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The Analysis of $SF_6/N_2$ Plasma Properties Under the Atmosphere Pressure  

So, Soon-Youl (목포대학교 공대 전기공학과)
Lee, Jin (목포대학교 공대 전기공학과)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers P / v.58, no.4, 2009 , pp. 516-520 More about this Journal
Abstract
Atmosphere Plasmas of Gas Discharge (APGD) have been used in plasma sources for material processing such as etching, deposition, surface modification, etc. This study is to investigate and understand the fundamental plasma discharge properties. Especially, $SF_6/N_2$ mixed gas would be used in power transformer, GIS (Gas insulated switchgear) and so on. In this paper, we developed a one dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). 38 kinds of $SF_6/N_2$ plasma particles which are an electron, two positive ions (${SF_5}^+$, ${N_2}^+$), five negative ions (${SF_6}^-$, ${SF_5}^-$, ${SF_4}^-$, ${F_2}^-$, ${F_1}^-$), thirty excitation and vibrational particles for $N_2$ were considered in this computation. The $N_2$ gases of 20%, 50%, 80% were mixed in $SF_6$ gas. As the amount of $N_2$ gas was increased, the properties of electro-negative plasma moved toward the electro-positive plasma.
Keywords
Atmosphere Pressure; $SF_6/N_2$ Plasmas; Fluid Model; Plasma Properties; Mixture Gas;
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