• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.431-432
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• 2012

In the era of 20 nm scaled semiconductor volume manufacturing, Microelectronics Manufacturing Engineering Education is presented in this paper. The purpose of microelectronic engineering education is to educate engineers to work in the semiconductor industry; it is therefore should be considered even before than technology development. Three Microelectronics Manufacturing Engineering related courses are introduced, and how undergraduate students acquired hands-on experience on Microelectronics fabrication and manufacturing. Conventionally employed wire bonding was recognized as not only an additional parasitic source in high-frequency mobile applications due to the increased inductance caused from the wiring loop, but also a huddle for minimizing IC packaging footprint. To alleviate the concerns, chip bumping technologies such as flip chip bumping and pillar bumping have been suggested as promising chip assembly methods to provide high-density interconnects and lower signal propagation delay [1,2]. Aluminum as metal interconnecting material over the decades in integrated circuits (ICs) manufacturing has been rapidly replaced with copper in majority IC products. A single copper metal layer with various test patterns of lines and vias and $400{\mu}m$ by $400{\mu}m$ interconnected pads are formed. Mask M1 allows metal interconnection patterns on 4" wafers with AZ1512 positive tone photoresist, and Cu/TiN/Ti layers are wet etched in two steps. We employed WPR, a thick patternable negative photoresist, manufactured by JSR Corp., which is specifically developed as dielectric material for multi- chip packaging (MCP) and package-on-package (PoP). Spin-coating at 1,000 rpm, i-line UV exposure, and 1 hour curing at $110^{\circ}C$ allows about $25{\mu}m$ thick passivation layer before performing wafer level soldering. Conventional Si3N4 passivation between Cu and WPR layer using plasma CVD can be an optional. To practice the board level flip chip assembly, individual students draw their own fan-outs of 40 rectangle pads using Eagle CAD, a free PCB artwork EDA. Individuals then transfer the test circuitry on a blank CCFL board followed by Cu etching and solder mask processes. Negative dry film resist (DFR), Accimage$^{(R)}$, manufactured by Kolon Industries, Inc., was used for solder resist for ball grid array (BGA). We demonstrated how Microelectronics Manufacturing Engineering education has been performed by presenting brief intermediate by-product from undergraduate and graduate students. Microelectronics Manufacturing Engineering, once again, is to educating engineers to actively work in the area of semiconductor manufacturing. Through one semester senior level hands-on laboratory course, participating students will have clearer understanding on microelectronics manufacturing and realized the importance of manufacturing yield in practice.

• 한국식품과학회지
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• 제43권3호
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• pp.375-380
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• 2011

DSG에 몰로키아 분말을 첨가하여 발효시킨 발효물이 콜레스테롤 개선효과를 가지는지 in vitro 및 in vivo에서 살펴보았다. B. subtilis NUC1균주로 발효한 탈지대두 grits 발효물인 FD와 탈지 대두 grit에 몰로키아를 5, 10%로 각각 첨가하여 발효한 FDC군의 콜레스테롤 흡착능을 살펴본 결과, 모든 군에서 70% 이상의 흡착능을 보였다. HepG2 세포를 이용한 apo-AI, apo-CIII의 분비능 측정에서는 FD군에 비해 몰로키아를 첨가한 FDC군에서 더 우수한 개선효과를 보였다. 한편 FDC가 고지방식이를 급여한 흰쥐의체내 콜레스테롤 개선에 미치는 영향을 살펴보고자, 기본식이군(Con), 고지방식이군(HF) 그리고 고지방식이와 FD첨가군(HFFD), 고지방식이와 FDC 첨가군(HF-FDC)으로 나누어 4주간 사육하였다. 그 결과, 혈장 내 총콜레스테롤 및 LDL-콜레스테롤 함량, 그리고 간 조직 내의 총콜레스테롤 및 중성지질 함량은 HF군에서 증가하였다가 HF-FDC 첨가군에서 유의적으로 감소하였고, 분변 내의 콜레스테롤 및 중성지질 배설량은 FDC 투여로 인해서 HF군에 비해 증가하였다. 또한 간내 HMG-CoA reductase 활성은 HF군에서 증가되었다가, HF-FDC첨가군에서 유의성 있게 감소되었다. 따라서 FDC는 콜레스테롤 흡착 및 조절능을 가지며, 그리고 혈중 콜레스테롤 함량, 조직 내의 지질 및 콜레스테롤 축적을 감소시켜 체내 콜레스테롤 개선에 효과적인 것으로 생각된다.

