• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.24 no.4
• /
• pp.290-296
• /
• 2011

Carbon nanotubes (CNTs) have excellent electrical, chemical stability, mechanical and thermal properties. In this paper, networks of Multi-walled carbon nanotube (MWCNT) materials were investigated as a resistive gas sensors for the $H_2$ gas detection. Sensor films were fabricated by the air spray method using the multi-walled CNTs dispersion solution on the glass substrates cured with plasma and nitrocellulose. Sensors were characterized by the resistance measurements in the self-fabricated oven in order to find the optimum detection properties for the hydrogen gas molecular. The sensitivity and the linearity of the MWVNT sensors using the glass substrate cured with plasma for the $H_2$ gas concentration of 0.06~0.6 ppm are 0.013~0.097%/sec and 0.131~0.959%FS, respectively. The MWCNT film was excellent in the response for the hydrogen gas moleculars and its reaction speed was very fast, which could be using as hydrogen gas sensor. The resistance of the fabricated sensors decreases when the sensors are exposed to $H_2$ gas.

• Proceedings of the KSME Conference
• /
• 2003.11a
• /
• pp.1506-1511
• /
• 2003

This paper describes an automatic weld seam tracking method of plasma arc welding system designed for the corrugation panel that consists of a linear section and a curved section with various curvatures. Due to the complexity of the panel shape, it is difficult to find a seam and operate a torch manually in the welding process. So, the laser vision sensor for seam tracking is designed for sensing the seam position and controlling a torch automatically. To achieve precise seam tracking, the design of sensor head, image simulation, and calibration are carried out. Through a series of experiment result, compensation algorithm is added and real time error compensation is achieved. The experiment result shows that this vision sensor works effectively. It will provide more precise welding performance and convenience to the operator.

• Transactions on Electrical and Electronic Materials
• /
• v.6 no.3
• /
• pp.87-90
• /
• 2005

$SiO_2$ via-hole etching with a high aspect ratio is a key process in fabricating ULSI devices; however, accumulated charge during plasma etching can cause etching stop, micro-loading effects, and charge build-up damage. To alleviate this concern, charge-up damage sensor was fabricated for the ultimate goal of real-time monitoring of accumulated charge. As an effort to reach the ultimate goal, fabricated sensor was used for electrical potential measurements of via holes between two poly-Si electrodes and roughly characterized under various plasma conditions using statistical design of experiment (DOE). The successful identification of potential difference under various plasma conditions not only supports the evidence of potential charge-up damage, but also leads the direction of future study.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.126-126
• /
• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• The Journal of Korea Robotics Society
• /
• v.11 no.3
• /
• pp.140-145
• /
• 2016

In this paper, we fabricate arrayed-type flexible capacitive touch sensor using liquid metal (LM) droplets (4 mm spatial resolution). Poly-4-vinylphenol (PVP) layer is used as a dielectric layer on the electrode patterned Polyethylene naphthalate (PEN) film. Bonding tests between hydroxyl group (-OH) on the PVP film and polydimethylsiloxane (PDMS) are conducted in a various $O_2$ plasma treatment conditions. Through the tests, we can confirm that non-$O_2$ plasma treated PVP layer and $O_2$ plasma treated PDMS can make a chemical bond. To measure dynamic range of the device, one-cell experiments are conducted and we confirmed that the fabricated device has a large dynamic range (~60 pF).

• Journal of Powder Materials
• /
• v.24 no.5
• /
• pp.351-356
• /
• 2017

Tin dioxide nanoparticles are prepared using a newly developed synthesis method of plasma-assisted electrolysis. A high voltage is applied to the tin metal plate to apply a high pressure and temperature to the synthesized oxide layer on the metal surface, producing nanoparticles in a low concentration of sulfuric acid. The particle size, morphology, and size distribution is controlled by the concentration of electrolytes and frequency of the power supply. The as-prepared powder of tin dioxide nanoparticles is used to fabricate a gas sensor to investigate the potential application. The particle-based gas sensor exhibits a short response and recovery time. There is sensitivity to the reduction gas for the gas flowing at rates of 50, 250, and 500 ppm of $H_2S$ gas.

• Proceedings of the KIEE Conference
• /
• 2006.04a
• /
• pp.102-104
• /
• 2006

Auto-Correlated time series (ATS) model was constructed by using the backpropagation neural network. The performance of ATS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 4%. By integrating ATS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• KSBB Journal
• /
• v.17 no.1
• /
• pp.59-62
• /
• 2002

The enzyme sensor for ATPase activity consisted of an immobilized membrane of two enzymes, purine nucloside phosphorylase (NP) and xanthine oxidase (XOD), and oxygen electrode. The $H^ +-ATPase $ rate of the plasma membranes increased by low root temperature. A cucumber and a pumpkin plasma membrane $H^ +-ATPase $$ activities measured by the proposed sensor system were in good agreement with the results obtained by a conventional UV spetrometer assay. One cycle of assay could be completed within 3 minutes.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.11 no.2
• /
• pp.96-103
• /
• 2003

In this paper, the heat loss to the constant volume vessel wall was investigated using instantaneous heat flux sensor, schlieren visualization, pressure rise curve. And the heat loss characteristics of plasma jet ignition were compared with conventional spark ignition. In case of plasma jet ignition, the flame kernel moves toward the center of combustion vessel in the initial period of combustion, and the flame surface spread out to the vessel wall. However, in case of conventional spark ignition, the flame surface contact with combustion vessel wall in the initial period of combustion. As a result, heat loss in the combustion duration for conventional spark ignition increase faster than that of plasma jet ignition. And the combustion enhancement rate of plasma jet ignition is higher than that of conventional spark ignition, and it was found that the heat loss rate is inversely proportional to the combustion enhancement rate.

• Journal of Welding and Joining
• /
• v.17 no.3
• /
• pp.26-35
• /
• 1999

On the laser weld production line, a slight alteration of the welding condition changes the bead size and the strength of the weldment. The measurement system is produced by using three photo-diodes for detection of the plasma and spatter signal in $CO_2$ laser welding. The relationship between the sensor signals of plasma or spatter and the bead shape, and the mechanism of the plasma and spatter were analyzed for the bead size estimation. The penetration depth and the bead width were estimated using the multiple regression analysis.