Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Modeling of the Laser Ablation under the RF Ar Plasmas

RF Ar 플라즈마에서의 레이저 어블레이션 모델링

  • So, Soon-Youl (Division of Advanced Materials and Electrical Engineering, Mokpo National University) ;
  • Lim, Jang-Seob (Division of Marine Electronic and Communication Engineering, Mokpo National Maritime University) ;
  • Lee, Jin (Division of Advanced Materials and Electrical Engineering, Mokpo National University) ;
  • Jung, Hae-Deok (Division of Advanced Materials and Electrical Engineering, Mokpo National University) ;
  • Park, Gye-Choon (Division of Advanced Materials and Electrical Engineering, Mokpo National University) ;
  • Moon, Chae-Joo (Division of Advanced Materials and Electrical Engineering, Mokpo National University)
  • 소순열 (목포대학교 전기제어신소재공학부) ;
  • 임장섭 (목포해양대학교 해양전자통신공학부) ;
  • 이진 (목포대학교 전기제어신소재공학부) ;
  • 정해덕 (목포대학교 전기제어신소재공학부) ;
  • 박계춘 (목포대학교 전기제어신소재공학부) ;
  • 문채주 (목포대학교 전기제어신소재공학부)
  • Published : 2007.07.18
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Abstract

In this paper, we developed a hybrid simulation model of carbon laser ablation under the Ar plasmas consisted of fluid and particle methods. Three kinds of carbon particles, which are carbon atom, ion and electron emitted by laser ablation, are considered in the computation. In the present modeling, we adopt capacitively coupled plasma with ring electrode inserted in the space between the substrate and the target, graphite. This system may take an advantage of ${\mu}m$-sized droplets from the sheath electric field near the substrate. As a result, in Ar plasmas, carbon ion motions were suppressed by a strong electric field and were captured in Ar plasmas. Therefore, a low number density of carbon ions were deposited upon substrate. In addition, the plume motions in Ar gas atmosphere was also discussed.

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