• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.145-146
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• 2006

A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally, O2 plasma etching is performed to transfer the line patterns having 100 nm line width, 100 nm line space and 70 nm line depth on F-DLC. The optimum fluorine concentration was determined after performing several pre-experiments. The stamp was applied successfully to UV-NIL without being coated with an anti-adhesion layer.

• 한국자동차공학회논문집
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• 제8권5호
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• pp.67-77
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• 2000

Investigated was the effect of propene(C3H6) on the NO-NO2 conversion in dry exhaust gases from lean burn engine using a pulsed corona discharge. A kinetic model was developed to characterize the plasma chemistry in simulated exhausts containing propene. The model uses ELENDIF program to solve Boltzmann equation for electron energy distribution function, and CHEMKIN-II program to solve stiff ODE(ordinary differential equation) problems for species concentrations. The corona discharge energy per pulse and the time-space averaged E/N were obtained by fitting the model to experimental data. The model calculation shows good agreement for NO and NO2 concentrations with the experimental data, and predicts the formation of byproducts such as CH2O, CH3HCO, CO AND CH3NO2 Propene enhances the NOx conversion enormously at lower energy density and the NOx conversion increases with the increase of initial propene and oxygen concentration, and temperature.

• 천문학회보
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• 제36권2호
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• pp.87.1-87.1
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• 2011

Since early 90's, the solar X-ray telescopes such as Yohkoh SXT and Hinode XRT have observed coronal magnetic structures on the Sun's surface in the range of about $40'{\times}40'$ field-of-view (FOV) covering the full solar disk. Thus it has been stressed by the scientists that the optical structure of solar telescopes should be designed with care for improving the uniformity over a wide FOV. There would be, however, no unique solution in designing the optical system of a telescope for overcoming perfectly the problem of off-axis response variation. As a consequence, the correction of optical imperfectness of telescopes has become an important calibration step that should be performed beforehand when the observed images are to be used for photometric purposes. In particular, a special care should be taken when performing the temperature analysis with thin and thick filters for flaring activities observed at the periphery of the full FOV. From the analyses of both pre-launch calibration and in-flight observation data, the optical characteristics for describing the performance of solar X-ray telescopes, especially in view of their energy dependence, will be introduced and discussed in our presentation.

• 천문학회보
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• 제38권1호
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• pp.64.1-64.1
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• 2013

The point spread function (PSF) of an optical system is in general defined as a two-dimensional intensity distribution which results from a single point source at infinity. It is an important key for the evaluation of the optical performance of an astronomical telescope. The PSFs of the soft X-ray telescope (SXT) aboard Yohkoh were measured in a wide range of the field-of-view under the in-flight configuration at White Sands Missile Range prior to launching the satellite. It has been known that the SXT PSF has a sharp peak at the core and the intensity drops very fast as it goes distant from the center. Due to the combination of this sharp peak at the PSF core and the effect of undersampling by a large pixel size, a carefully designed method is requested in the examination of the PSF data. The pattern of the SXT PSF is determined by the fitting of a mathematical functional form to the pre-launch experimental data. The elliptical Moffat function has been adopted for the evaluation of the SXT PSF. It is revealed from our study that the SXT PSF shows a peculiar characteristics, and thus a careful consideration on the undersampling effect and also a proper choice of statistics are necessary for the determination of the best fit function of the PSF. Details on the on- and off-axis SXT PSF in the field-of-view will be introduced and discussed in our presentation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.582-588
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• 1999

정보화 사회의 발전과 함께 멀티미디어에 대한 관심이 집중되고 있으며, 점유 공간이 작고 가벼우며 대면적이 가능한 정보 표시 디스플레이에 대한 기술은 고부가가치 산업으로 인식되어 지고 있다. 이러한 정보 표시 디스플레이들 중, 전기 발광 소자 (Electroluminescence Display : ELD), 액정 표시 디스플레이 (Liquid Crystal Display LCD), 플라즈마 디스플레이 (Plasma Display Panel) 등의 대한 연구가 세계적으로 매우 활발하게 진행되고 있다. 본 연구에서는 란탄 계열의 금속 착 화합물인 Tb(ACAC)$_3$(Phen)과 Tb(ACAC)$_3$(Phen-Cl)를 이용해 다비이스를 제작한후 광학적 및 전기적 특성을 조사하였다. 또한 luminous efficiency와 cyclic voltametric 방법을 이용해 에너지 밴드로 두 발광 물질인 Tb(ACAC)$_3$(Phen)과 Tb(ACAC)$_3$(Phen-Cl)을 비교.분석하였다. 본 연구의 디바이스 구조를 보면 anode/hole transporting layer (HTL)/emitting material layer (EML)/electron transporting layer (ETL)/cathode와 같고 ETL를 aluminum-tris- (8-hydroxyquinoline) (Alq$_3$)와 bis(10-hydroxybenzo(h)quinolinato)beryllium (Bebq$_2$)를 사용하였으며 HTL 로 N,N'-diphenyl-N,N'-bis(3-methylphenyl)-1,1'-biphenyl-4,4'-diamine (TPD)를 사용하였다.