• Journal of Periodontal and Implant Science
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• 제31권4호
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• pp.737-747
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• 2001

Regeneration of Periodontium with PRP does not only improve regeneration rate and density of bone but have a possibility to estimate faster healing process for soft tissue. And also, synthetic bone and xenogenic bone graft are effective on regeneration of periodontium. The purpose of this study is to evaluate the effectiveness of synthetic bone ($Biogran^{(R)}$) and xenogenic bone ($BBP^{(R)}$) grafts with the PRP technique on regeneration of periodontium. 52 Generally healthy Pt. who had pocket depth 5mm at any of 6 surfaces of the teeth were in the study at Dept. of Perio. in Dankook Dental Hospital. Open Flap was treated for 18 infra-bony pockets as control group, $Biogran^{(R)}$ with PRP was inserted for 25 infrabony pockets as first test group, and $BBP^{(R)}$ with PRP was inserted for 22 infrabony pockets as 2nd test group. Then evaluation was made after 3 and 6 months 1. 6 months after surgery, each difference of average probing pocket depth was $2.61{\pm}0.23$ for control, $3.40{\pm}0.30$ for 1st test, and $3.45{\pm}0.37$ for 2nd test group. 2. 6 months after surgery, each difference of clinical probing attachment level was $1.39{\pm}0.12$ for control, $2.88{\pm}0,24$ for 1st, and $2.86{\pm}0,27$ for 2nd test group. 3. 6 months after surgery, each difference of Maximal probing attachment level was $1.11{\pm}0.16$ for control, $3.28{\pm}0.30$ for 1st, and $3.27{\pm}0.35$ for 2nd test group. 4. There were significant differences for clinical change of each three group which were between average probing pocket depth and clinical attachment level of 3,6 months and minimal and maximal attachment level after 6 months 5. There were significant differences for average probing pocket depth which were only at control group and 2nd test group between 1 and 6months. For clinical attachment level and minimal and maximal proving attachment level, there was a significant difference after 6month of surgery. 6. There was no significant difference between two test groups for average probing depth, clinical attachment level, and minima1 and maximal probing attachment level. As the result, PRP with bone graft is very effective for regeneration of periodontium and there is no difference between xenogenic bone and synthetic bone.

• 마이크로전자및패키징학회지
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• 제8권3호
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• pp.49-53
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• 2001

유도결합형 플라즈마 (ICP-RIE) 장치를 이용하여 SBT ($SrBi_2Ta_2O_9$)/Si의 수직식각 실험을 하였다. 이와 같은 실험의 목적은 수직 단면구조의 강유전체 gate구조 및 capacitor 제조에 있어서 유효면적을 확보하고 parasitic effect를 최소화 하는 기술이 우수한 소자 특성을 얻기 위해 매우 중요한 기술이기 때문이다. $Ar/C1_2$를 반응가스로 사용하였으며 $Ar/C1_2$유량비를 각각 1, 0.8, 0.6, 0.4로 바꾸어 가면서 각 유량비에 대해 RF power를 700, 600, 500W로 변화시키는 동안 DC power를 각각 200, 150, 100, 50 W로 변화시키면서 식각 실험을 하였다. 식각조건 변화에 따른 수직 및 수평 식각율, 선택식각율, 감광막의 보호성, 리소그라피 조건에 따른 식각율 및 식각단면 구조의 특성, 식각율 변화에 따른 패턴 크기의 변화, SBT의 식각 단면 특성 등을 조사하였다. $Ar/C1_2$유량비가 0.8, RF power 700 W, DC power 200 W 일 때 식각속도는 1050 A/min으로 최적의 식각율을 확인하였다. 그리고 주사전자현미경의 관찰 결과 수 적도는 $82^{\circ}C$ 정도로 매우 양호함을 알 수 있었다.

• 한국임상약학회지
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• 제8권2호
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• pp.107-112
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• 1998

