• Title/Summary/Keyword: Plasma Gases

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Emission Characteristics of Discharge Tube with Mixed Gases

  • Jo, Ju-Ung;Park, Yong-Sung;Lee, Jong-Chan;Masaharu Aono;Park, Dae-Hee
    • KIEE International Transactions on Electrophysics and Applications
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    • v.3C no.4
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    • pp.136-139
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    • 2003
  • The positive column of a discharge tube filled with a mixture of mercury-xenon has a tendency to become contracted at room temperature. However, once the tube temperature is raised over 50 [$^{\circ}C$], the positive column changes from a contracted state to a diffused state. The xenon emission is stronger in the contracted positive column than in the diffused column. Alternatively, the mercury emission is more intense in the diffused positive column, and the luminance of the phosphor coating on the inner surface of the tube is higher than that in the contracted positive column. Moreover, higher luminance can be obtained by increasing the xenon pressure.

Electrical and Optical Properties of Microwave Discharged Lamp (마이크로파 방전램프의 전기적/광학적 특성)

  • Lee, Jong-Chan;Hwang, Myung-Keun;Bae, Young-Jin;Her, Hyun-Soo;Park, Dae-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.492-494
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    • 2002
  • The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases: (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

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Sensing Properties of $\alpha$-Fe$_2$O$_3$ Thin Film Gas Sensor to Reducing Gases ($\alpha$-Fe$_2$O$_3$ 박막 센서의 환원성 가스감지특성)

  • 이은태;장건익;이덕동
    • Journal of the Korean Ceramic Society
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    • v.36 no.5
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    • pp.465-470
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    • 1999
  • Sensing properties of $\alpha$-Fe2O3 thin film to reducing gases such as CHx and CO were systematically examined after deposition on Al2O3 substrate by PECVD(Plasma Enhanced Chemical Vapor Deposition)technique. Microstructure of deposited $\alpha$-Fe2O3 thin film showed the porous island structure. This specimen was annealed at 450, 550, $650^{\circ}C$ to enhance the gas sensing properties and investigated in terms of CO and C4H10 concentration from 500ppm to 3,000 ppm at operating temperature of 35$0^{\circ}C$ The gas sensitivity(%) to C4H10 measured at the operating temperature of 35$0^{\circ}C$ was 98.24 (highest sensitivity) 69.51 to CO and 2% to CH4 respectviely.

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Bidirectional pulse generator for removal of flue gas (배기가스 처리용 양방향 펄스 전원)

  • 박정호;고광철;강형부
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.233-236
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    • 1997
  • An investigation has been made of the various plasma chemistry reactions that occur in the corona discharge of an electrostatic precipitator operating in a typical flue gas. As the results of investigation, sulphur dioxide is removed principally by reactions with OH radicals to produce sulphuric acid, while nitrogen oxides are removed principally by reduction via the N radical to molecular nitrogen. If electrostatic precipitator\ulcorner used for flue gases are operated with positive voltages instead of negative dc voltages, there are significant reductions in the emission of the undesirable gases SO$_2$, NO, and NO$_2$. Thus, in this paper we design the bidirectional pulse generator for removal of flue gas, where the pulse width is more than 50[nsec] and the maximum output voltage is more than 100[kVl.

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Optical Properties of Sulfur and NaI by Microwave Discharge (마이크로파 방전에 의한 Sulfur와 NaI의 광학적 특성)

  • Lee, Jong-Chan;Hwang, Myung-Keun;Park, Dae-Hee
    • Proceedings of the KIEE Conference
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    • 2002.11a
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    • pp.109-111
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    • 2002
  • The fundamental principles of the operation of microwave discharges that are used to convert microwave energy to broad spectrum visual light are known. In this paper, emission dependance of microwave discharges in mixture content of sulfur with noble gases was studied. It is shown that the excitation of this gaseous mixture is carried out in two phases; (1) ionization of noble gas atoms by a microwave field and (2) the consequent maintenance of slightly ionized nonequilibrium plasma by the field. These two processes have essentially various thresholds for the microwave pump. The purpose of this work is to investigate spectral properties of the high frequency discharges in a mixture sulfur vapors with noble gases.

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Role of oxygen in plasma induced chemical reactions in solution

  • Ki, Se Hoon;Uhm, Han Sup;Kim, Minsu;Baik, Ku Youn;Choi, Eun Ha
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.208.2-208.2
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    • 2016
  • Many researchers have paid attention to the studies on the interaction between non-thermal plasma and aqueous solutions for biomedical applications. The gas composition in the plasma is very important. Oxygen and nitrogen are the main gases of interest in biological applications. Especially, we focus on the oxygen concentration. In this experiment, we studied the role of oxygen concentration in plasma induced chemical reactions in solution. At first, the amount of ions are measured according to changing the oxygen concentration. And we checked the relationship between these ions and pH value. Secondly, when the oxygen concentration is changed, it identified the type and amount of radical generated by the plasma. In order to confirm the effect of these chemical property change to biological material, hemoglobin and RBCs are chosen. RBCs are one of the common basic biological cells. Thirdly, when plasma treated according to oxygen concentration in nitrogen feeding gas, oxidation of hemoglobin and RBC is checked. Finally, membrane oxidation of RBC is measured to examine the relation between hemoglobin oxidation and membrane damage through relative hemolysis and Young's modulus. Our results suggest that reactive species generated by the plasma differsdepending on the oxygen concentration changes. The pH values are decreased when oxygen concentration increased. OH decrease and NO increase are also observed. These reactive species makes change of chemical properties of solution. We also able to confirm that the difference in these reactive species to affect the oxidation of the Hb and RBCs. The Hb and RBCs are more oxidized with the high oxygen concentration conditions. But membrane is damaged more by plasma treatment with only nitrogen gas. It is shown that red blood cells membrane damage and oxidation of hemoglobin are not directly related.

