• 공업화학
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• 제25권4호
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• pp.341-345
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• 2014

아크플라즈마를 이용해 촉매입자를 촉매지지체에 건식으로 직접 분산하는 기술에 대한 개괄과 응용사례를 소개한다. 이 방법은 촉매입자를 담지하는 일반적인 방법인 습식법의 단점을 개선하고자 촉매입자를 기화하여 직접 담지체에 증착하는 방법이다. 아크플라즈마 증착을 이용해 제작한 촉매재료의 성능을 연구한 사례 세가지를 소개한다. 이 사례들을 통해 이 방법으로 증착되는 나노입자의 크기가 1~5 nm 정도이고 일반적으로 습식 방법보다 촉매성능면에서 우수한 성능을 나타낸다는 것을 보인다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.519-520
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• 2006

Research was performed to increase the efficiency of a plasma reactor for $H_2$ yield. In the preceding studies $H_2$ was increased by adding Ni as a transitional metal catalyst and $TiO_2$ as a photocatalyst. In these experiments, it was found that distilled water, discharge frequency, and electrode configuration had a significant impact on $H_2$ generation. A substantial amount of hydrogen yield was observed at 2 kHz of discharge frequency and 12 kV of applied voltage. Within this favorable discharge conditions, the weight rate of $TiO_2$ and Ni powders was investigated. Plasma phenomenon was measured by electrical, optical and acoustical devices. It was found that emitted light, electric current and acoustical signals acquired from the discharge demonstrated systematical correlation. Changing the electrode's configuration allowed discharge distribution along the perimeter of the electrode's tip, which increased the density of streamers and plasma energy loadings, as the value of inception voltage for the discharge propagation decreased.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.210-210
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• 2000

Vertically well aligned multi-wall carbon nanotubes (CNT) were grown on nickel coated glass substrates by plasma enhanced hot filament chemical vapor deposition at low temperatures below 600$^{\circ}C$. Acetylene and ammonia gas were used as the carbon source and a catalyst. Effects of growth parameters such as pre-treatment of substrate, plasma intensity, filament current, imput gas flow rate, gas composition, substrate temperature and different substrates on the growth characteristics of CNT were systematically investigated. Figure 1 shows SEM image of CNT grown on Ni coated glass substrate. Diameter of nanotube was 30 to 100nm depending on the growth condition. The diameter of CNT decreased and density of CNT increased as NH3 etching time etching time increased. Plasma intensity was found to be the most critical parameter to determine the growth of CNT. CNT was not grown at the plasma intensity lower than 500V. Growth of CNT without filament current was observed. Raman spectroscopy showed the C-C tangential stretching mode at 1592 cm1 as well as D line at 1366 cm-1. From the microanalysis using HRTEM, nickel cap was observed on the top of the grown CNT and very thin carbon amorphous layer of 5nm was found on the nickel cap. Current-voltage characteristics using STM showed about 34nA of current at the applied voltage of 1 volt. Electron emission from the vertically well aligned CNT was obtained using phosphor anode with onset electric field of 1.5C/um.

• 공업화학
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• 제9권1호
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• pp.94-100
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• 1998

천연가스의 주성분인 메탄의 마이크로웨이브 플라즈마 촉매반응에 의한 C2+ 탄화수소로의 전환반응을 고찰하였다. 플라즈마 출력의 증가(40~120 watt)와 유량이 감소(40~5mL/min)함에 따라서 메탄의 C2+ 생성물로의 전환율을 29.2%에서 42.2%로 향상되었으며, 촉매를 플라즈마와 함계 사용하여 에틸렌과 아세틸렌의 선택도를 향상시키는 동시에 높은 전환율을 유지할 수 있다. 실험에 사용한 여러 촉매중에는 Fe계의 촉매가 가장 높은 에틸렌의 선택도(30%)를 나타내었다. 실제 천연가스의 전환실험에서는 C2+ 생성물의 수율이 33.3%에서 46%의 범위를 보였다. 순수한 메탄이 원료였을 때 보다 높은 C2+ 수율이 얻어진 것은 천연가스가 메탄 보다 반응성이 높은 성분인 에탄과 프로판등을 함유하고 있기 때문으로 생각된다.