Lovastatin is a lipid lowering agent for the treatment of hypercholesterolemia and belongs to a new class of pharmacologic compounds called the 3-hydroxy-3-methylglutaryl coenzyme A (HMG CoA) reductase inhibitors. By competitively inhibiting HMG CoA reductase, lovastatin disrupts the biosynthesis of cholesterol in hepatic and peripheral cells and increases the synthesis of high-density-lipoprotein HDL) receptors. Following oral administration, the lactone ring of lovastatin is hydrolysed to the active inhibitor of HMG CoA reductase, lovastatin acid. Lovastatin is known to have poor oral absorption and wide individual variation. In this study, bioequivalence test of two lovastatin formulations, the test drug ($Lovaload^{TM}$, Chong Kun Dang Pharmaceutical Co.) and the reference drug ($Mevacor^{TM}$, Chung Wae Pharmaceutical Co.) were conducted according to the guidelines of Korea Food and Drug Administration (KFDA). A total of 18 healthy male volunteers, $31.90\pm3.60$ years old and $72.17\;7.88$ kg of body weight in average, were evaluated in a randomized crossover manner with a 2-week washout period. Concentrations of lovastatin acid in plasma were measured upto 12 hours following a single oral administration of eight tablets (20 mg of lovastatin per tablet) by high-performance liquid chromatography with UV detection at 238 nm. The area under the concentration-vs-time curve from 0 to 12 hours $(AUC_{0-12h})$ was calculated by the trapezoidal summation method. The statistical analysis showed that there are no significant differences in $AUC_{0-12h),\;C_{max}\;and\;T_{max}$ between the two formulations ($6.72\%,\;1.52\%,\;and\;0.88\$, respectively). The least significant differences between the formulations at $\alpha$=0.05 were less than $20\%\;(11.65\%,\;19.73\%,\;and\;14.81\%\;for\;AUC_{0-12h},\;C_{max}\;and\;T_{max}$, respectively). The $90\%$ confidence intervals for these parameters were also within $\pm20\%\;(-1.50{\leq}{\delta}{\leq}15.00$, $-12.50{\leq}{\delta}{\leq}15.50,\;and\;-9.64{\leq}{\delta]{\leq}11.40{\leq}\;for\;\;AUC_{0-12h}$ ,$C_{max}\;and\;T_{max}$, respectively). In conclusion, the new generic product $Lovaload^{TM}$ was proven to be bioequivalent with the reference drug.

• 대한치과보철학회지
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• 제39권1호
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• pp.84-95
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• 2001

Titanium is widely used in dentistry for its low density, high strength, fatigue resistance, corrosion resistance, and biocompatibility. But it has a tendency of surface damage under circumstance of friction and impact for its low hardness of the surface. Coating is one of methods fir increasing surface hardness. Its effect is to improve surface physical characteristics without change of titanium. Diamond-like carbon and titanium nitride are known for its high hardness of the surface. So that this study was aimed at the wear test and the cytotoxicity test of the commercially pure titanium and Ti-6Al-4V alloy which were deposited by diamond-like carbon film or titanium nitride film to acertain improvement of the surface hardness and the biocompatibility. A disk (25mm diameter, 2mm thickness) was made of commercially pure titanium and Ti-6Al-4V alloy and these substrates were deposited by diamond-like carbon film or titanium nitride film. Diamond-like carbon film was deposited by the method of radiofrequency plasma assisted chemical vapor deposition and titanium nitride film was deposited by the method of reactive arc ion plating. Then these substrates were tested about wear characteristics by the pin-on-disk type wear tester in which ruby ball was used as a wear causer under the load of 32N, The fracture cycles were measured by rotating the substrates until their films were fractured. The wear volume was measured after 150 cycles and 3,000 cycles using surface profiler. The cytotoxicity test was peformed by the method of the MTT assay. The results were as follows : 1. In the results of the wear volume test, commercially pure titanium and titanium alloy which were coated by diamond-like carbon film or titanium nitride aim had higher resistance against wear than the substrates which were not coated by any films (P<0.05). 2. In the results of the fracture cycle test and the wear volume test, diamond-like carbon film had higher resistance against wear than titanium nitride film (P<0.05). 3. In both coatings of diamond-like carbon aim and titanium nitride film, Ti-6Al-4V alloy had higher resistance against wear than commercially pure titanium (P<0.05) 4. In the results of the cytotoxicity test, diamond-like carbon film and titanium nitride film had little cytotoxicity as like commercially pure titanium or Ti-6Al-4V alloy (P>0.05).

• Korean Chemical Engineering Research
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• 제50권3호
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• pp.435-441
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• 2012

셀룰로우스를 폴리올로 전환하기 위해 수소의 존재하에서 다양한 제올라이트에 담지된 백금촉매를 비교 연구하였다. 사용한 제올라이트로는 mordenite, Y, ferrierite, 그리고 ${\beta}$이며 비교를 위하여 ${\gamma}-Al_2O_3$, $SiO_2-Al_2O_3$, 그리고 $SiO_2$에 담지한 백금촉매도 사용하였다. 촉매의 물리적 특성은 등온 질소흡착실험을 통하여 분석하였으며 표면 산점의 특성은 암모니아 승온탈착분석법으로 파악하였고 백금의 담지량은 유도결합플라즈마분광법을 사용하여 확인하였으며 백금의 분산도는 일산화탄소의 화학흡착과 투과전자현미경 사진을 통하여 결정하였다. 셀룰로우스의 전환율은 주로 반응온도나 반응시간에 영향을 받는 것으로 나타났는데, 이는 고온의 물에서 발생하는 가역적인 수소이온 때문이다. 사용한 촉매중에서 폴리올의 수득률은 Pt/H-modenite(20)을 사용하였을 때에 가장 높게 나타났으며, Pt/Na-zeolite의 경우 Pt/H-zeolite에 비하여 활성이 낮은 것을 확인할 수 있었다. 폴리올의 수득률은 표면산점의 농도와 관련이 있음을 확인할 수 있었으며, 외부표면적 또한 폴리올의 수득에 영향을 주는 것을 확인할 수 있었다.