• 천문학회보
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• 제37권2호
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• pp.134.2-134.2
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• 2012

Discrete auroras, with unique shapes embedded in diffuse auroras, are generally associated with precipitating electrons that originate from the plasma sheet and are accelerated on the way as they travel to polar regions along the field lines. Two acceleration mechanisms have been proposed: quasi-static electric fields and dispersive Alfven waves, which are believed to yield monoenergetic peaks and broadband features in the particle spectra, respectively. Hence, it should be interesting to see how the two different mechanisms, through their characteristic spectra of the accelerated electrons, produce distinct auroral images and spectra, especially in the far ultraviolet (FUV) wavelengths as the long and short Lyman-Birge-Hopfield (LBH) bands exist as well as the strong absorption band of molecular oxygen in the FUV band. In fact, we have previously shown, using the simultaneous observations of precipitating electrons and the corresponding FUV spectra, that the discrete auroras associated with inverted-V events have a stronger relative intensity of the long LBH to the short LBH compared to diffuse auroras, especially when the peak energy is above a few keV. In this paper, we would like to focus on the differences in the FUV images and spectra between the two discrete auroras of the monoenergetic and broadband cases, again based on the study using the dataset of simultaneous observations of particles and FUV spectral images.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1408-1409
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• 2007

In this paper, we developed a hybrid simulation model of carbon laser ablation under the Ar plasmas consisted of fluid and particle methods. Three kinds of carbon particles, which are carbon atom, ion and electron emitted by laser ablation, are considered in the computation. In the present modeling, we adopt capacitively coupled plasma with ring electrode inserted in the space between the substrate and the target, graphite. This system may take an advantage of ${\mu}m$-sized droplets from the sheath electric field near the substrate. As a result, in Ar plasmas, carbon ion motions were suppressed by a strong electric field and were captured in Ar plasmas. Therefore, a low number density of carbon ions were deposited upon substrate. In addition, the plume motions in Ar gas atmosphere was also discussed.

• 한국군사과학기술학회지
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• 제7권1호
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• pp.34-46
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• 2004

Copper films were prepared by using ECR-MOCVD(Electron Cyclotron Resonance Metal Organic Chemical Vapor Deposition) coupled with a DC bias system. The DC bias is connected to the electrode which placed 1∼3cm above the polymer substrate. The pulse electrical field around the electrode attracts the positive charged copper ions generated from the dissociation of copper precursor, $Cu(hfac)_2$, under ECR plasma. Condensation of supersaturated copper ions in the space between the electrode and substrate, makes it possible to deposit copper film on the polymer substrate even at room temperature. In this study, optimization of the electrode configuration was carried out in order to obtain the uniform films. The uniformity of the deposited films were closely related to the parameters of electrode geometry such as electrode shape, thickness, grid size and the spacing between electrodes. The most uniform copper film was observed with the electrode that enabled uniform electrical field distribution across the whole dimension of electrode.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.300-303
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• 2004

To fill the gap of films for metal-to-metal space High density plasma fluorinated silicate glass (HDP FSG) is used due to various advantages. However, FSG films can have critical drawbacks such as bonding issue of top metal at package, metal contamination, metal peel-off, and so on. These problems are generally caused by fluorine penetration out of FSG film. Hence, FSG capping layers such like SRO(Silicon Rich Oxide) are required to prevent flourine penetration. In this study, their characteristics and a capability to block fluorine penetration for various FSG capping layers are investigated through FTIR analysis. FTIR graphs of both SRO using ARC chamber and SiN show that clear Si-H bonds at $2175{\sim}2300cm^{-1}$. Thus, Si-H bond at $2175{\sim}2300cm^{-1}$ of FSG capping layers lays a key role to block fluorine penetration as well as dangling bond.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.314-314
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• 2010

The design of the blanket and shield play a key role in determining the size of a reactor since it has an impact on the various reactor components. The blanket should produce enough tritium for tritium self-sufficiency and the shield should provide sufficient protection for the superconducting TF coil. Neutronic optimization of the blanket and the shield is necessary, and we coupled the system analysis with a neutronic calculation to account for the interrelation of the blanket and shield with the plasma performance of a reactor system in a self-consistent manner. By using the coupled system analysis code, the operational space for a low aspect ratio (LAR) tokamak reactor with a superconducting toroidal field (TF) coil is investigated with an spect ratio in the range of 1.5 - 2.5. The minimum major radius which satisfies all the physics and engineering requirements increases with the magnetic field at the magnetic axis. A required inboard shield thickness is mainly determined by the requirement on the protection of the TF coil against radiation damage. It is shown that to have a fusion power bigger than 3,000 MW in the LAR tokamak with a superconducting TF coil, a major radius bigger than 4.0 m is required.