• 한국진공학회지
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• 제16권3호
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• pp.187-191
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• 2007

본 연구에서는 실리콘 웨이퍼 위에 마그네트론 스퍼터링 시스템을 이용하여 Ni 촉매 층을 증착시키고, $NH_3$와 $C_2H_2$ gas를 이용하여 탄소나노튜브를 성장시켰다. Hot-filament 플라즈마 화학기상 증착법으로 탄소나노튜브의 성장 온도는 350, 450, 550, $650^{\circ}C$로 변화시켰으며, 성장되어진 탄소나노튜브는 field emission scanning electron microscope(FESEM) 분석을 하여 관찰하였고, 접촉각 측정법을 이용하여 탄소나노튜브 층의 특성을 분석하였다. 결과적으로 성장 온도는 탄소나노튜브의 성장 특성을 변화시키는 중요한 요소이다.

• 공업화학
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• 제24권1호
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• pp.87-92
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• 2013

광촉매 혼성 저온 플라즈마는 폐수에 함유된 유기물을 분해시키는 효과적인 기술이다. 본 연구에서는 광촉매가 결합된 특별히 설계된 유전체 방전 시스템을 골프장이나 감귤농가에서 흔히 살포되는 디크로보스, 카보퓨란 및 메치다치온 살충제의 분해에 적용하였다. 단독 및 병합 시스템에서 살충제의 분해를 평가하였다. 단독 시스템은 UV의 차폐 유무 및 산소기체와 공기에 의한 오존(각종 반응 활성종들 포함) 플라즈마를 이용하였다. 혼성 시스템은 UV로 활성화된 산화아연, 이산화티타늄과 그래파이트 옥사이드와 결합하여 공기에 의한 플라즈마 반응에 적용하였다. 그래파이트 옥사이드는 모사 허머스 법으로 제조하여 FT-IR 분광기로 성능을 측정하였다. 반응시간 60 min에서 UV를 차폐하고 공기를 이용한 플라즈마 반응에 의한 분해성능과 비교하였으며, UV로 활성화된 그래파이트 옥사이드(0.01 g/L)와 결합된 플라즈마 반응은 디크로보스와 카보퓨란의 각각 100% 분해도를 보였다. UV를 활용한 광촉매 혼성 플라즈마는 살충제를 분해시키는 효과적인 대안으로 입증되었다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.62-62
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• 2018