• 한국자기학회지
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• 제17권4호
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• pp.166-171
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• 2007

단결정 Bi단일 나노선의 정상 자기 저항(ordinary magnetoresistance) 특성을 $2{\sim}300K$에서 4 단자법으로 측정하였다. I-V 측정을 통해 전기적 오믹 형성을 확인하였고, 2 K과 300 K에서 비저항이 각각 $1.0{\times}10^{-4}$와 $8.2{\times}10^{-5}{\Omega}{\cdot}cm$으로 측정되었다. 수직(transverse) 및 수평(longitudinal) 자기저항비(MR ratio)가 110 K와 2 K에서 각각 현재까지 보고된 MR 중 가장 큰 2496%와 -38%으로 관찰되었으며, 이 결과는 자발 성장법으로 성장된 Bi 나노선의 결정성이 매우 우수한 단결정임을 증명한다. simple two band(STB) 모델을 통해 Bi 나노선의 수직 및 수평 정상 자기 저항(OMR) 거동이 온도에 따른 페르미 준위(Fermi level)와 밴드 겹침(band overlap)등의 전자 구조 변화 및 운반자 농도 변화로 잘 설명된다.

• 한국재료학회지
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• 제11권3호
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• pp.197-202
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• 2001

교류구동형 플라즈마 표시소자의 보호막으로 사용되는 MgO의 특성향상을 위하여 기존의 MgO에 양이온이 등전적으로 치환될 수 있는 ZnO를 소량 첨가하여 고주파 마그네트론 스퍼터링 방법으로 $Mg_{1-x}$Z $n_{x}$O박막을 성장시키고 박막의 전기적, 광학적 특성을 조사하였다. ZnO농도가 0.5 at%, 1at%인 $Mg_{1-x}$Z $n_{x}$O 박막을 보호막으로 갖는 PDP 테스트 판넬을 제작하고 ZnO의 첨가가 소자의 방전전압과 메모리 이득에 미치는 영향을 살펴보았다. ZnO농도가 0at%, 0.5 at%, 1at%인 $Mg_{1-x}$Z $n_{x}$O 박막의 광투과율은 ZnO 첨가에 따라 변화를 보이지 않으나 유전상수는 다소 증가하는 경향을 보였다. ZnO의 농도가 0.5 at%인 $Mg_{1-x}$Z $n_{x}$O 박막을 보호막으로 갖는 PDP 소자의 방전개시전압과 방전유지 전압이 MgO 박막을 보호막으로 갖는 소자에 비해 20V까지 낮아졌고, 결과적으로 메모리계수는 다소 증가하였다. ZnO농도가 0.5 at%, 1at%인 $Mg_{1-x}$Z $n_{x}$O 박막을 보호막으로 갖는 소자에서 ZHO의 첨가에 비례하여 방전세기 (플라즈마 밀도)가 증가하였다.도)가 증가하였다.도)가 증가하였다.

• 한국재료학회지
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• 제10권4호
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• pp.282-289
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• 2000

전자싸이클로트론공명-플라즈마 화학기상증착법으로 $PbTiO_3$박막을 증착하였다. $RuO_2$ 기판과 Pt 기판 위에 금속유기화합물 원료기체 유량 및 증착온도에 따라서 $PbTiO_3$박막의 증착특성을 연구하였다. $RuO_2$ 기판 위에서 Pt 기판에 비하여 Pb-oxide 분자의 잔류시간이 상대적으로 크고, 페로브스카이트 핵생성 밀도는 상대적으로 작으며, 단일한 페로브스카이트 상의 $PbTiO_3$ 박막을 얻을 수 있는 공정범위가 Pt 기판보다 좁았다. $PbTiO_3$ 박막 증착 전 Ti-oxide 씨앗층을 도입함으로써 $RuO_2$ 기판에서도 페로브스카이트 핵생성 밀도를 증가시켜 단일한 페로브스카이트 박막을 얻을 수 있는 공정범위가 확장되었다. $PbTiO_3$에서 Ti 성분을 Zr으로 일부 대체시킨 $Pb(Zr,Ti)O_3\;(PZT)$ 박막의 경우에도 Ti-oxide 씨앗층을 도입함으로써 넓은 공정범위에서 단일한 페로브스카이트 PZT 박막을 $RuO_2$기판 위에서도 제조할 수 있었다.