• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Structural Engineering and Mechanics
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• 제34권4호
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• pp.449-474
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• 2010

A smart hollow cylinder consisting of a host functionally graded elastic core layer and two surface homogeneous piezoelectric layers is presented in this paper. The bonding between the layers can be perfect or imperfect, depending on the parameters taken in the general linear spring-layer interface model. The effect of such weak interfaces on free vibration and steady-state response is then investigated. Piezoelectric layers at inner and outer surfaces are polarized axially or radially and act as a sensor and an actuator respectively. For a simply supported condition, the state equations with non-constant coefficients are obtained directly from the formulations of elasticity/piezoelasticity. An approximate laminated model is then introduced for the sake of solving the state equations conveniently. It is further assumed that the hollow cylinder is embedded in an elastic medium and is simultaneously filled with compressible fluid. The interaction between the structure and its surrounding media is taken into account. Numerical examples are finally given with discussions on the effect of some related parameters.

• Journal of Advanced Marine Engineering and Technology
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• 제35권3호
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• pp.309-316
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• 2011

This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

• Journal of Advanced Marine Engineering and Technology
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• 제33권6호
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• pp.918-924
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• 2009

This paper deals with the experimental assessment of the vibration suppression of the smart structures. First, we have presented the paper about the new high-speed active control system that we have developed using the DSP320C6713 microprocessor and a peripheral system composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA95. Since fast data processing is very important in the active vibration control of the structures, we utilized the fast processing DSP320C6713 microprocessor as a main processor to the controller and fast peripheral devices for fast control loop. To realize a fast active vibration control, we have analyzed and tested the processing time of the peripheral devices and provided the corresponding test results. Especially, we have focused on achieving the fast signal amplification of the PA95 device since it takes most of loop times of the control system. Finally, we performed numerous experiments of active vibration control of the aluminum plate to validate the superior performance of the developed control system based on previous mode tests of the plate.

• Smart Structures and Systems
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• 제8권3호
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• pp.275-302
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• 2011

This is a review paper on mathematical modeling of actively controlled piezo smart structures. Paper has four sections to discuss the techniques to: (i) write the equations of motion (ii) implement sensor-actuator design (iii) model real life environmental effects and, (iv) control structural vibrations. In section (i), methods of writing equations of motion using equilibrium relations, Hamilton's principle, finite element technique and modal testing are discussed. In section (ii), self-sensing actuators, extension-bending actuators, shear actuators and modal sensors/actuators are discussed. In section (iii), modeling of thermal, hygro and other non-linear effects is discussed. Finally in section (iv), various vibration control techniques and useful software are mentioned. This review has two objectives: (i) practicing engineers can pick the most suitable philosophy for their end application and, (ii) researchers can come to know how the field has evolved, how it can be extended to real life structures and what the potential gaps in the literature are.

• Steel and Composite Structures
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• 제29권3호
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• pp.349-362
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• 2018

Thermal buckling behavior of porous functionally graded nanobeam integrated with piezoelectric sensor and actuator based on the nonlocal higher-order shear deformation beam theory is investigated for the first time. Its material properties are assumed to be temperature-dependent and varying along the thickness direction according to the modified power-law rule. Note that the porosity with even type is considered herein. The equations of motion are obtained through Hamilton's principle. The influences of several parameters (such as type of temperature distribution, external electric voltage, material composition, porosity, small-scale effect, Ker foundation parameters, and beam thickness) on the thermal buckling of FG nanobeam are investigated in detail.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2002년도 춘계학술발표대회 논문집
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• pp.135-138
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• 2002

Experimental studies on vibration control of a composite beam with a piezoelectric actuator and an extrinsic Fabry-Perot interferometer (EFPI) have been performed using a neural network controller and an LQG controller. Vibration control performance was investigated in the nonlinear sensing range according to the vibration amplitudes. Using a neuro-controller, adaptive vibration control experiment has been performed for the structure with frequency variations, and its performance is compared with that of an LQG controller. The vibration control results show that the neuro-controller has good performance and robustness with respect to the system parameter variations.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• 한국소음진동공학회논문집
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• 제11권7호
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• pp.261-266
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• 2001

The flexural vibration of laminated composite beams with active and passive constrained layer damping has been investigated to design a structure with maximum possible damping capacity. The equations of motion are derived fro flexural vibrations of symmetrical,. multi-layer laminated beams. The damping ratio and model damping of the first bending mode are calculated by means of iterative complex eigensolution method. The direct negative velocity feedback control is used for the active constrained layer damping. It is shown that the flexible laminated beam is more effective in the vibration control for both active and passive constrained layer damping. and this paper addresses a design strategy of laminated composite under flexural vibrations with constrained layer damping.