• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.98-99
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• 2012

Deposition of thin films using magnetron sputtering plasmas is a well-developed, classical technology. However, detailed investigations using advanced diagnostics are insufficient in magnetron sputtering, in comparison with plasma-aided dry etching and plasma-enhanced chemical vapor deposition. In this talk, we will show examples of diagnostic works on magnetron sputtering employing metal targets. Diagnostic methods which have fine spatial resolutions are suitable for magnetron sputtering plasmas since they have significant spatial distributions. We are using two-dimensional laser-induced fluorescence spectroscopy, in which the plasma space is illuminated by a tunable laser beam with a planer shape. A charge-coupled device camera with a gated image intensifier is used for taking the picture of the image of laser-induced fluorescence formed on the planer laser beam. The picture of laser-induced fluorescence directly represents the two-dimensional distribution of the atom density probed by the tunable laser beam, when an intense laser with a relatively wide line-width is used. When a weak laser beam with a relatively narrow linewidth is used, the laser-induced fluorescence represents the density distribution of atoms which feel the laser wavelength to be resonant via the Doppler shift corresponding to their velocities. In this case, we can obtain the velocity distribution function of atoms by scanning the wavelength of the laser beam around the line center.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12S
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• pp.1248-1254
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• 2003

Carbon nanotubes(CNTs) are grown by using Co catalyst metal. CNTs fabricated by PECVD(plasma enhanced chemical vapor deposition) method are studied in terms of surface reaction and surface structure by TEM and Raman analysing method and ate analysed in its electrical field emission characteristics with variation of space between anode and cathode. Acetylene(C$_2$H$_2$) gas is used as the carbon source, while ammonia and hydrogen gas are used as catalyst and dilution gas. The CNTs grown by hydrogen(H$_2$) gas plasma indicates better vortical alignment, lower temperature process, and longer tip, compared to that grown by ammonia(NH$_3$) gas plasma. The CNTs fabricated with Co(cobalt) catalyst metal and PECVD method show the multiwall structure in mid-circle type in tip-end and the inner vacancy of 10nm. Emission properties of CNTs indicate the turn-on field to be 2.6 V/${\mu}{\textrm}{m}$ We suggest that CNTs can be possibly applied to the emitter tip of FEDs and high brightness flat lamp because of low temperature CNTs growth, low turn-on field.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.285-288
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• 2004

Recently, the RF inductive discharge or inductively coupled plasma(ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology. To the point of lighting sources, the electrodeless fluorescent lamps utilizing an inductively coupled plasma(ICP) have been objects of interest and research during the last decades, mainly because of their potential for extremely long life, high lamp efficacies, rapid power switching response. The electrodeless fluorescent lamp that is dealt with in this work comprises a bulb filled with rare gas and amalgam of vaporizable metal and has a coil provided with a winding around the ferrite. Current through a coil produces a magnetic field in the discharge space The changing magnetic flux then produces an azimuthal electric field E around the coil, according to Faraday's laws of magnetic induction.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.71-75
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• 2003

Carbon nanotubes(CNTs) are grown by using Co catalyst metal. CNTs fabricated by PECVD(plasma enhanced chemical vapor deposition) method are studied in terms of surface reaction and surface structure by TEM and Raman analysing method and are analysed in its electrical field emission characteristics with variation of space between anode and cathode. Acetylene($C_2H_2$) gas is used as the carbon source, while ammonia and hydrogen gas are used as catalyst and dilution gas. The CNTs grown by hydrogen($H_2$) gas plasma indicates better vertical alignment, lower temperature process and longer tip, compared to that grown by ammonia($NH_3$) gas plasma. The CNTs fabricated with Co(cobalt) catalyst metal and PECVD method show the multiwall structure in mid-circle type in tip-end and the inner vacancy of 10nm. Emission properties of CNTs indicate the turn-on field to be $2.6\;V/{\mu}m$. We suggest that CNTs can be possibly applied to the emitter tip of FEDs and high brightness flat lamp because of low temperature CNTs growth, low turn-on field.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.4
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• pp.316-329
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• 2012

In this paper, optimum design process of ICP (Inductively Coupled Plasma) torch, which has been used widely in aerospace application, such as supersonic plasma wind tunnel, is presented. For this purpose, the behaviors of equivalent circuit parameters (equivalent resistance and inductance, coupling efficiency) were investigated according to the variations of torch design parameters (frequency, $f$, confinement tube radius, $R$ and coil turn numbers, $N$) in the basis of analytical and numerical MHD (Magneto Hydro-Dynamics) models combined with electrical circuit theory. From the results, it is found that equivalent resistance is increased with the increase of $f$ values but vice versa for equivalent inductance. For elevated values of $R$ and $N$, however, both parameters tend to increase. Based on these observations, ICP torch with a power level of 10 kW can be optimized at the design ranges of $f$=4~6 MHz, $R$=17~25 mm and $N$=3~4 to maximize the electrical coupling efficiency, which is the ratio of equivalent resistance to equivalent inductance.

