film thickness. Since the roughness of a film increases with the increase of the distribution and average size of hillocks, the control of hillock formation is a key factor in the reduction of Al corrosion. We observed the lowest hillock formation at 30 W and $100^{\circ}C$. This growth characteristic of sputtered Al thin films will be useful for the reduction of Al corrosion in the future of the electronic packaging field.

• 한국생산제조학회지
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• 제22권6호
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• pp.895-900
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• 2013

Several plasma spray and metallurgical surface coatings such as $Al_2O_3$, $Cr_2O_3$, WC-Ni, and chromizing coating have been examined for their application in environments with high temperature, wear, and corrosion. The chromizing coating is different from others coatings in the manufacturing process the surface. These coatings' characteristics were tested experimentally, and the results were compared. WC-Ni shows good performance against thermal barrier, wear, and corrosion and is one of the best candidates for the environment considered herein. These coatings were studied for their application in the steel manufacturing industry. The most commonly required functions in this industry are thermal and wear resistance.

• 한국재료학회지
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• 제17권12호
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• pp.648-653
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• 2007

Plasma electrolytic oxidation (PEO) treatment was performed on cast Mg-6 wt%Al alloy solution-treated at 693K for 16h and aged at 498K. The surface roughness, thickness, micro-hardness, wear and corrosion properties of coatings on solution-treated and aged Mg-6 wt%Al alloy were investigated. The coatings on aged Mg-6 wt%Al alloy had thinner layer and lower micro-hardness and wear resistance than the solution-treated Mg-6 wt%Al alloy. As the aging time increased, the thickness of coatings decreased while the surface roughness was almost no changed. In addition, the micro-hardness and wear property of coatings decreased with increasing the aging time unlike the uncoated Mg-6 wt%Al alloy showing the peak micro-hardness and the best wear property after aging for 16 h. However, the coatings on Mg-6 wt%Al alloy peak-aged for 16h revealed the best corrosion resistance in 3.5% NaCl solution, which was explained based on the microstructural characteristics.

• 소성∙가공
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• 제18권8호
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• pp.625-632
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• 2009

The influence of the subsequent-annealing(SA) temperature on the plasma electrolytic oxidation(PEO)-treated Mgbased alloy was investigated in terms of surface properties associated with hardness and corrosion. For this purpose, a series of the SA treatments were performed on the PEO-treated samples at four different temperatures, i.e., 100, 150, 200, and $250^{\circ}C$ for 10 hrs. When compared to the sample without SA, the samples annealed at temperatures higher than $200^{\circ}C$ showed a difference in surface morphology due to the volume expansion accompanied by the dehydration reaction where the part of $Mg(OH)_2$ changed into MgO, working as harder phase. From the results of nano-indentation tests, the applied loads of the samples were seen to increase with increasing SA temperatures. However, the electro-chemical and corrosion properties of the sample annealed at $150^{\circ}C$ were higher than those of the samples annealed at three temperatures.

• 한국표면공학회지
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• 제47권4호
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• pp.147-154
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• 2014

Formation behavior of PEO (Plasma Electrolytic Oxidation) films on AZ31 Mg alloy was studied in aqueous solutions containing various concentrations of hydroxide ion ($OH^-$) and silicate ion ($SiO_3{^{2-}}$) by voltage-time curves, and corrosion resistance of the PEO film-covered specimen was investigated by immersion test in 0.5 M NaCl solution. From the analyses of the voltage-time curves, it is suggested that two different types of anions are essentially needed for the formation of PEO films on AZ31 Mg alloy: film formation agent and local film breakdown agent. $SiO_3{^{2-}}$ ion acts only as a film formation agent but $OH^-$ ion acts not only as a film formation agent but also film breakdown agent. The PEO films prepared on AZ31 Mg alloy in alkaline silicate solution showed very good corrosion resistance without any pitting or filiform corrosions up to 480 h of immersion in 0.5 M NaCl.