• Proceedings of the KIPE Conference
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• 2002.07a
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• pp.245-248
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• 2002

In this paper, the development of the RF power supply for Remote Plasma System is discussed. 7kW, 400kHz Remote Plasma Generator is designed and tested. The main power stage is used for the HB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of Remote Plasma Generator are verified by simulation and experimental results.

• 한국연소학회:학술대회논문집
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• 2006.04a
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• pp.144-148
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• 2006

Characteristics of a plasma reactor for partial oxidation of methane, especially focused on the role and effectiveness of plasma chemistry, is investigated. Partial oxidation of methane is investigated using a rotating arc which is a three dimensional version of a typical glidingarc. The rotating arc has both the characteristics of equilibrium and non-equilibrium plasma. Non-equilibrium characteristics of the rotating gliding arc can be increased by rotating an elongated arc string attached at both the tip of inner electrode and the edge of outer electrode. In this way, plasma chemistry can be enhanced and hydrogen selectivity can reach almost 100% that is much higher than thermal equilibrium condition. As a result, the present study enables the strategic approach of the plasma reforming process by means of appropriate reactor design to maximize plasma effect and resulting in maximized reaction efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.229-229
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• 2003

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.208-208
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• 2003

• Applied Science and Convergence Technology
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• v.24 no.6
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• pp.232-236
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• 2015

The electro-optical characteristics of several functional layers over the MgO protective layer were studied during the continuous discharge of an AC-PDP. In order to observe the degradation of each functional layer on the MgO protection layer, we measured the surface morphology, cathodoluminescence (CL) spectrum, the secondary electron emission coefficient (${\gamma}$) and the discharge characteristics after 500 hours of discharge during the operation of the AC-PDP.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.179-186
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• 2014

Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.

• Proceedings of the Korean Vacuum Society Conference
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• 2008.02a
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• pp.220-220
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• 2008

• Applied Science and Convergence Technology
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• v.27 no.2
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• pp.23-25
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• 2018

With respect to the electrode structure and the discharge characteristics, the atmospheric pressure plasma sheet of a thin polyimide film is introduced in this study; here, the flexible plasma device of a dielectric-barrier discharge with the ground electrode and the high-voltage electrode formulated on each surface of a polyimide film whose thickness is approximately $100{\mu}m$, that is operated with a sinusoidal voltage at a frequency of 25 kHz and a low voltage from 1 kV to 2 kV is used. The streamer discharge is appeared along the cross-sectional boundary line between two electrodes at the ignition stage, and the plasma is diffused on the dielectric-layer surface over the high-voltage electrode. In the development of a plasma sheet with thin dielectric films, the avoidance of the insulation breakdown and the reduction of the leakage current have a direct influence on the low-voltage operation.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.08a
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• pp.216-216
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• 2003

• Proceedings of the Korean Vacuum Society Conference
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• 2004.08a
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• pp.226-226
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• 2004