• Title/Summary/Keyword: Piezoelectric sensor/actuator

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Experiment of the Precision micro-positioning stage (초정밀 마이크로 위치결정 스테이지의 제작 및 평가)

  • Han, C. S.;Paek, S.;No, M. K.;Lee, C. H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.244-247
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    • 2002
  • The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

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Steady-state response and free vibration of an embedded imperfect smart functionally graded hollow cylinder filled with compressible fluid

  • Bian, Z.G.;Chen, W.Q.;Zhao, J.
    • Structural Engineering and Mechanics
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    • v.34 no.4
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    • pp.449-474
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    • 2010
  • A smart hollow cylinder consisting of a host functionally graded elastic core layer and two surface homogeneous piezoelectric layers is presented in this paper. The bonding between the layers can be perfect or imperfect, depending on the parameters taken in the general linear spring-layer interface model. The effect of such weak interfaces on free vibration and steady-state response is then investigated. Piezoelectric layers at inner and outer surfaces are polarized axially or radially and act as a sensor and an actuator respectively. For a simply supported condition, the state equations with non-constant coefficients are obtained directly from the formulations of elasticity/piezoelasticity. An approximate laminated model is then introduced for the sake of solving the state equations conveniently. It is further assumed that the hollow cylinder is embedded in an elastic medium and is simultaneously filled with compressible fluid. The interaction between the structure and its surrounding media is taken into account. Numerical examples are finally given with discussions on the effect of some related parameters.

Active Vibration Control of a Plate Using TMS320C6713DSK

  • Choi, Hyeung-Sik;You, Sam-Sang;Her, Jae-Gwan;Seo, Hae-Yong;Tran, Ngoc-Huy
    • Journal of Advanced Marine Engineering and Technology
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    • v.35 no.3
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    • pp.309-316
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    • 2011
  • This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

High-Speed Active Vibration Control System of Plate using TMS320C6713DSK (TMS320C6713DSK를 적용한 평판의 고속 능동 진동제어)

  • Choi, Hyeung-Sik;Her, Jae-Gwan;Seo, Hae-Yong
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.6
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    • pp.918-924
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    • 2009
  • This paper deals with the experimental assessment of the vibration suppression of the smart structures. First, we have presented the paper about the new high-speed active control system that we have developed using the DSP320C6713 microprocessor and a peripheral system composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA95. Since fast data processing is very important in the active vibration control of the structures, we utilized the fast processing DSP320C6713 microprocessor as a main processor to the controller and fast peripheral devices for fast control loop. To realize a fast active vibration control, we have analyzed and tested the processing time of the peripheral devices and provided the corresponding test results. Especially, we have focused on achieving the fast signal amplification of the PA95 device since it takes most of loop times of the control system. Finally, we performed numerous experiments of active vibration control of the aluminum plate to validate the superior performance of the developed control system based on previous mode tests of the plate.

Mathematical modeling of actively controlled piezo smart structures: a review

  • Gupta, Vivek;Sharma, Manu;Thakur, Nagesh
    • Smart Structures and Systems
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    • v.8 no.3
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    • pp.275-302
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    • 2011
  • This is a review paper on mathematical modeling of actively controlled piezo smart structures. Paper has four sections to discuss the techniques to: (i) write the equations of motion (ii) implement sensor-actuator design (iii) model real life environmental effects and, (iv) control structural vibrations. In section (i), methods of writing equations of motion using equilibrium relations, Hamilton's principle, finite element technique and modal testing are discussed. In section (ii), self-sensing actuators, extension-bending actuators, shear actuators and modal sensors/actuators are discussed. In section (iii), modeling of thermal, hygro and other non-linear effects is discussed. Finally in section (iv), various vibration control techniques and useful software are mentioned. This review has two objectives: (i) practicing engineers can pick the most suitable philosophy for their end application and, (ii) researchers can come to know how the field has evolved, how it can be extended to real life structures and what the potential gaps in the literature are.

Thermal buckling of smart porous functionally graded nanobeam rested on Kerr foundation

  • Karami, Behrouz;Shahsavari, Davood;Nazemosadat, Seyed Mohammad Reza;Li, Li;Ebrahimi, Arash
    • Steel and Composite Structures
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    • v.29 no.3
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    • pp.349-362
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    • 2018
  • Thermal buckling behavior of porous functionally graded nanobeam integrated with piezoelectric sensor and actuator based on the nonlocal higher-order shear deformation beam theory is investigated for the first time. Its material properties are assumed to be temperature-dependent and varying along the thickness direction according to the modified power-law rule. Note that the porosity with even type is considered herein. The equations of motion are obtained through Hamilton's principle. The influences of several parameters (such as type of temperature distribution, external electric voltage, material composition, porosity, small-scale effect, Ker foundation parameters, and beam thickness) on the thermal buckling of FG nanobeam are investigated in detail.

Neuro-Adaptive Vibration Control of a Composite Beam with Optical Fiber Sensor (신경망 제어기를 이용한 광섬유가 부착된 복합재 보의 진동제어)

  • Kim, Do-Hyung;Yang, Seung-Man;Han, Jae-Hung;Kim, Dae-Hyun;Lee, In;Kim, Chun-Gon;Hong, Chang-Sun
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2002.05a
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    • pp.135-138
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    • 2002
  • Experimental studies on vibration control of a composite beam with a piezoelectric actuator and an extrinsic Fabry-Perot interferometer (EFPI) have been performed using a neural network controller and an LQG controller. Vibration control performance was investigated in the nonlinear sensing range according to the vibration amplitudes. Using a neuro-controller, adaptive vibration control experiment has been performed for the structure with frequency variations, and its performance is compared with that of an LQG controller. The vibration control results show that the neuro-controller has good performance and robustness with respect to the system parameter variations.

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Development of Force/Displacement Sensing System for Nanomachining (나노 가공을 위한 힘.변위 검출시스템 개발)

  • Bang, Jin-Hyeok;Kwon, Ki-Hwan;Park, Jae-Jun;Cho, Nahm-Gyoo
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.777-781
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    • 2004
  • This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

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Nanopatterning using Machining Force Sensing Module (미세 가공력 검출기구를 이용한 나노패터닝)

  • 방진혁;권기환;박재준;조남규
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.10a
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    • pp.1109-1112
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    • 2004
  • This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

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Vibration Control of Laminated Composite Beams Using Active Constrained Layer Damping Treatment (능동구속감쇠 기법을 이용한 복합적층보의 진동 제어)

  • 강영규;최승복
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.11 no.7
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    • pp.261-266
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    • 2001
  • The flexural vibration of laminated composite beams with active and passive constrained layer damping has been investigated to design a structure with maximum possible damping capacity. The equations of motion are derived fro flexural vibrations of symmetrical,. multi-layer laminated beams. The damping ratio and model damping of the first bending mode are calculated by means of iterative complex eigensolution method. The direct negative velocity feedback control is used for the active constrained layer damping. It is shown that the flexible laminated beam is more effective in the vibration control for both active and passive constrained layer damping. and this paper addresses a design strategy of laminated composite under flexural vibrations with constrained layer damping.

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