• 제목/요약/키워드: Plasma Shield Effect

검색결과 7건 처리시간 0.03초

API강재의 파이버레이저 용접시 유기하는 플라즈마의 방사특성 (III) - 보호가스가 플라즈마 방사 신호에 미치는 영향 - (Characteristics of Plasma Emission Signals in Fiber Laser Welding of API Steel (III) -The Effect on Plasma Emission Signals by Shield Gas-)

  • 이창제;김종도;김유찬
    • Journal of Welding and Joining
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    • 제31권3호
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    • pp.60-65
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    • 2013
  • Ar, $N_2$, and He are the conventional kind of shield gas that are used for laser welding. Many researches on the impact of laser welding shield gas have been done, and it is on going until now. However, there are few studies that analyze the changes and differences of the plasma emission signal. Therefore, in this study, we evaluated the change in the penetration characteristics according to the type of shield gas during fiber laser welding impacts to the plasma signal. As a result, if was checked that the difference in molecular weight of Ar, $N_2$, and He affects to the amount of spatter, and also found that the measured plasma radiation signal changes similar to the order of the molecular weight of the gases. Especially, clear change on the signal intensity per each shield gas was measured through RMS, and found that the shield gas was nothing to do with the FFT analyzed result.

중·대형 디스플레이용 건식 식각(ICP Dry etcher) 설비의 플라스마 균일도 제어 기술 (Plasma Uniformity Control Technology for Dry Etching (ICP Dry etcher) Equipment for Medium and Large Displays)

  • 홍성재;전홍구;양호식
    • 반도체디스플레이기술학회지
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    • 제21권3호
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    • pp.125-129
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    • 2022
  • The current display technology tends to be highly integrated with high resolution, the element size is gradually downsized, and the structure becomes complicated. Inductively coupled plasma (ICP) dry etcher of various types of etching equipment is a structure that places a large multi-divisional antenna source on the top lid, passes current to the Antenna, and generates plasma using the induced magnetic field generated at this time. However, in the case of a device of a large area size, a support that can withstand a load structurally is necessary, and when these support portions are applied, arrangement of antenna becomes difficult, which causes reduction in uniformity. As described above, the development of antenna source of a large area having a uniform plasma density on the whole surface is difficult to restrict hardware (H/W). As a solution to this problem, we confirmed the change in uniformity of plasma by applying two kinds of specific shape faraday shield(FICP) to the lower part of the large area upper lid antenna of 6 and 8th more than that generation size. In this thesis, we verify the faraday shield effect which can improve plasma uniformity control of ICP dry etcher equipment applied to medium and large displays.

자동차용 강판의 겹치기 $CO_2$ 레이저 용접에서 발생되는 플라즈마 특성에 관한 연구 (Study on the characteristics of the plasma induced by lap-joint $CO_2$ laser welding of automotive steel sheets)

  • 남기중;박기영;이경돈
    • 한국레이저가공학회지
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    • 제5권1호
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    • pp.33-42
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    • 2002
  • In order to investigate the characteristics of the plasma induced by lap-joint CO$_2$ laser welding of automotive steel sheets, the effects of welding speed, shield gas flow rate, gap size, and laser beam defocus to plasma intensity emitted from keyhole have been investigated. The plasma light is measured by fiber and photodiode. Also, the plasma images were captured by the high speed digital camera in 1000frames/sec in order to correlate the plasma light signal with plasma pattern. From the results, it is observed that the difference of the plasma intensity for between the deep penetration and partial penetration exists from 1.2 to 2 times. The plasma light intensity decreased in case of the deep penetration Is observed due to the exhausting of the plasma gas under the sheet. On the other hand, under the conditions of the deep penetration, the plasma intensity is significantly increased by controling the conditions decreasing the penetration depth. It was specially founded that the effect of 0.3mm gap size at partial penetration condition is approximately similar to deep penetration in 0mm gap. It is concluded that the plasma intensity is able to evaluate the penetration depth in lap-joint welding and appears to offer the most straightforward correlation to the welding process.

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슈퍼듀플렉스 스테인리스강의 TIG 용접에서 질소 침투 모델에 관한 연구 (A study of model for nitrogen permeation in TIG welding of super duplex stainless steel)

  • 이재형;정병호;조상명;전재호
    • Journal of Welding and Joining
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    • 제33권3호
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    • pp.68-74
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    • 2015
  • Superduplex stainless steels are important materials to the oil and gas industry, especially for off-shore production. TIG welding of super duplex stainless steels to obtain the optimal phase balance between austenite and ferrite is mainly achieved by controlling the cooling rate and the weld chemistry. The latter depends on the filler wire chosen and the shielding gas used. If TIG welding of superduplex stainless steels is performed with argon shielding gas only, then nitrogen gets lost from the weld pool, which can result in a ferrite-rich weld metal, with an inferior corrosion resistance than parent metal. In the present study, nitrogen permeation model from the shield gas which gets into the weld metal in DCEN-TIG welding has suggested. This plasma stream model shows characteristics of permeation of nitrogen ions into the molten metal due to the strong physical effect of plasma stream which formed by the arc pressure rather than the permeation of nitrogen ions caused by electric effect.