Pt is still considered as one of the most active electrocatalysts for ORR in alkaline fuel cells. However, the high cost and scarcity of Pt hamper the widespread commercialization of fuel cells. As a strong candidate for the replacement of Pt catalyst, silver (Ag) has been extensively studied due to its high activity, abundance, and low cost. Ag is more stable than Pt in the pH range of 8~14 as the equilibrium potential of Ag/Ag+ being ${\approx}200mV$ higher than that of Pt/PtO. However, Ag is the overall catalytic activity of Ag for oxygen reduction reaction(ORR) is still not comparable to Pt catalyst since the surface Ag atoms are approximately 10 times less active than Pt atoms. Therefore, further enhancement in the ORR activity of Ag catalysts is necessary to be competitive with current cutting-edge Pt-based catalysts. We demonstrate the architectural design of Ag catalysts, synthesized using plasma discharge in liquid phase, for enhanced ORR kinetics in alkaline media. An attractive feature of this work is that the plasma status controlled via electric-field could form the Ag nanowires or dendrites without any chemical agents. The plasma reactor was made of a Teflon vessel with an inner diameter of 80 mm and a height of 80 mm, where a pair of tungsten(W) electrodes with a diameter of 2 mm was placed horizontally. The stock solutions were made by dissolving the 5-mM AgNO3 in DI water. For the synthesis of Agnanowires, the electricfield of 3.6kVcm-1 in a 200-ml AgNO3 aqueous solution was applied across the electrodes using a bipolar pulsed power supply(Kurita, Seisakusyo Co. Ltd). The repetition rate and pulse width were fixed at 30kHz and 2.0 us, respectively. The plasma discharge was carried out for a fixed reaction time of 60 min. In case of Ag nanodendrites, the electric field of 32kVcm-1 in a 200-ml AgNO3 aqueous solution was applied and other conditions were identical to the plasma discharge in water in terms of electrode configuration, repetition rate and discharge time. Using SEM and STEM, morphology of Ag nanowires and dendrites were investigated. With 3.6 kV/cm, Ag nanowire was obtained, while Ag dendrite was constructed with 32 kV/cm. The average diameter and legth of Ag nanowireses were 50 nm and 3.5 um, and thoes values of Ag dendrites were 40 nm and 3.0 um. As a results of XPS analysis, the surface defects in the Ag nanowires facilitated O2 incorporation into the surface region via the interaction between the oxygen and the electron cloud of the adjacent Ag atoms. The catalytic activity of Ag for oxygen reduction reaction(ORR) showed that the catalytic ORR activity of Ag nanowires are much better than Ag nanodendrites, and electron transfer number of Ag nanowires is similar to that of Pt (${\approx}4$).

• Korean Chemical Engineering Research
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• 제46권5호
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• pp.1002-1007
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• 2008

이 논문의 목적은 PEMFC 작동을 위한 플라즈마 개질 시스템의 최적 조건을 연구한 것이다. 플라즈마 개질 반응기는 니켈 촉매 반응기와 동시에 사용하여 수소 생성을 증대하였다. 또한 수성가스 전환 반응기 및 선택적 산화 반응기는 연료전지의 촉매 피독에 영향을 주는 일산화탄소의 농도를 10 ppm 이하로 줄이기 위하여 제작되었다. 플라즈마 개질기에서 최대 수소생산 조건은 S/C 비 3.2, 메탄 2.0 L/min, 촉매반응기 온도는 $700{\pm}5^{\circ}C$ 그리고 입력전력 900 W이다. 이때의 합성가스의 농도는 $H_2$ 70.2%, CO 7.5%, $CO_2$ 16.2%, $CH_4$ 1.8% 이다. 수소 수율, 수소 선택도 그리고 메탄 전환율는 각각 56.8%, 38.1%, 92.2%이다. 에너지 효율과 에너지 요구량은 37.0%, 183.6 kJ/mol 이다. 추가적으로 $CO_2/CH_4$ 비 실험을 진행하였다. 또한 수성가스 전환 반응기는 플라즈마 개질 반응기의 최적조건으로 실험을 진행하였으며, 출구 농도는 $H_2$ 68.0%, CO 337 ppm, $CO_2$ 24.0%, $CH_4$ 2.2%, $C_2H_4$ 0.4%, $C_2H_6$ 4.1% 이다. 이때의 선택적 산화 반응기의 실험결과는 $H_2$ 51.9%, CO 0%, $CO_2$ 17.3%를 나타냈다.

• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.751-756
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• 2001

Carbon nanotubes(CNTs) was successfully grown on Ni coated silicon wafer substrate by PECVD technique(Plasma Enhanced Chemical Vapor Deposition). As a catalyst, Ni thin film of thickness ranging from 15∼30nm was prepared by electron beam evaporator system. In order to find the find the optimum growth condition, initially two different types of gas mixtures such as C$_2$H$_2$-NH$_3$ and C$_2$H$_2$-NH$_3$-Ar were systematically investigated by adjusting the gas mixing ratio in temperature of 600$^{\circ}C$ under 0.4 torr. The diameter of the grown CNTs was 40∼200nm. The diameter of the CNTs increases with increasing the Ni particles size. TEM images clearly demonstrated synthesized nanotubes to be multiwalled.