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http://dx.doi.org/10.5757/JKVS.2007.16.3.187

Synthesis and Surface Characterization of Carbon Nanotubes by Hot-Filament Plasma Enhanced Chemical Vapor Deposition  

Choi, Eun-Chang (School of Information and Communication Engineering, Sungkyunkwan University)
Kim, Jung-Tae (School of Information and Communication Engineering, Sungkyunkwan University)
Park, Yong-Seob (School of Information and Communication Engineering, Sungkyunkwan University)
Choi, Won-Seok (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
Hong, Byung-You (School of Information and Communication Engineering, Sungkyunkwan University)
Publication Information
Journal of the Korean Vacuum Society / v.16, no.3, 2007 , pp. 187-191 More about this Journal
Abstract
In this paper, the catalyst layer is deposited on silicon substrate using magnetron sputtering system and carbon nanotubes(CNTs) were grown in $NH_3\;and\; C_2H_2$ gas by hot-filament plasma enhanced chemical vapor deposition (HFPECVD) system. A growth temperature of carbon nanotubes was changed from $350^{\circ}C\;to\;650^{\circ}C\;by\;100^{\circ}C$. We observed the shape of CNTs by a field-emission scanning electron microscope(FE-SEM) measurement and analyzed the surface characteristic of CNTs layer by contact angle measurement. That is, the growth temperature of CNTs is the important factor leads to the variation of the properties.
Keywords
Hot-filament; Carbon nanotubes; Metal catalyst; Contact angle;
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1 S. Ijima, Nature 354, 56 (1991)   DOI
2 H. Dai, E. W. Wong, C. M. Lieber, Science 272, 1179 (1995)   DOI
3 N. Hamada, A. Sawada, A. Oshiyama, Phys. Rev. Lett 68, 1579 (1992)   DOI   ScienceOn
4 S. M. Lee, K. S. Park, Y. C. Choi, Y. S. Park, J. M. Bok, Synthetic Metals 113, 209 (2000)   DOI   ScienceOn
5 J. M. Bonard, Appl. Phys. Lett 73, 918, (1998)   DOI   ScienceOn
6 Y. Saito, S. Uemura, Carbon 38, 169 (2000)   DOI   ScienceOn
7 T. E. Muller, D. G. Reid, W. K. Hsu, J. P. Hare, H. W. Kroto, D. R. Walton, Carbon 7, 951 (1997)
8 T. W. Ebbesen, H. J. Lezec, H. Hiura, J. W. Bennett, H. F. Ghaemi, T. Thio, Nature 382, 54 (1996)   DOI
9 J. H. Han, B. S. Moon, W. S. Young, J. B. Yoo, C. Y Park, Surf. Coat. Tech. 131, 93 (2000)   DOI   ScienceOn
10 Z. F. Ren, Science 282, 1105 (1998)   DOI   ScienceOn
11 C. J. Lee, J. H. Park, S. W. Han, J. S. Ihm, Chem. Phys. Lett 337, 398 (2001)   DOI   ScienceOn
12 E. Frackowiak, F. Beguin, Carbon 39, 937 (2001)   DOI   ScienceOn
13 J. H. Han, Surf. Coat. Tech. 3, 93 (2000)
14 S. Uemura, T. Nagasako, J. Yotani, T. Shimojo, Y. Saito, SID' 98 Digest 1052 (1998)
15 I. S. Bea, S. H. Cho, S. B. Lee, Y. Kim and J. H. Boo, Surf. Coat. Tech. 193, 142 (2005)   DOI   ScienceOn
16 J. W. Mintmire, B. I. Dunlap, C. T. White, Phys. Rev. Lett. 68, 631 (1992)   DOI   ScienceOn