고 출력 레이저에 의한 충격파 현상 연구 및 응용 (High Power Laser Driven Shock Compression of Metals and Its Innovative Applications)

  • 이현희;곽민철;최지혜;여재익
    • 대한기계학회논문집B
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    • 제32권11호
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    • pp.832-840
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    • 2008
  • Ablation occurs at irradiance beyond $10^9\;W/cm^2$ with nanosecond and short laser pulses focused onto any materials. Phenomenologically, the surface temperature is instantaneously heated past its vaporization temperature. Before the surface layer is able to vaporize, underlying material will reach its vaporization temperature. Temperature and pressure of the underlying material are raised beyond their critical values, causing the surface to explode. The pressure over the irradiated surface from the recoil of vaporized material can be as high as $10^5\;MPa$. The interaction of high power nanosecond laser with a thin metal in air has been investigated. The nanosecond pulse laser beam in atmosphere generates intensive explosions of the materials. The explosive ejection of materials make the surrounding gas compressed, which form a shock wave that travels at several thousand meters per second. To understand the laser ablation mechanism including the heating and ionization of the metal after lasing, the temporal evolution of shock waves is captured on an ICCD camera through laser flash shadowgraphy. The expansion of shock wave in atmosphere was found to agree with the Sedov's self-similar spherical blast wave solution.

Vertically Standing Graphene on Glass Substrate by PECVD

  • Ma, Yifei;Hwang, Wontae;Jang, Haegyu;Chae, Heeyeop
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.232.2-232.2
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    • 2014
  • Since its discovery in 2004, graphene, a sp2-hybridized 2-Dimension carbon material, has drawn enormous attention. A variety of approaches have been attempted, such as epitaxial growth from silicon carbide, chemical reduction of graphene oxide and CVD. Among these approaches, the CVD process takes great attention due to its guarantee of high quality and large scale with high yield on various transition metals. After synthesis of graphene on metal substrate, the subsequent transfer process is needed to transfer graphene onto various target substrates, such as bubbling transfer, renewable epoxy transfer and wet etching transfer. However, those transfer processes are hard to control and inevitably induce defects to graphene film. Especially for wet etching transfer, the metal substrate is totally etched away, which is horrendous resources wasting, time consuming, and unsuitable for industry production. Thus, our group develops one-step process to directly grow graphene on glass substrate in plasma enhanced chemical vapor deposition (PECVD). Copper foil is used as catalyst to enhance the growth of graphene, as well as a temperature shield to provide relatively low temperature to glass substrate. The effect of growth time is reported that longer growth time will provide lower sheet resistance and higher VSG flakes. The VSG with conductivity of $800{\Omega}/sq$ and thickness of 270 nm grown on glass substrate can be obtained under 12 min growing time. The morphology is clearly showed by SEM image and Raman spectra that VSG film is composed of base layer of amorphous carbon and vertically arranged graphene flakes.

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불소 바니쉬가 인공 우식 병소의 발생에 미치는 영향 (EFFECT OF FLUORIDE VARNISH ON DEVELOPMENT OF ARTIFICIAL CARIES)

  • 조난주;이상호;이난영
    • 대한소아치과학회지
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    • 제34권4호
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    • pp.613-622
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    • 2007
  • 본 연구의 목적은 법랑질 시편에 수종의 불소 제재를 도포한 후 우식 예방 효과를 광밀도 및 미세경도 측정을 통해 평가하는 것이다. 소의 절치를 이용하여 80개의 법랑질 시편을 제작하고 각 군당 20개씩, 네 군으로 나누었다. I군은 대조군으로서 아무런 처치도 하지 않았고 II군은 acidulated phosphate fluoride(APF) gel(60 seconds $taste^{(R)}$, PASCAL, USA)을 4분간 적용한 후 수세하였다. III군은 Fluor $Protector^{(R)}$(Ivoclar Vivadent, Liechtenstein)를, IV군은 $CavityShield^{TM}$(Omnii Pharmaceuticals, USA)를 1분간 도포하고 증류수에 보관한 뒤 24시간 후 부드러운 모를 가진 칫솔을 이용하여 칫솔질하였다. 각 시편을 인공우식용액에 48시간동안 침잠시켜 인공우식병소를 유발한 후 광밀도를 컴퓨터 영상분석 프로그램으로 분석하고 표면미세경도를 측정하여 다음의 결과를 얻었다. 1. 광밀도는 APF gel을 도포한 II군에 비해 불소 바니쉬를 도포한 III, IV군이 높았으나(p<0.05) III군과 IV군 사이의 유의한 차이는 없었다. 2. 표면미세경도는 IV군, III군, II군, I군의 순으로 높았다(p<0.05). 3. $CavityShield^{TM}$를 도포한 IV군과 Fluor $Protector^{(R)}$를 도포한 III군은 광밀도에서는 유의한 차이가 없었으나 표면 미세경도는 IV군이 III군보다 유의하게 높았다. 이상의 결과를 종합해 볼 때 불소 바니쉬가 APF gel에 비해 법랑질 탈회 억제 효과가 우수한 것으로 나타났다. 임상적용의 용이성과 안전성을 고려할 때 불소 바니쉬의 사용이 영유아나 장애인에게 유용할 것으로 사료된다.

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