• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.44-48
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• 2007

In recent years, the size of plane substrates and semiconductor wafers has increased. As conventional contact transportation systems composed of, for example, carrier rollers, belt conveyers, and robot hands carry these longer and wider substrates, the increased weight results in increased potential for fracture. A noncontact transportation system is required to solve this problem. We propose a new noncontact transportation system combining acoustic viscous and aerostatic forces to provide damage-free transport. In this system, substrates are supported by aerostatic force and transported by acoustic viscous streaming induced by traveling wave deformation of a disk-type stator. A ring-type piezoelectric transducer bonded on the stator excites vibration. A stator with a high Q piezoelectric transducer can generate traveling vibrations with amplitude of $3.2{\mu}m$. Prior to constructing a carrying road for substrates, we clarified the basic properties of this technique and stator vibration characteristics experimentally. We constructed the experimental equipment using a rotational disk with a 95-mm diameter. Electric power was 70 W at an input voltage of 200 Vpp. A rotational torque of $8.5\times10^{-5}Nm$ was obtained when clearance between the stator and disk was $120{\mu}m$. Finally, we constructed a noncontact transport apparatus for polycrystalline silicon wafers $(150(W)\times150(L)\times0.3(t))$, producing a carrying speed of 59.2 mm/s at a clearance of 0.3 mm between the stator and wafer. The carrying force when four stators acted on the wafer was $2\times10^{-3}N$. Thus, the new noncontact transportation system was demonstrated to be effective.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.392-399
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• 1997

In this study, the effect of the sintering temperature on the dielectric and piezoelectric properties of 0.5 wt% $MnO_{2}$-doped $0.125Pb(Mg_{1/2}Nb_{2/3})O_{3}-0.435PbTiO_{3}-0.44PbZrO_{3}$ ceramics were investigated aiming at ultrasonic motor applications. From experimental result, it was found that the optimal sintering temperature condition was at $1270^{\circ}C$. The sample sintered at $1270^{\circ}C$ had density of $7.72\;g/cm^{3}$, dielectric constant of 570, dielectric loss of 0.82%, remanent polarization of $19.18{\mu}C/cm^{2}$, coercive field of 9.63 kV/cm, electromechanical coupling factor of radial mode of 55.1%, mechanical quality factor of 886. Temperature and frequency dependence of dielectric constant and dielectric loss of the sintered sample at $1270^{\circ}C$ was also investigated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.329-330
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• 2006

본연구에서는 초음파 모터 등의 고출력 액츄에이터에 응용 가능한 $0.4Pb(Ni_{1/3}Nb_{2/3})O_3$-$0.6Pb(Zr_{0.405}Ti_{0.595})O_3$ + 0.25wt% $Fe_2O_3$ 조성시스템에 $MnO_2$ (0~1 wt.%)첨가하여 압전, 유전특성 및 미세구조에 관해 고찰하였다. 본조성을 $1125{\sim}1175^{\circ}C$ 온도에서 2시간 소결하여 시편을 제조하였으며 이의 결정구조 및 미세조직을 분석하였다. $MnO_2$ 첨가량 증가에 따라 압전 상수와 전기기계결함계수는 감소하였으며, 기계적 품질계수는 0.5 wt% 첨가시까지 증가하였으나 첨가량이 그 이상 증가함에 따라 감소하였다. 압전특성은 $1125^{\circ}C$에서 소결한 $MnO_2$ 0.5wt%조성에서 ${\varepsilon}r$ = 2040, kp = 0.66, $d_{33}$ = 504, Qm=438의 우수한 특성을 나타내었다.

• The Transactions of the Korean Institute of Power Electronics
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• v.3 no.3
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• pp.165-172
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• 1998

The electromechanical energy conversion conditioning and processing implementation in USM direct motion control system is generally divided into two power stages: the two-phase high-frequency ac power inversion stage for driving piezoelectric ceramic PZT transducer array off the USM stator and the mechanical thrust power conversion stage based on the frictional force between the piezo electric stator array and the rotary slider of the USM. However, the dynamic and steady-state mathematical modeling of the USM is extremely default from a theoretical point of view because it contains many complicated an nonlinear characteristics dependant on operation temperature. In +2$0^{\circ}C$~3$0^{\circ}C$, the operating characteristics of the USM has represented normal condition. But the other temperature, it has abnormal condition so that driving frequency, current and motor speed will be down. The recent USM has controller without temperature compensation. This study represents the fuzzy controller for speed compensation according to operating temperature by driving frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.330-331
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• 2005

