• Korean Journal of Metals and Materials
• /
• v.49 no.4
• /
• pp.334-341
• /
• 2011

The mechanism behind super-filling of high-aspect-ratio features with Cu by catalyst-enhanced chemical vapor deposition (CECVD) coupled with plasma treatment is described and the metrology required to predict the filling feasibility is identified and quantified. The reaction probability of a Cu precursor was determined as a function of substrate temperature. Iodine adatoms are deactivated by the bombardment of energetic particles and also by the overdeposition of sputtered Cu atoms during the plasma treatment. The degree of deactivation of adsorbed iodine was experimentally quantified. The quantified factors, reaction probability and degree of deactivation of iodine were introduced to the simulation for the prediction of the trench filling aspect by CECVD coupled with plasma treatment. Simulated results show excellent agreement with the experimental filling aspects.

• The Transactions of the Korean Institute of Electrical Engineers P
• /
• v.58 no.4
• /
• pp.516-520
• /
• 2009

Atmosphere Plasmas of Gas Discharge (APGD) have been used in plasma sources for material processing such as etching, deposition, surface modification, etc. This study is to investigate and understand the fundamental plasma discharge properties. Especially, $SF_6/N_2$ mixed gas would be used in power transformer, GIS (Gas insulated switchgear) and so on. In this paper, we developed a one dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). 38 kinds of $SF_6/N_2$ plasma particles which are an electron, two positive ions (${SF_5}^+$, ${N_2}^+$), five negative ions (${SF_6}^-$, ${SF_5}^-$, ${SF_4}^-$, ${F_2}^-$, ${F_1}^-$), thirty excitation and vibrational particles for $N_2$ were considered in this computation. The $N_2$ gases of 20%, 50%, 80% were mixed in $SF_6$ gas. As the amount of $N_2$ gas was increased, the properties of electro-negative plasma moved toward the electro-positive plasma.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.65 no.12
• /
• pp.1992-1999
• /
• 2016

The plasma process is applied to various industrial fields such as high-tech IT industry, textiles and medical. Therefore, there is increasing interest in the plasma power supply, and demand for power devices of high efficiency and high power density is increased. Plasma power supply for process must solve the arc problem, when the plasma is unstable. The output capacitor is closely related to the arc problem. If the output capacitor is smaller, the damage from the arc problem is reduced. However, the small value of the output capacitor affects the operating characteristics of the power supply. In this paper, a LLC resonant converter is adopted, because it can achieve high efficiency and power density in the plasma DC power supply. However, due to the small value of the output capacitor, the converter is operated as a LLCC resonant converter. Therefore, a gain characteristic of LLCC resonant converter is analyzed by using the FHA (First Harmonic Approximation) in plasma power supply. Simulation and experimental results are presented to verify the characteristic analysis of LLCC Resonant Converter.

• Journal of Astronomy and Space Sciences
• /
• v.11 no.2
• /
• pp.250-272
• /
• 1994

Various plasma instabilities driven by the ion beams have been proposed in order to explain the broadband electrostatic noise (BEN) in the earth's geomagnetic tail. Ion acoustic, ion-ion two stream, and electron acoustic instabilities have been proposed. Here we consider a theoretical investigation of the generation of BEN by cold streaming ion beams in the earth's magnetotail. Linear theory analysis and particle simulation studies for the plasma sheet, which consists of warm electrons and ions as well as cold streaming ion beams, have been done. Both beam-ion acoustic and ion-ion two stream instabilities easily occur when the beam and warm electron temperature ratio, $T_b/T_e$ is small enough. The numerical simulation results confirm the existence of broadband electrostatic noise whose frequency is ranged from $\omega$=0 to $\omega$$\omega_{pe}$.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.48 no.6
• /
• pp.483-488
• /
• 1999

The optimal mixing condition of four components gas(Ne,Xe,He,Ar) in PDPs was caculated by a numerical simulation method. The dominated reactions in which $Xe^*(^3P_1)$ is produced and decays were investigated in three components gas (Ne,Xe,He) and our new components gas (Ne,Xe,He,Ar). A peak point of $Xe^*$ density appears in the range of 0.1% to 2% of Ar mixture ratio. The results of simulation show that the direct exitation of Xe by electrons has the greatest influence on the inceasing $Xe^*$ density in both gas mixtures.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.13 no.6
• /
• pp.576-580
• /
• 2013

We investigate the enhanced effects of asymmetry ratio variations of the source and drain area in silicon (Si) field-effect transistor (FET). Photoresponse according to the variation of asymmetry difference between the width of source and drain are obtained by using the plasmonic terahertz (THz) wave detector simulation based on technology computer-aided design (TCAD) with the quasi-plasma 2DEG model. The simulation results demonstrate the potential of Si FETs with asymmetric source and drain structures as the promising plasmonic THz detectors.

• Journal of the Semiconductor & Display Technology
• /
• v.11 no.1
• /
• pp.67-71
• /
• 2012

The optical properties of PDP, such as the transmittance and reflectance, were analyzed with 3D optical code. Three different ITO-less structures in the front panel are examined. In the assembled panel study, the test 1 structure shows 16.6% and 10.2% higher reflectance than the structures of tests 2 and 3, respectively. In order to check the validation of the simulation result, three 7.5-inch test panels having the same geometry and property are fabricated as simulation models. The calculated reflective properties are compared to the measured data from real panels. The relative difference extracted from the simulation and measurement methods is less than 4.9% and are well matched.

• Bulletin of the Korean Space Science Society
• /
• 2009.10a
• /
• pp.43.4-44
• /
• 2009

electron, ion, heavy ion으로 구성 된 plasma에서 hump type과 kink type(double layer)의 electrostatic solitary waves이 존재할 수 있다는 것을 pseudopotential method를 이용한 결과와 1d PIC(Particle-In-Cell) simulation method의 결과에서 각각 확인하였다. 1d PIC simulation에서 초기에 각각의 입자 종(species; electron, ion, heavy ion)의 밀도섭동(density perturbation)은 Gaussian 형태로 주었으며, 각각의 입자들의 drift velocity는 각각의 plasma 입자 종들의 thermal velocity로 나란한 방향으로 주었다.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2004.08a
• /
• pp.529-532
• /
• 2004

The spatio-temporal variation of Infra Red(IR) emission images were obtained from a real 3-dimensional discharge space of a surface discharge type, alternating current plasma display panel(AC PDP) cell with the Ne-Xe(4%) 400Torr gas mixture. IR emissions were observed in each period of the ADS(Address and Display Separation) driving scheme with ramp initializing waveform using an images intensified charge coupled device(ICCD) camera. The roles of each electrode were identified and it was compared with the results of the discharge simulation and of the wall charge distributions measured by the electro-optic technique.

• Proceedings of the KIEE Conference
• /
• 1991.11a
• /
• pp.419-422
• /
• 1991

A mathematical model was developed to predict the temperature, the density, and the velocity distribution of an inductively coupled thermal plasma. It was for an atmospheric pressure argon thermal plasma generated by a 4 MHz radio frequency power. It has been shown that the hottest region can be moved toward centrial region by applying an external magnetic field. Based on the results of the simulation. an ICP(Inductively Coupled thermal Plasma) system was constructed and thermal plasma was generated.