• Bulletin of the Korean Space Science Society
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• 2003.10a
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• pp.33-33
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• 2003

A clear bipolar (negative/positive) signature in the Ey component was observed by the Cluster satellite in the magnetotail during a sudden impulse (si) on October 11, 2001 (day 284). During the interval of the negative perturbation in Ey, the magnetic field strength in Bx, a dominant magnetic field component, was nearly constant. However, the amplitude of Bx was strongly enhanced during the positive Ey perturbation. We suggest that the observed E and B field variations are due to outward/inward plasma motions, associated with expanded and then compressed magnetopause variations. We also observed quasi-periodic geomagnetic perturbations in the Pc5 band (∼1-6 mHz) at the low-latitude ground station Kakioka (L = 1.25) following the si event. They were highly correlated with the magnetic field perturbations at Cluster in the magnetotail (Xgse = ∼12 Re). We show that the source of these perturbations is the quasi-periodic solar wind pressure variations moving tailward.

• Journal of Astronomy and Space Sciences
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• v.32 no.3
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• pp.167-180
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• 2015

Herein, we discuss the in situ measurement of the electron temperature in the ionosphere/plasmasphere by means of DC Langmuir probes. Major instruments which have been reported are a conventional DC Langmuir probe, whose probe voltage is swept; a pulsed probe, which uses pulsed bias voltage; a rectification probe, which uses sinusoidal signal; and a resonance cone probe, which uses radio wave propagation. The content reviews past observations made with the instruments above. We also discuss technical factors that should be taken into account for reliable measurement, such as problems related to the contamination of electrodes and the satellite surface. Finally, we discuss research topics to be studied in the near future.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.131.1-131.1
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• 2012

We use three-dimensional magnetohydrodynamic (MHD) simulations of flux emergence from solar subsurface to corona. In our previous work, we reported the relation between magnetic-field configuration and the flux expansion factor. Following these results, we investigate where an upflow is generated in an active region and how its location is related to the flux expansion factor. We also derive physical quantities of a real active region from observation data provided by Nobeyama Radioheliograph (NoRH), X-Ray Telescope (XRT), and Extreme Ultraviolet Imaging Spectrometer (EIS) onboard Hinode. These physical quantities are plasma density, temperature and flow. By comparing the simulation result and observational one, we will discuss the properties of the location producing a solar wind.

• The Bulletin of The Korean Astronomical Society
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• v.44 no.2
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• pp.70.1-70.1
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• 2019

Multiple-harmonic electron cyclotron emissions, often known in the literature as the (n + 1∕2)fce emissions, are a common occurrence in the magnetosphere. These emissions are often interpreted in terms of the Bernstein mode instability driven by the electron loss cone velocity distribution function. Alternatively, they can be interpreted as quasi-thermal emission of electrostatic fluctuations in magnetized plasmas. The present paper carries out a one-dimensional relativistic electromagnetic particle-in-cell simulation and also employs a reduced quasi-linear kinetic theoretical analysis in order to compare against the simulation. It is found that the Bernstein mode instability is indeed excited by the loss cone distribution of electrons, but the saturation level of the electrostatic mode is quite low, and that the effects of instability on the electrons is rather minimal. This supports the interpretation of multiple-harmonic emission in the context of the spontaneous emission and reabsorption in quasi-thermal magnetized plasma in the magnetosphere.

• Publications of The Korean Astronomical Society
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• v.15 no.spc2
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• pp.45-52
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• 2000

Four plasma instruments are currently under development for KAISTSAT-4 (K-4) which is scheduled for launch in 2002. They are the Solid-State Telescope, Electro-Static Analyzer, Langmuir Probe, and the Scientific Magnetometer, that will respectively allow in-situ detection of high energy and low energy components of auroral particles, ionospheric thermal electrons, and magnetic field disturbances. These instruments, together with the Far-ultraviolet IMaging Spectrograph, will provide micro-scale physics of Earth's polar ionosphere with detailed spectral information that has not been previously achieved with other space missions. In this paper, we review the concept of the four space plasma instruments as well as the anticipated results from the instruments.