본 논문에서는 카메라폰용 광학중(Optical zooming) 과 자동초점조절장치 (Auto Focusing, AF)에 쓰일 초음파모터를 제작하였다. 초음파모터의제작 및 시뮬레이션은 유한요소해석 프로그램인 ATILA 5.2.1 (Magsoft co.)를 사용하여 디자인설계에 따른 구동특성을 고찰하였고 제작된 초음파모터는 한쪽 면이 없는 사작형의 탄성체를 제작하였으며 탄성체의 양쪽 다리에 각각 압전체를 부착하였다. 또한 압전세라믹의 조성은 $0.9Pb(Zr_{0.51}Ti_{0.49})O_3-0.1Pb(Mn_{1/3}Nb_{1/3}Sb_{1/3})O_3$의 조성으로 설계하였고 시편의 제조는 7-layer로 적층하였다. 제작된 압전세라믹의 치수는 6*2*0.35$mm^3$(길이*폭*두께)로 제작하였다 또한 탄성체의 외형치수는 10*10*2$mm^3$로 제작하였으며 두께를 각각 0.3[mm], 0.5[mm], 0.8[mm]으로 변화시키며 제작하였다. 두께가 0.8[mm]인경우 공진주파수는 60.5[kHz]를 나타내었으며 초음파모터의 압전세라믹에 인가전압이 증가함에 따라 회전속도와 모터에 흐르는 전류는 증가하였다. 인가전압이 40[Vpp] 일 때 회전속도는 206[rpm] 이며 소비전력은 0.3[W]로 제작된 시편은 카메라폰용 광학중 및 자동초점조절장치시스템 분야에 응용이 가능하다.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.3
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• pp.309-316
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• 2011

This paper deals with the experimental study of the vibration suppression of the smart structures. First, a new high-speed active control system is presented using the DSP320C6713 microprocessor. A peripheral system developed is composed of a data acquisition system, A/D and D/A converters, piezoelectric (PZT) actuator/sensors, and drivers using PA 95 for fast data processing. Next, the processing time of the peripheral device is tested and the corresponding test results are provided. Since fast data processing is very important in the active vibration control of the structures, achieving the fast loop times of the control system is focused. The control algorithm using PPF in addition to FIR filter is implemented. Finally, numerous experiments were carried out on the aluminum plate to validate the superior performance of the vibration control system at different control loop times.

• Smart Structures and Systems
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• v.1 no.1
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• pp.13-27
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• 2005

Simultaneous precision positioning and vibration suppression of a reciprocating flexible manipulator is investigated in this paper. The flexible manipulator is driven by a multifunctional active strut with fuzzy logic controllers. The multifunctional active strut is a combination of a motor assembly and a piezoelectric stack actuator to simultaneously provide precision positioning and wide frequency bandwidth vibration suppression capabilities. First, the multifunctional active strut and the flexible manipulator are introduced, and their dynamic models are derived. A control strategy is then proposed, which includes a position controller and a vibration controller to achieve simultaneous precision positioning and vibration suppression of the flexible manipulator. Next, fuzzy logic control approach is presented to design a fuzzy logic position controller and a fuzzy logic vibration controller. Finally, experiments are conducted for the fuzzy logic controllers and the experimental results are compared with those from a PID control scheme consisting of a PID position controller and a PID vibration control. The comparison indicates that the fuzzy logic controller can easily handle the non-linearity in the strut and provide higher position accuracy and better vibration reduction with less control power consumption.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.757-760
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• 2004

Shaking beam을 이용한 초음파 선형모터는 모터 구동부에서 발생하는 타원궤적이 선형 slider 와 마찰이 되어 선형운동을 발생시킨다. 이러한 초음파 선형모터에서 설계변수는 모터의 효율과 추력(thrust force) 등 동특성을 결정한다. 특히 초음파 모터 동작부의 tip 과 선형 slider 의 contact point와 압착은 모터의 속도, 추력 동작 주파수, 효율에 직접적인 영향을 주는 중요한 parameter 로 작용된다. 본 연구에서는 모터와 선형 slider 의 압착과 contact point둥의 설계변수가 초음파 선형 모터의 성능에 주는 영향을 고찰하였다. 모터으구동부와 선형 slider 사이의 압착력 ($10N{\sim}50N$)과 4가지 곡률을 갖는 tip을 설계변수로 취하였다. Tip 의 형태에 따른 곡률과 모터 구동부와 선형 slider 사이의 압착력 변화에 따른 모터의 동작특성이 변화되는 것을 확인할 수 있었다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.5
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• pp.1573-1581
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• 1996

This paper present as experimental demonstratio of DSP and a sensory actuator that is used to actively control sound transmission/radiation through a vibrating plate. A plane acoustic wave incident on a clamped, thin circular plate was used as a noise source, and a sensory actuator bounded to the plate was used to control and sense vibration of the plate. The sound transmission reduction problem was tranformed as a structural vibration control problem that actively control the structural vibration modes coupled to acoustic modes. The results show that the first structural vibration mode is controlled with a reduction of 78 percent in the displacement and velocity of the plate. This corresponds to a 13dB reduction in the acoustic response. These experimental results indicate that a sensory actuator bounded to the plate can be employed to attenuate the sound transmitted to radiated from the plate.