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Synthesis of High Purity Aluminum Nitride Nanopowder in Ammonia and Nitrogen Atmosphere by RF Induction Thermal Plasma (RF 유도결합 열 플라즈마를 이용한 암모니아와 질소분위기에서 고순도 AlN 나노 분말의 합성)

  • Kim, Kyung-In;Choi, Sung-Churl;Kim, Jin-Ho;Hwang, Kwang-Taek;Han, Kyu-Sung
    • Journal of the Korean Ceramic Society
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    • v.51 no.3
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    • pp.201-207
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    • 2014
  • High-purity aluminum nitride nanopowders were synthesized using an RF induction thermal plasma instrument. Ammonia and nitrogen gases were used as sheath gas to control the reactor atmosphere. Synthesized AlN nanopowders were characterized by XRD, SEM, TEM, EDS, BET, FTIR, and N-O analyses. It was possible to synthesize high-purity AlN nanoparticles through control of the ammonia gas flow rate. However, additional process parameters such as plasma power and reactor pressure had to be controlled for the production of high-purity AlN nanopowders using nitrogen gas.

Synthesis of Nickel and Copper Nanopowders by Plasma Arc Evaporation

  • Cho, Young-Sang;Moon, Jong Woo;Chung, Kook Chae;Lee, Jung-Goo
    • Journal of Powder Materials
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    • v.20 no.6
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    • pp.411-424
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    • 2013
  • In this study, the synthesis of nickel nanoparticles and copper nanospheres for the potential applications of MLCC electrode materials has been studied by plasma arc evaporation method. The change in the broad distribution of the size of nickel and copper nanopowders is successfully controlled by manifesting proper mixture of gas ambiance for plasma generation in the size range of 20 to 200 nm in diameter. The factors affecting the mean diameter of the nanopowder was studied by changing the composition of reactive gases, indicating that nitrogen enhances the formation of larger particles compared to hydrogen gas. The morphologies and particle sizes of the metal nanoparticles were observed by SEM, and ultrathin oxide layers on the powder surface generated during passivation step have been confirmed using TEM. The metallic FCC structure of the nanoparticles was confirmed using powder X-ray diffraction method.

The Characteristics of Compound Layers Formed during Plasma Nitrocarburising in Pure Iron (플라즈마 침질탄화처리된 순철의 화합물층 특성)

  • Cho, H.S.;Lee, S.Y.;Bell, T.
    • Journal of the Korean Society for Heat Treatment
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    • v.13 no.3
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    • pp.143-150
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    • 2000
  • Ferritic plasma nitrocarburising was performed on pure iron using a modified DC plasma unit. This investigation was carried out with various gas compositions which consisted of nitrogen, hydrogen and carbon monoxide gases, and various gas pressures for 3 hours at $570^{\circ}C$. After treatment, the different cooling rates(slow cooling and fast cooling) were used to investigate its effect on the structure of the compound layer. The ${\varepsilon}$ phase occupied the outer part of the compound layer and ${\gamma}^{\prime}$ phase existed between the ${\varepsilon}$ phase and the diffusion zone. The gas composition of the atmosphere influenced the constitution of the compound layer produced, i.e. high nitrogen contents were essential for the production of ${\varepsilon}$ phase compound layer. It was found that with increasing carbon content in the gas mixture the compound layer thickness increased up to 10%. In the gas pressure around 3 mbar, the compound layer characteristics were slightly effected by gas pressure. However, in the low gas pressure and high gas pressure, the compound layer characteristics were significantly changed. The constitution of the compound layer was altered by varying the cooling rate. A large amount of ${\gamma}^{\prime}$ phase was transformed from the ${\varepsilon}$ phase during slow cooling.

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A Study on the Silicon Nitride for the poly-Si Thin film Transistor (다결정 박막 트랜지스터 적용을 위한 SiNx 박막 연구)

  • 김도영;김치형;고재경;이준신
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.12S
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    • pp.1175-1180
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    • 2003
  • Transformer Coupled Plasma Chemical Vapor Deposited (TCP-CVD) silicon nitride (SiNx) is widely used as a gate dielectric material for thin film transistors (TFT). This paper reports the SiNx films, grown by TCP-CVD at the low temperature (30$0^{\circ}C$). Experimental investigations were carried out for the optimization o(SiNx film as a function of $N_2$/SiH$_4$ flow ratio varying ,3 to 50 keeping rf power of 200 W, This paper presents the dielectric studies of SiNx gate in terms of deposition rate, hydrogen content, etch rate and leakage current density characteristics lot the thin film transistor applications. And also, this work investigated means to decrease the leakage current of SiNx film by employing $N_2$ plasma treatment. The insulator layers were prepared by two step process; the $N_2$ plasma treatment and then PECVD SiNx deposition with SiH$_4$, $N_2$gases.